10/5/2011	10:24:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/5/2011	10:24:47 AM	Recipe started at 10:24 AM
10/5/2011	10:24:47 AM	Helium valve closed
10/5/2011	10:24:47 AM	H2 valve closed
10/5/2011	10:24:47 AM	BCl3 valve closed
10/5/2011	10:24:47 AM	PH3 valve closed
10/5/2011	10:24:47 AM	SiCl4 pre valve closed
10/5/2011	10:24:47 AM	SiCl4 post valve closed
10/5/2011	10:24:47 AM	Main Vac valve closed
10/5/2011	10:24:47 AM	Bypass valve closed
10/5/2011	10:24:47 AM	Bubbler valve closed
10/5/2011	10:24:47 AM	Helium MFC set to  0.000000
10/5/2011	10:24:47 AM	H2 MFC set to  0.000000
10/5/2011	10:24:47 AM	BCl3 MFC set to  0.000000
10/5/2011	10:24:47 AM	PHl3 MFC set to  0.000000
10/5/2011	10:24:47 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:24:47 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:24:47 AM	Tube furnace set to 0
10/5/2011	10:24:50 AM	H2 valve closed
10/5/2011	10:24:50 AM	BCl3 valve closed
10/5/2011	10:24:50 AM	PH3 valve closed
10/5/2011	10:24:50 AM	SiCl4 pre valve closed
10/5/2011	10:24:50 AM	SiCl4 post valve closed
10/5/2011	10:24:50 AM	Main Vac valve closed
10/5/2011	10:24:50 AM	Bypass valve closed
10/5/2011	10:24:50 AM	Bubbler valve closed
10/5/2011	10:24:50 AM	Helium valve opened
10/5/2011	10:24:50 AM	Helium MFC set to  500.000000
10/5/2011	10:24:50 AM	H2 MFC set to  0.000000
10/5/2011	10:24:50 AM	BCl3 MFC set to  0.000000
10/5/2011	10:24:50 AM	PHl3 MFC set to  0.000000
10/5/2011	10:24:50 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:24:50 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:24:51 AM	Tube furnace set to 0
10/5/2011	10:25:57 AM	Helium valve closed
10/5/2011	10:25:57 AM	H2 valve closed
10/5/2011	10:25:57 AM	BCl3 valve closed
10/5/2011	10:25:57 AM	PH3 valve closed
10/5/2011	10:25:57 AM	SiCl4 pre valve closed
10/5/2011	10:25:57 AM	SiCl4 post valve closed
10/5/2011	10:25:57 AM	Main Vac valve closed
10/5/2011	10:25:57 AM	Bypass valve closed
10/5/2011	10:25:57 AM	Bubbler valve closed
10/5/2011	10:25:57 AM	Helium MFC set to  0.000000
10/5/2011	10:25:57 AM	H2 MFC set to  0.000000
10/5/2011	10:25:57 AM	BCl3 MFC set to  0.000000
10/5/2011	10:25:57 AM	PHl3 MFC set to  0.000000
10/5/2011	10:25:57 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:25:57 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:25:57 AM	Tube furnace set to 0
10/5/2011	10:25:58 AM	Run finished at 10:25 AM
10/5/2011	10:25:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/5/2011	10:45:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2011	10:45:08 AM	Recipe started at 10:45 AM
10/5/2011	10:45:08 AM	Helium valve closed
10/5/2011	10:45:08 AM	H2 valve closed
10/5/2011	10:45:08 AM	BCl3 valve closed
10/5/2011	10:45:08 AM	PH3 valve closed
10/5/2011	10:45:08 AM	SiCl4 pre valve closed
10/5/2011	10:45:08 AM	SiCl4 post valve closed
10/5/2011	10:45:08 AM	Main Vac valve closed
10/5/2011	10:45:08 AM	Bubbler valve closed
10/5/2011	10:45:08 AM	Bypass valve opened
10/5/2011	10:45:08 AM	Helium MFC set to  0.000000
10/5/2011	10:45:08 AM	H2 MFC set to  0.000000
10/5/2011	10:45:08 AM	BCl3 MFC set to  0.000000
10/5/2011	10:45:08 AM	PHl3 MFC set to  0.000000
10/5/2011	10:45:08 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:45:08 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:45:08 AM	Tube furnace set to 0
10/5/2011	10:46:26 AM	Helium valve closed
10/5/2011	10:46:26 AM	H2 valve closed
10/5/2011	10:46:26 AM	BCl3 valve closed
10/5/2011	10:46:26 AM	PH3 valve closed
10/5/2011	10:46:26 AM	SiCl4 pre valve closed
10/5/2011	10:46:26 AM	SiCl4 post valve closed
10/5/2011	10:46:26 AM	Main Vac valve closed
10/5/2011	10:46:26 AM	Bubbler valve closed
10/5/2011	10:46:26 AM	Bypass valve opened
10/5/2011	10:46:26 AM	Helium MFC set to  0.000000
10/5/2011	10:46:26 AM	H2 MFC set to  0.000000
10/5/2011	10:46:26 AM	BCl3 MFC set to  0.000000
10/5/2011	10:46:26 AM	PHl3 MFC set to  0.000000
10/5/2011	10:46:26 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:46:26 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:46:26 AM	Tube furnace set to 0
10/5/2011	10:47:26 AM	Helium valve closed
10/5/2011	10:47:26 AM	H2 valve closed
10/5/2011	10:47:26 AM	BCl3 valve closed
10/5/2011	10:47:26 AM	PH3 valve closed
10/5/2011	10:47:26 AM	SiCl4 pre valve closed
10/5/2011	10:47:26 AM	SiCl4 post valve closed
10/5/2011	10:47:26 AM	Bypass valve closed
10/5/2011	10:47:26 AM	Bubbler valve closed
10/5/2011	10:47:26 AM	Main Vac valve opened
10/5/2011	10:47:26 AM	Helium MFC set to  0.000000
10/5/2011	10:47:26 AM	H2 MFC set to  0.000000
10/5/2011	10:47:26 AM	BCl3 MFC set to  0.000000
10/5/2011	10:47:26 AM	PHl3 MFC set to  0.000000
10/5/2011	10:47:26 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:47:26 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:47:26 AM	Tube furnace set to 0
10/5/2011	10:47:27 AM	Run finished at 10:47 AM
10/5/2011	10:47:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2011	10:47:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/5/2011	10:48:08 AM	Recipe started at 10:48 AM
10/5/2011	10:48:08 AM	Helium valve closed
10/5/2011	10:48:08 AM	H2 valve closed
10/5/2011	10:48:08 AM	BCl3 valve closed
10/5/2011	10:48:08 AM	PH3 valve closed
10/5/2011	10:48:08 AM	SiCl4 pre valve closed
10/5/2011	10:48:08 AM	SiCl4 post valve closed
10/5/2011	10:48:08 AM	Main Vac valve closed
10/5/2011	10:48:08 AM	Bubbler valve closed
10/5/2011	10:48:08 AM	Bypass valve opened
10/5/2011	10:48:08 AM	Helium MFC set to  0.000000
10/5/2011	10:48:08 AM	H2 MFC set to  0.000000
10/5/2011	10:48:08 AM	BCl3 MFC set to  0.000000
10/5/2011	10:48:08 AM	PHl3 MFC set to  0.000000
10/5/2011	10:48:08 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:48:08 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:48:08 AM	Tube furnace set to 0
10/5/2011	10:48:09 AM	Helium valve closed
10/5/2011	10:48:09 AM	H2 valve closed
10/5/2011	10:48:09 AM	BCl3 valve closed
10/5/2011	10:48:09 AM	PH3 valve closed
10/5/2011	10:48:09 AM	SiCl4 pre valve closed
10/5/2011	10:48:09 AM	SiCl4 post valve closed
10/5/2011	10:48:09 AM	Main Vac valve closed
10/5/2011	10:48:09 AM	Bubbler valve closed
10/5/2011	10:48:09 AM	Bypass valve opened
10/5/2011	10:48:09 AM	Helium MFC set to  0.000000
10/5/2011	10:48:09 AM	H2 MFC set to  0.000000
10/5/2011	10:48:09 AM	BCl3 MFC set to  0.000000
10/5/2011	10:48:09 AM	PHl3 MFC set to  0.000000
10/5/2011	10:48:09 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:48:09 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:48:09 AM	Tube furnace set to 0
10/5/2011	10:48:39 AM	Helium valve closed
10/5/2011	10:48:39 AM	H2 valve closed
10/5/2011	10:48:39 AM	BCl3 valve closed
10/5/2011	10:48:39 AM	PH3 valve closed
10/5/2011	10:48:39 AM	SiCl4 pre valve closed
10/5/2011	10:48:39 AM	SiCl4 post valve closed
10/5/2011	10:48:39 AM	Bypass valve closed
10/5/2011	10:48:39 AM	Bubbler valve closed
10/5/2011	10:48:39 AM	Main Vac valve opened
10/5/2011	10:48:39 AM	Helium MFC set to  0.000000
10/5/2011	10:48:39 AM	H2 MFC set to  0.000000
10/5/2011	10:48:39 AM	BCl3 MFC set to  0.000000
10/5/2011	10:48:39 AM	PHl3 MFC set to  0.000000
10/5/2011	10:48:39 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:48:39 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:48:39 AM	Tube furnace set to 0
10/5/2011	10:49:09 AM	H2 valve closed
10/5/2011	10:49:09 AM	BCl3 valve closed
10/5/2011	10:49:09 AM	PH3 valve closed
10/5/2011	10:49:09 AM	SiCl4 pre valve closed
10/5/2011	10:49:09 AM	SiCl4 post valve closed
10/5/2011	10:49:09 AM	Bypass valve closed
10/5/2011	10:49:09 AM	Bubbler valve closed
10/5/2011	10:49:09 AM	Helium valve opened
10/5/2011	10:49:09 AM	Main Vac valve opened
10/5/2011	10:49:09 AM	Helium MFC set to  20.000000
10/5/2011	10:49:09 AM	H2 MFC set to  0.000000
10/5/2011	10:49:09 AM	BCl3 MFC set to  0.000000
10/5/2011	10:49:09 AM	PHl3 MFC set to  0.000000
10/5/2011	10:49:09 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:49:09 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:49:09 AM	Tube furnace set to 0
10/5/2011	10:49:39 AM	Helium valve closed
10/5/2011	10:49:39 AM	H2 valve closed
10/5/2011	10:49:39 AM	BCl3 valve closed
10/5/2011	10:49:39 AM	PH3 valve closed
10/5/2011	10:49:39 AM	SiCl4 pre valve closed
10/5/2011	10:49:39 AM	SiCl4 post valve closed
10/5/2011	10:49:39 AM	Bypass valve closed
10/5/2011	10:49:39 AM	Bubbler valve closed
10/5/2011	10:49:39 AM	Main Vac valve opened
10/5/2011	10:49:39 AM	Helium MFC set to  0.000000
10/5/2011	10:49:39 AM	H2 MFC set to  0.000000
10/5/2011	10:49:39 AM	BCl3 MFC set to  0.000000
10/5/2011	10:49:39 AM	PHl3 MFC set to  0.000000
10/5/2011	10:49:39 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:49:39 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:49:39 AM	Tube furnace set to 0
10/5/2011	10:50:09 AM	H2 valve closed
10/5/2011	10:50:09 AM	BCl3 valve closed
10/5/2011	10:50:09 AM	PH3 valve closed
10/5/2011	10:50:09 AM	SiCl4 pre valve closed
10/5/2011	10:50:09 AM	SiCl4 post valve closed
10/5/2011	10:50:09 AM	Bypass valve closed
10/5/2011	10:50:09 AM	Bubbler valve closed
10/5/2011	10:50:09 AM	Helium valve opened
10/5/2011	10:50:09 AM	Main Vac valve opened
10/5/2011	10:50:09 AM	Helium MFC set to  20.000000
10/5/2011	10:50:09 AM	H2 MFC set to  0.000000
10/5/2011	10:50:09 AM	BCl3 MFC set to  0.000000
10/5/2011	10:50:09 AM	PHl3 MFC set to  0.000000
10/5/2011	10:50:09 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:50:09 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:50:10 AM	Tube furnace set to 0
10/5/2011	10:50:40 AM	Helium valve closed
10/5/2011	10:50:40 AM	H2 valve closed
10/5/2011	10:50:40 AM	BCl3 valve closed
10/5/2011	10:50:40 AM	PH3 valve closed
10/5/2011	10:50:40 AM	SiCl4 pre valve closed
10/5/2011	10:50:40 AM	SiCl4 post valve closed
10/5/2011	10:50:40 AM	Bypass valve closed
10/5/2011	10:50:40 AM	Bubbler valve closed
10/5/2011	10:50:40 AM	Main Vac valve opened
10/5/2011	10:50:40 AM	Helium MFC set to  0.000000
10/5/2011	10:50:40 AM	H2 MFC set to  0.000000
10/5/2011	10:50:40 AM	BCl3 MFC set to  0.000000
10/5/2011	10:50:40 AM	PHl3 MFC set to  0.000000
10/5/2011	10:50:40 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:50:40 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:50:40 AM	Tube furnace set to 0
10/5/2011	10:51:10 AM	H2 valve closed
10/5/2011	10:51:10 AM	BCl3 valve closed
10/5/2011	10:51:10 AM	PH3 valve closed
10/5/2011	10:51:10 AM	SiCl4 pre valve closed
10/5/2011	10:51:10 AM	SiCl4 post valve closed
10/5/2011	10:51:10 AM	Bypass valve closed
10/5/2011	10:51:10 AM	Bubbler valve closed
10/5/2011	10:51:10 AM	Helium valve opened
10/5/2011	10:51:10 AM	Main Vac valve opened
10/5/2011	10:51:10 AM	Helium MFC set to  20.000000
10/5/2011	10:51:10 AM	H2 MFC set to  0.000000
10/5/2011	10:51:10 AM	BCl3 MFC set to  0.000000
10/5/2011	10:51:10 AM	PHl3 MFC set to  0.000000
10/5/2011	10:51:10 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:51:10 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:51:10 AM	Tube furnace set to 0
10/5/2011	10:51:40 AM	Helium valve closed
10/5/2011	10:51:40 AM	H2 valve closed
10/5/2011	10:51:40 AM	BCl3 valve closed
10/5/2011	10:51:40 AM	PH3 valve closed
10/5/2011	10:51:40 AM	SiCl4 pre valve closed
10/5/2011	10:51:40 AM	SiCl4 post valve closed
10/5/2011	10:51:40 AM	Bypass valve closed
10/5/2011	10:51:40 AM	Bubbler valve closed
10/5/2011	10:51:40 AM	Main Vac valve opened
10/5/2011	10:51:40 AM	Helium MFC set to  0.000000
10/5/2011	10:51:40 AM	H2 MFC set to  0.000000
10/5/2011	10:51:40 AM	BCl3 MFC set to  0.000000
10/5/2011	10:51:40 AM	PHl3 MFC set to  0.000000
10/5/2011	10:51:40 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:51:40 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:51:40 AM	Tube furnace set to 0
10/5/2011	10:52:10 AM	H2 valve closed
10/5/2011	10:52:10 AM	BCl3 valve closed
10/5/2011	10:52:10 AM	PH3 valve closed
10/5/2011	10:52:10 AM	SiCl4 pre valve closed
10/5/2011	10:52:10 AM	SiCl4 post valve closed
10/5/2011	10:52:10 AM	Bypass valve closed
10/5/2011	10:52:10 AM	Bubbler valve closed
10/5/2011	10:52:10 AM	Helium valve opened
10/5/2011	10:52:10 AM	Main Vac valve opened
10/5/2011	10:52:10 AM	Helium MFC set to  20.000000
10/5/2011	10:52:10 AM	H2 MFC set to  0.000000
10/5/2011	10:52:10 AM	BCl3 MFC set to  0.000000
10/5/2011	10:52:10 AM	PHl3 MFC set to  0.000000
10/5/2011	10:52:10 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:52:10 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:52:10 AM	Tube furnace set to 0
10/5/2011	10:52:40 AM	Helium valve closed
10/5/2011	10:52:40 AM	H2 valve closed
10/5/2011	10:52:40 AM	BCl3 valve closed
10/5/2011	10:52:40 AM	PH3 valve closed
10/5/2011	10:52:40 AM	SiCl4 pre valve closed
10/5/2011	10:52:40 AM	SiCl4 post valve closed
10/5/2011	10:52:40 AM	Bypass valve closed
10/5/2011	10:52:40 AM	Bubbler valve closed
10/5/2011	10:52:40 AM	Main Vac valve opened
10/5/2011	10:52:40 AM	Helium MFC set to  0.000000
10/5/2011	10:52:40 AM	H2 MFC set to  0.000000
10/5/2011	10:52:40 AM	BCl3 MFC set to  0.000000
10/5/2011	10:52:40 AM	PHl3 MFC set to  0.000000
10/5/2011	10:52:40 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:52:40 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:52:41 AM	Tube furnace set to 0
10/5/2011	10:53:11 AM	H2 valve closed
10/5/2011	10:53:11 AM	BCl3 valve closed
10/5/2011	10:53:11 AM	PH3 valve closed
10/5/2011	10:53:11 AM	SiCl4 pre valve closed
10/5/2011	10:53:11 AM	SiCl4 post valve closed
10/5/2011	10:53:11 AM	Bypass valve closed
10/5/2011	10:53:11 AM	Bubbler valve closed
10/5/2011	10:53:11 AM	Helium valve opened
10/5/2011	10:53:11 AM	Main Vac valve opened
10/5/2011	10:53:11 AM	Helium MFC set to  20.000000
10/5/2011	10:53:11 AM	H2 MFC set to  0.000000
10/5/2011	10:53:11 AM	BCl3 MFC set to  0.000000
10/5/2011	10:53:11 AM	PHl3 MFC set to  0.000000
10/5/2011	10:53:11 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:53:11 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:53:11 AM	Tube furnace set to 0
10/5/2011	10:53:41 AM	Helium valve closed
10/5/2011	10:53:41 AM	H2 valve closed
10/5/2011	10:53:41 AM	BCl3 valve closed
10/5/2011	10:53:41 AM	PH3 valve closed
10/5/2011	10:53:41 AM	SiCl4 pre valve closed
10/5/2011	10:53:41 AM	SiCl4 post valve closed
10/5/2011	10:53:41 AM	Bypass valve closed
10/5/2011	10:53:41 AM	Bubbler valve closed
10/5/2011	10:53:41 AM	Main Vac valve opened
10/5/2011	10:53:41 AM	Helium MFC set to  0.000000
10/5/2011	10:53:41 AM	H2 MFC set to  0.000000
10/5/2011	10:53:41 AM	BCl3 MFC set to  0.000000
10/5/2011	10:53:41 AM	PHl3 MFC set to  0.000000
10/5/2011	10:53:41 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:53:41 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:53:41 AM	Tube furnace set to 0
10/5/2011	10:54:11 AM	H2 valve closed
10/5/2011	10:54:11 AM	BCl3 valve closed
10/5/2011	10:54:11 AM	PH3 valve closed
10/5/2011	10:54:11 AM	SiCl4 pre valve closed
10/5/2011	10:54:11 AM	SiCl4 post valve closed
10/5/2011	10:54:11 AM	Bypass valve closed
10/5/2011	10:54:11 AM	Bubbler valve closed
10/5/2011	10:54:11 AM	Helium valve opened
10/5/2011	10:54:11 AM	Main Vac valve opened
10/5/2011	10:54:11 AM	Helium MFC set to  20.000000
10/5/2011	10:54:11 AM	H2 MFC set to  0.000000
10/5/2011	10:54:11 AM	BCl3 MFC set to  0.000000
10/5/2011	10:54:11 AM	PHl3 MFC set to  0.000000
10/5/2011	10:54:11 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:54:11 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:54:11 AM	Tube furnace set to 0
10/5/2011	10:54:41 AM	Helium valve closed
10/5/2011	10:54:41 AM	H2 valve closed
10/5/2011	10:54:41 AM	BCl3 valve closed
10/5/2011	10:54:41 AM	PH3 valve closed
10/5/2011	10:54:41 AM	SiCl4 pre valve closed
10/5/2011	10:54:41 AM	SiCl4 post valve closed
10/5/2011	10:54:41 AM	Bypass valve closed
10/5/2011	10:54:41 AM	Bubbler valve closed
10/5/2011	10:54:41 AM	Main Vac valve opened
10/5/2011	10:54:41 AM	Helium MFC set to  0.000000
10/5/2011	10:54:41 AM	H2 MFC set to  0.000000
10/5/2011	10:54:41 AM	BCl3 MFC set to  0.000000
10/5/2011	10:54:41 AM	PHl3 MFC set to  0.000000
10/5/2011	10:54:41 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:54:41 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:54:41 AM	Tube furnace set to 0
10/5/2011	10:55:11 AM	H2 valve closed
10/5/2011	10:55:11 AM	BCl3 valve closed
10/5/2011	10:55:11 AM	PH3 valve closed
10/5/2011	10:55:11 AM	SiCl4 pre valve closed
10/5/2011	10:55:11 AM	SiCl4 post valve closed
10/5/2011	10:55:11 AM	Bypass valve closed
10/5/2011	10:55:11 AM	Bubbler valve closed
10/5/2011	10:55:11 AM	Helium valve opened
10/5/2011	10:55:11 AM	Main Vac valve opened
10/5/2011	10:55:11 AM	Helium MFC set to  20.000000
10/5/2011	10:55:11 AM	H2 MFC set to  0.000000
10/5/2011	10:55:11 AM	BCl3 MFC set to  0.000000
10/5/2011	10:55:11 AM	PHl3 MFC set to  0.000000
10/5/2011	10:55:11 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:55:11 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:55:12 AM	Tube furnace set to 0
10/5/2011	10:55:42 AM	Helium valve closed
10/5/2011	10:55:42 AM	H2 valve closed
10/5/2011	10:55:42 AM	BCl3 valve closed
10/5/2011	10:55:42 AM	PH3 valve closed
10/5/2011	10:55:42 AM	SiCl4 pre valve closed
10/5/2011	10:55:42 AM	SiCl4 post valve closed
10/5/2011	10:55:42 AM	Bypass valve closed
10/5/2011	10:55:42 AM	Bubbler valve closed
10/5/2011	10:55:42 AM	Main Vac valve opened
10/5/2011	10:55:42 AM	Helium MFC set to  0.000000
10/5/2011	10:55:42 AM	H2 MFC set to  0.000000
10/5/2011	10:55:42 AM	BCl3 MFC set to  0.000000
10/5/2011	10:55:42 AM	PHl3 MFC set to  0.000000
10/5/2011	10:55:42 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:55:42 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:55:42 AM	Tube furnace set to 0
10/5/2011	10:56:12 AM	H2 valve closed
10/5/2011	10:56:12 AM	BCl3 valve closed
10/5/2011	10:56:12 AM	PH3 valve closed
10/5/2011	10:56:12 AM	SiCl4 pre valve closed
10/5/2011	10:56:12 AM	SiCl4 post valve closed
10/5/2011	10:56:12 AM	Bypass valve closed
10/5/2011	10:56:12 AM	Bubbler valve closed
10/5/2011	10:56:12 AM	Helium valve opened
10/5/2011	10:56:12 AM	Main Vac valve opened
10/5/2011	10:56:12 AM	Helium MFC set to  20.000000
10/5/2011	10:56:12 AM	H2 MFC set to  0.000000
10/5/2011	10:56:12 AM	BCl3 MFC set to  0.000000
10/5/2011	10:56:12 AM	PHl3 MFC set to  0.000000
10/5/2011	10:56:12 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:56:12 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:56:12 AM	Tube furnace set to 0
10/5/2011	10:56:42 AM	Helium valve closed
10/5/2011	10:56:42 AM	H2 valve closed
10/5/2011	10:56:42 AM	BCl3 valve closed
10/5/2011	10:56:42 AM	PH3 valve closed
10/5/2011	10:56:42 AM	SiCl4 pre valve closed
10/5/2011	10:56:42 AM	SiCl4 post valve closed
10/5/2011	10:56:42 AM	Bypass valve closed
10/5/2011	10:56:42 AM	Bubbler valve closed
10/5/2011	10:56:42 AM	Main Vac valve opened
10/5/2011	10:56:42 AM	Helium MFC set to  0.000000
10/5/2011	10:56:42 AM	H2 MFC set to  0.000000
10/5/2011	10:56:42 AM	BCl3 MFC set to  0.000000
10/5/2011	10:56:42 AM	PHl3 MFC set to  0.000000
10/5/2011	10:56:42 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:56:42 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:56:42 AM	Tube furnace set to 0
10/5/2011	10:57:12 AM	H2 valve closed
10/5/2011	10:57:12 AM	BCl3 valve closed
10/5/2011	10:57:12 AM	PH3 valve closed
10/5/2011	10:57:12 AM	SiCl4 pre valve closed
10/5/2011	10:57:12 AM	SiCl4 post valve closed
10/5/2011	10:57:12 AM	Bypass valve closed
10/5/2011	10:57:12 AM	Bubbler valve closed
10/5/2011	10:57:12 AM	Helium valve opened
10/5/2011	10:57:12 AM	Main Vac valve opened
10/5/2011	10:57:12 AM	Helium MFC set to  20.000000
10/5/2011	10:57:12 AM	H2 MFC set to  0.000000
10/5/2011	10:57:12 AM	BCl3 MFC set to  0.000000
10/5/2011	10:57:12 AM	PHl3 MFC set to  0.000000
10/5/2011	10:57:12 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:57:12 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:57:12 AM	Tube furnace set to 0
10/5/2011	10:57:42 AM	Helium valve closed
10/5/2011	10:57:42 AM	H2 valve closed
10/5/2011	10:57:42 AM	BCl3 valve closed
10/5/2011	10:57:43 AM	PH3 valve closed
10/5/2011	10:57:43 AM	SiCl4 pre valve closed
10/5/2011	10:57:43 AM	SiCl4 post valve closed
10/5/2011	10:57:43 AM	Bypass valve closed
10/5/2011	10:57:43 AM	Bubbler valve closed
10/5/2011	10:57:43 AM	Main Vac valve opened
10/5/2011	10:57:43 AM	Helium MFC set to  0.000000
10/5/2011	10:57:43 AM	H2 MFC set to  0.000000
10/5/2011	10:57:43 AM	BCl3 MFC set to  0.000000
10/5/2011	10:57:43 AM	PHl3 MFC set to  0.000000
10/5/2011	10:57:43 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:57:43 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:57:43 AM	Tube furnace set to 0
10/5/2011	10:58:13 AM	H2 valve closed
10/5/2011	10:58:13 AM	BCl3 valve closed
10/5/2011	10:58:13 AM	PH3 valve closed
10/5/2011	10:58:13 AM	SiCl4 pre valve closed
10/5/2011	10:58:13 AM	SiCl4 post valve closed
10/5/2011	10:58:13 AM	Bypass valve closed
10/5/2011	10:58:13 AM	Bubbler valve closed
10/5/2011	10:58:13 AM	Helium valve opened
10/5/2011	10:58:13 AM	Main Vac valve opened
10/5/2011	10:58:13 AM	Helium MFC set to  20.000000
10/5/2011	10:58:13 AM	H2 MFC set to  0.000000
10/5/2011	10:58:13 AM	BCl3 MFC set to  0.000000
10/5/2011	10:58:13 AM	PHl3 MFC set to  0.000000
10/5/2011	10:58:13 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:58:13 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:58:13 AM	Tube furnace set to 0
10/5/2011	10:58:43 AM	Helium valve closed
10/5/2011	10:58:43 AM	H2 valve closed
10/5/2011	10:58:43 AM	BCl3 valve closed
10/5/2011	10:58:43 AM	PH3 valve closed
10/5/2011	10:58:43 AM	SiCl4 pre valve closed
10/5/2011	10:58:43 AM	SiCl4 post valve closed
10/5/2011	10:58:43 AM	Bypass valve closed
10/5/2011	10:58:43 AM	Bubbler valve closed
10/5/2011	10:58:43 AM	Main Vac valve opened
10/5/2011	10:58:43 AM	Helium MFC set to  0.000000
10/5/2011	10:58:43 AM	H2 MFC set to  0.000000
10/5/2011	10:58:43 AM	BCl3 MFC set to  0.000000
10/5/2011	10:58:43 AM	PHl3 MFC set to  0.000000
10/5/2011	10:58:43 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:58:43 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:58:43 AM	Tube furnace set to 0
10/5/2011	10:58:44 AM	Run finished at 10:58 AM
10/5/2011	10:58:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/5/2011	10:59:39 AM	Recipe started at 10:59 AM
10/5/2011	10:59:39 AM	Helium valve closed
10/5/2011	10:59:39 AM	H2 valve closed
10/5/2011	10:59:39 AM	BCl3 valve closed
10/5/2011	10:59:39 AM	PH3 valve closed
10/5/2011	10:59:39 AM	SiCl4 pre valve closed
10/5/2011	10:59:39 AM	SiCl4 post valve closed
10/5/2011	10:59:39 AM	Bypass valve closed
10/5/2011	10:59:39 AM	Bubbler valve closed
10/5/2011	10:59:39 AM	Main Vac valve opened
10/5/2011	10:59:39 AM	Helium MFC set to  0.000000
10/5/2011	10:59:39 AM	H2 MFC set to  0.000000
10/5/2011	10:59:39 AM	BCl3 MFC set to  0.000000
10/5/2011	10:59:39 AM	PHl3 MFC set to  0.000000
10/5/2011	10:59:39 AM	SiCl4 MFC set to  0.000000
10/5/2011	10:59:39 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:59:39 AM	Tube furnace set to 100
10/5/2011	11:00:09 AM	H2 valve closed
10/5/2011	11:00:09 AM	BCl3 valve closed
10/5/2011	11:00:09 AM	PH3 valve closed
10/5/2011	11:00:09 AM	SiCl4 pre valve closed
10/5/2011	11:00:09 AM	SiCl4 post valve closed
10/5/2011	11:00:09 AM	Bypass valve closed
10/5/2011	11:00:09 AM	Bubbler valve closed
10/5/2011	11:00:09 AM	Helium valve opened
10/5/2011	11:00:09 AM	Main Vac valve opened
10/5/2011	11:00:09 AM	Helium MFC set to  20.000000
10/5/2011	11:00:09 AM	H2 MFC set to  0.000000
10/5/2011	11:00:09 AM	BCl3 MFC set to  0.000000
10/5/2011	11:00:09 AM	PHl3 MFC set to  0.000000
10/5/2011	11:00:09 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:00:09 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:00:09 AM	Tube furnace set to 100
10/5/2011	11:00:39 AM	Helium valve closed
10/5/2011	11:00:39 AM	H2 valve closed
10/5/2011	11:00:39 AM	BCl3 valve closed
10/5/2011	11:00:39 AM	PH3 valve closed
10/5/2011	11:00:39 AM	SiCl4 pre valve closed
10/5/2011	11:00:39 AM	SiCl4 post valve closed
10/5/2011	11:00:39 AM	Bypass valve closed
10/5/2011	11:00:39 AM	Bubbler valve closed
10/5/2011	11:00:39 AM	Main Vac valve opened
10/5/2011	11:00:39 AM	Helium MFC set to  0.000000
10/5/2011	11:00:39 AM	H2 MFC set to  0.000000
10/5/2011	11:00:39 AM	BCl3 MFC set to  0.000000
10/5/2011	11:00:39 AM	PHl3 MFC set to  0.000000
10/5/2011	11:00:39 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:00:39 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:00:39 AM	Tube furnace set to 100
10/5/2011	11:01:09 AM	H2 valve closed
10/5/2011	11:01:09 AM	BCl3 valve closed
10/5/2011	11:01:09 AM	PH3 valve closed
10/5/2011	11:01:09 AM	SiCl4 pre valve closed
10/5/2011	11:01:09 AM	SiCl4 post valve closed
10/5/2011	11:01:09 AM	Bypass valve closed
10/5/2011	11:01:09 AM	Bubbler valve closed
10/5/2011	11:01:09 AM	Helium valve opened
10/5/2011	11:01:09 AM	Main Vac valve opened
10/5/2011	11:01:09 AM	Helium MFC set to  20.000000
10/5/2011	11:01:09 AM	H2 MFC set to  0.000000
10/5/2011	11:01:09 AM	BCl3 MFC set to  0.000000
10/5/2011	11:01:09 AM	PHl3 MFC set to  0.000000
10/5/2011	11:01:09 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:01:09 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:01:09 AM	Tube furnace set to 100
10/5/2011	11:01:39 AM	Helium valve closed
10/5/2011	11:01:39 AM	H2 valve closed
10/5/2011	11:01:39 AM	BCl3 valve closed
10/5/2011	11:01:39 AM	PH3 valve closed
10/5/2011	11:01:39 AM	SiCl4 pre valve closed
10/5/2011	11:01:39 AM	SiCl4 post valve closed
10/5/2011	11:01:39 AM	Bypass valve closed
10/5/2011	11:01:39 AM	Bubbler valve closed
10/5/2011	11:01:39 AM	Main Vac valve opened
10/5/2011	11:01:39 AM	Helium MFC set to  0.000000
10/5/2011	11:01:39 AM	H2 MFC set to  0.000000
10/5/2011	11:01:39 AM	BCl3 MFC set to  0.000000
10/5/2011	11:01:39 AM	PHl3 MFC set to  0.000000
10/5/2011	11:01:39 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:01:39 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:01:40 AM	Tube furnace set to 100
10/5/2011	11:02:10 AM	H2 valve closed
10/5/2011	11:02:10 AM	BCl3 valve closed
10/5/2011	11:02:10 AM	PH3 valve closed
10/5/2011	11:02:10 AM	SiCl4 pre valve closed
10/5/2011	11:02:10 AM	SiCl4 post valve closed
10/5/2011	11:02:10 AM	Bypass valve closed
10/5/2011	11:02:10 AM	Bubbler valve closed
10/5/2011	11:02:10 AM	Helium valve opened
10/5/2011	11:02:10 AM	Main Vac valve opened
10/5/2011	11:02:10 AM	Helium MFC set to  20.000000
10/5/2011	11:02:10 AM	H2 MFC set to  0.000000
10/5/2011	11:02:10 AM	BCl3 MFC set to  0.000000
10/5/2011	11:02:10 AM	PHl3 MFC set to  0.000000
10/5/2011	11:02:10 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:02:10 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:02:10 AM	Tube furnace set to 100
10/5/2011	11:02:40 AM	Helium valve closed
10/5/2011	11:02:40 AM	H2 valve closed
10/5/2011	11:02:40 AM	BCl3 valve closed
10/5/2011	11:02:40 AM	PH3 valve closed
10/5/2011	11:02:40 AM	SiCl4 pre valve closed
10/5/2011	11:02:40 AM	SiCl4 post valve closed
10/5/2011	11:02:40 AM	Bypass valve closed
10/5/2011	11:02:40 AM	Bubbler valve closed
10/5/2011	11:02:40 AM	Main Vac valve opened
10/5/2011	11:02:40 AM	Helium MFC set to  0.000000
10/5/2011	11:02:40 AM	H2 MFC set to  0.000000
10/5/2011	11:02:40 AM	BCl3 MFC set to  0.000000
10/5/2011	11:02:40 AM	PHl3 MFC set to  0.000000
10/5/2011	11:02:40 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:02:40 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:02:40 AM	Tube furnace set to 100
10/5/2011	11:03:10 AM	H2 valve closed
10/5/2011	11:03:10 AM	BCl3 valve closed
10/5/2011	11:03:10 AM	PH3 valve closed
10/5/2011	11:03:10 AM	SiCl4 pre valve closed
10/5/2011	11:03:10 AM	SiCl4 post valve closed
10/5/2011	11:03:10 AM	Bypass valve closed
10/5/2011	11:03:10 AM	Bubbler valve closed
10/5/2011	11:03:10 AM	Helium valve opened
10/5/2011	11:03:10 AM	Main Vac valve opened
10/5/2011	11:03:10 AM	Helium MFC set to  20.000000
10/5/2011	11:03:10 AM	H2 MFC set to  0.000000
10/5/2011	11:03:10 AM	BCl3 MFC set to  0.000000
10/5/2011	11:03:10 AM	PHl3 MFC set to  0.000000
10/5/2011	11:03:10 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:03:10 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:03:10 AM	Tube furnace set to 100
10/5/2011	11:03:40 AM	Helium valve closed
10/5/2011	11:03:40 AM	H2 valve closed
10/5/2011	11:03:40 AM	BCl3 valve closed
10/5/2011	11:03:40 AM	PH3 valve closed
10/5/2011	11:03:40 AM	SiCl4 pre valve closed
10/5/2011	11:03:40 AM	SiCl4 post valve closed
10/5/2011	11:03:40 AM	Bypass valve closed
10/5/2011	11:03:40 AM	Bubbler valve closed
10/5/2011	11:03:40 AM	Main Vac valve opened
10/5/2011	11:03:40 AM	Helium MFC set to  0.000000
10/5/2011	11:03:40 AM	H2 MFC set to  0.000000
10/5/2011	11:03:40 AM	BCl3 MFC set to  0.000000
10/5/2011	11:03:40 AM	PHl3 MFC set to  0.000000
10/5/2011	11:03:40 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:03:40 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:03:40 AM	Tube furnace set to 100
10/5/2011	11:04:10 AM	H2 valve closed
10/5/2011	11:04:10 AM	BCl3 valve closed
10/5/2011	11:04:10 AM	PH3 valve closed
10/5/2011	11:04:10 AM	SiCl4 pre valve closed
10/5/2011	11:04:10 AM	SiCl4 post valve closed
10/5/2011	11:04:10 AM	Bypass valve closed
10/5/2011	11:04:10 AM	Bubbler valve closed
10/5/2011	11:04:10 AM	Helium valve opened
10/5/2011	11:04:10 AM	Main Vac valve opened
10/5/2011	11:04:10 AM	Helium MFC set to  20.000000
10/5/2011	11:04:10 AM	H2 MFC set to  0.000000
10/5/2011	11:04:10 AM	BCl3 MFC set to  0.000000
10/5/2011	11:04:10 AM	PHl3 MFC set to  0.000000
10/5/2011	11:04:10 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:04:10 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:04:11 AM	Tube furnace set to 100
10/5/2011	11:04:41 AM	Helium valve closed
10/5/2011	11:04:41 AM	H2 valve closed
10/5/2011	11:04:41 AM	BCl3 valve closed
10/5/2011	11:04:41 AM	PH3 valve closed
10/5/2011	11:04:41 AM	SiCl4 pre valve closed
10/5/2011	11:04:41 AM	SiCl4 post valve closed
10/5/2011	11:04:41 AM	Bypass valve closed
10/5/2011	11:04:41 AM	Bubbler valve closed
10/5/2011	11:04:41 AM	Main Vac valve opened
10/5/2011	11:04:41 AM	Helium MFC set to  0.000000
10/5/2011	11:04:41 AM	H2 MFC set to  0.000000
10/5/2011	11:04:41 AM	BCl3 MFC set to  0.000000
10/5/2011	11:04:41 AM	PHl3 MFC set to  0.000000
10/5/2011	11:04:41 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:04:41 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:04:41 AM	Tube furnace set to 100
10/5/2011	11:05:11 AM	H2 valve closed
10/5/2011	11:05:11 AM	BCl3 valve closed
10/5/2011	11:05:11 AM	PH3 valve closed
10/5/2011	11:05:11 AM	SiCl4 pre valve closed
10/5/2011	11:05:11 AM	SiCl4 post valve closed
10/5/2011	11:05:11 AM	Bypass valve closed
10/5/2011	11:05:11 AM	Bubbler valve closed
10/5/2011	11:05:11 AM	Helium valve opened
10/5/2011	11:05:11 AM	Main Vac valve opened
10/5/2011	11:05:11 AM	Helium MFC set to  20.000000
10/5/2011	11:05:11 AM	H2 MFC set to  0.000000
10/5/2011	11:05:11 AM	BCl3 MFC set to  0.000000
10/5/2011	11:05:11 AM	PHl3 MFC set to  0.000000
10/5/2011	11:05:11 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:05:11 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:05:11 AM	Tube furnace set to 100
10/5/2011	11:05:41 AM	Helium valve closed
10/5/2011	11:05:41 AM	H2 valve closed
10/5/2011	11:05:41 AM	BCl3 valve closed
10/5/2011	11:05:41 AM	PH3 valve closed
10/5/2011	11:05:41 AM	SiCl4 pre valve closed
10/5/2011	11:05:41 AM	SiCl4 post valve closed
10/5/2011	11:05:41 AM	Bypass valve closed
10/5/2011	11:05:41 AM	Bubbler valve closed
10/5/2011	11:05:41 AM	Main Vac valve opened
10/5/2011	11:05:41 AM	Helium MFC set to  0.000000
10/5/2011	11:05:41 AM	H2 MFC set to  0.000000
10/5/2011	11:05:41 AM	BCl3 MFC set to  0.000000
10/5/2011	11:05:41 AM	PHl3 MFC set to  0.000000
10/5/2011	11:05:41 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:05:41 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:05:41 AM	Tube furnace set to 100
10/5/2011	11:06:11 AM	H2 valve closed
10/5/2011	11:06:11 AM	BCl3 valve closed
10/5/2011	11:06:11 AM	PH3 valve closed
10/5/2011	11:06:11 AM	SiCl4 pre valve closed
10/5/2011	11:06:11 AM	SiCl4 post valve closed
10/5/2011	11:06:11 AM	Bypass valve closed
10/5/2011	11:06:11 AM	Bubbler valve closed
10/5/2011	11:06:11 AM	Helium valve opened
10/5/2011	11:06:11 AM	Main Vac valve opened
10/5/2011	11:06:11 AM	Helium MFC set to  20.000000
10/5/2011	11:06:11 AM	H2 MFC set to  0.000000
10/5/2011	11:06:11 AM	BCl3 MFC set to  0.000000
10/5/2011	11:06:11 AM	PHl3 MFC set to  0.000000
10/5/2011	11:06:11 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:06:11 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:06:11 AM	Tube furnace set to 100
10/5/2011	11:06:41 AM	Helium valve closed
10/5/2011	11:06:41 AM	H2 valve closed
10/5/2011	11:06:41 AM	BCl3 valve closed
10/5/2011	11:06:41 AM	PH3 valve closed
10/5/2011	11:06:41 AM	SiCl4 pre valve closed
10/5/2011	11:06:41 AM	SiCl4 post valve closed
10/5/2011	11:06:41 AM	Bypass valve closed
10/5/2011	11:06:41 AM	Bubbler valve closed
10/5/2011	11:06:41 AM	Main Vac valve opened
10/5/2011	11:06:41 AM	Helium MFC set to  0.000000
10/5/2011	11:06:41 AM	H2 MFC set to  0.000000
10/5/2011	11:06:41 AM	BCl3 MFC set to  0.000000
10/5/2011	11:06:42 AM	PHl3 MFC set to  0.000000
10/5/2011	11:06:42 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:06:42 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:06:42 AM	Tube furnace set to 100
10/5/2011	11:07:12 AM	H2 valve closed
10/5/2011	11:07:12 AM	BCl3 valve closed
10/5/2011	11:07:12 AM	PH3 valve closed
10/5/2011	11:07:12 AM	SiCl4 pre valve closed
10/5/2011	11:07:12 AM	SiCl4 post valve closed
10/5/2011	11:07:12 AM	Bypass valve closed
10/5/2011	11:07:12 AM	Bubbler valve closed
10/5/2011	11:07:12 AM	Helium valve opened
10/5/2011	11:07:12 AM	Main Vac valve opened
10/5/2011	11:07:12 AM	Helium MFC set to  20.000000
10/5/2011	11:07:12 AM	H2 MFC set to  0.000000
10/5/2011	11:07:12 AM	BCl3 MFC set to  0.000000
10/5/2011	11:07:12 AM	PHl3 MFC set to  0.000000
10/5/2011	11:07:12 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:07:12 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:07:12 AM	Tube furnace set to 100
10/5/2011	11:07:42 AM	Helium valve closed
10/5/2011	11:07:42 AM	H2 valve closed
10/5/2011	11:07:42 AM	BCl3 valve closed
10/5/2011	11:07:42 AM	PH3 valve closed
10/5/2011	11:07:42 AM	SiCl4 pre valve closed
10/5/2011	11:07:42 AM	SiCl4 post valve closed
10/5/2011	11:07:42 AM	Bypass valve closed
10/5/2011	11:07:42 AM	Bubbler valve closed
10/5/2011	11:07:42 AM	Main Vac valve opened
10/5/2011	11:07:42 AM	Helium MFC set to  0.000000
10/5/2011	11:07:42 AM	H2 MFC set to  0.000000
10/5/2011	11:07:42 AM	BCl3 MFC set to  0.000000
10/5/2011	11:07:42 AM	PHl3 MFC set to  0.000000
10/5/2011	11:07:42 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:07:42 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:07:42 AM	Tube furnace set to 100
10/5/2011	11:08:12 AM	H2 valve closed
10/5/2011	11:08:12 AM	BCl3 valve closed
10/5/2011	11:08:12 AM	PH3 valve closed
10/5/2011	11:08:12 AM	SiCl4 pre valve closed
10/5/2011	11:08:12 AM	SiCl4 post valve closed
10/5/2011	11:08:12 AM	Bypass valve closed
10/5/2011	11:08:12 AM	Bubbler valve closed
10/5/2011	11:08:12 AM	Helium valve opened
10/5/2011	11:08:12 AM	Main Vac valve opened
10/5/2011	11:08:12 AM	Helium MFC set to  20.000000
10/5/2011	11:08:12 AM	H2 MFC set to  0.000000
10/5/2011	11:08:12 AM	BCl3 MFC set to  0.000000
10/5/2011	11:08:12 AM	PHl3 MFC set to  0.000000
10/5/2011	11:08:12 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:08:12 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:08:12 AM	Tube furnace set to 100
10/5/2011	11:08:42 AM	Helium valve closed
10/5/2011	11:08:42 AM	H2 valve closed
10/5/2011	11:08:42 AM	BCl3 valve closed
10/5/2011	11:08:42 AM	PH3 valve closed
10/5/2011	11:08:42 AM	SiCl4 pre valve closed
10/5/2011	11:08:42 AM	SiCl4 post valve closed
10/5/2011	11:08:42 AM	Bypass valve closed
10/5/2011	11:08:42 AM	Bubbler valve closed
10/5/2011	11:08:42 AM	Main Vac valve opened
10/5/2011	11:08:42 AM	Helium MFC set to  0.000000
10/5/2011	11:08:42 AM	H2 MFC set to  0.000000
10/5/2011	11:08:42 AM	BCl3 MFC set to  0.000000
10/5/2011	11:08:42 AM	PHl3 MFC set to  0.000000
10/5/2011	11:08:42 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:08:42 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:08:42 AM	Tube furnace set to 100
10/5/2011	11:09:13 AM	H2 valve closed
10/5/2011	11:09:13 AM	BCl3 valve closed
10/5/2011	11:09:13 AM	PH3 valve closed
10/5/2011	11:09:13 AM	SiCl4 pre valve closed
10/5/2011	11:09:13 AM	SiCl4 post valve closed
10/5/2011	11:09:13 AM	Bypass valve closed
10/5/2011	11:09:13 AM	Bubbler valve closed
10/5/2011	11:09:13 AM	Helium valve opened
10/5/2011	11:09:13 AM	Main Vac valve opened
10/5/2011	11:09:13 AM	Helium MFC set to  20.000000
10/5/2011	11:09:13 AM	H2 MFC set to  0.000000
10/5/2011	11:09:13 AM	BCl3 MFC set to  0.000000
10/5/2011	11:09:13 AM	PHl3 MFC set to  0.000000
10/5/2011	11:09:13 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:09:13 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:09:13 AM	Tube furnace set to 100
10/5/2011	11:09:43 AM	Helium valve closed
10/5/2011	11:09:43 AM	H2 valve closed
10/5/2011	11:09:43 AM	BCl3 valve closed
10/5/2011	11:09:43 AM	PH3 valve closed
10/5/2011	11:09:43 AM	SiCl4 pre valve closed
10/5/2011	11:09:43 AM	SiCl4 post valve closed
10/5/2011	11:09:43 AM	Bypass valve closed
10/5/2011	11:09:43 AM	Bubbler valve closed
10/5/2011	11:09:43 AM	Main Vac valve opened
10/5/2011	11:09:43 AM	Helium MFC set to  0.000000
10/5/2011	11:09:43 AM	H2 MFC set to  0.000000
10/5/2011	11:09:43 AM	BCl3 MFC set to  0.000000
10/5/2011	11:09:43 AM	PHl3 MFC set to  0.000000
10/5/2011	11:09:43 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:09:43 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:09:43 AM	Tube furnace set to 100
10/5/2011	11:09:44 AM	Run finished at 11:09 AM
10/5/2011	11:21:56 AM	Recipe started at 11:21 AM
10/5/2011	11:21:56 AM	Helium valve closed
10/5/2011	11:21:56 AM	H2 valve closed
10/5/2011	11:21:56 AM	BCl3 valve closed
10/5/2011	11:21:56 AM	PH3 valve closed
10/5/2011	11:21:56 AM	SiCl4 pre valve closed
10/5/2011	11:21:56 AM	SiCl4 post valve closed
10/5/2011	11:21:56 AM	Bypass valve closed
10/5/2011	11:21:56 AM	Bubbler valve closed
10/5/2011	11:21:56 AM	Main Vac valve opened
10/5/2011	11:21:56 AM	Helium MFC set to  0.000000
10/5/2011	11:21:56 AM	H2 MFC set to  0.000000
10/5/2011	11:21:56 AM	BCl3 MFC set to  0.000000
10/5/2011	11:21:56 AM	PHl3 MFC set to  0.000000
10/5/2011	11:21:56 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:21:56 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:21:56 AM	Tube furnace set to 200
10/5/2011	11:22:26 AM	H2 valve closed
10/5/2011	11:22:26 AM	BCl3 valve closed
10/5/2011	11:22:26 AM	PH3 valve closed
10/5/2011	11:22:26 AM	SiCl4 pre valve closed
10/5/2011	11:22:26 AM	SiCl4 post valve closed
10/5/2011	11:22:26 AM	Bypass valve closed
10/5/2011	11:22:26 AM	Bubbler valve closed
10/5/2011	11:22:26 AM	Helium valve opened
10/5/2011	11:22:26 AM	Main Vac valve opened
10/5/2011	11:22:26 AM	Helium MFC set to  20.000000
10/5/2011	11:22:26 AM	H2 MFC set to  0.000000
10/5/2011	11:22:26 AM	BCl3 MFC set to  0.000000
10/5/2011	11:22:26 AM	PHl3 MFC set to  0.000000
10/5/2011	11:22:26 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:22:26 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:22:26 AM	Tube furnace set to 200
10/5/2011	11:22:56 AM	Helium valve closed
10/5/2011	11:22:56 AM	H2 valve closed
10/5/2011	11:22:56 AM	BCl3 valve closed
10/5/2011	11:22:56 AM	PH3 valve closed
10/5/2011	11:22:56 AM	SiCl4 pre valve closed
10/5/2011	11:22:56 AM	SiCl4 post valve closed
10/5/2011	11:22:56 AM	Bypass valve closed
10/5/2011	11:22:56 AM	Bubbler valve closed
10/5/2011	11:22:56 AM	Main Vac valve opened
10/5/2011	11:22:56 AM	Helium MFC set to  0.000000
10/5/2011	11:22:56 AM	H2 MFC set to  0.000000
10/5/2011	11:22:56 AM	BCl3 MFC set to  0.000000
10/5/2011	11:22:56 AM	PHl3 MFC set to  0.000000
10/5/2011	11:22:56 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:22:56 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:22:56 AM	Tube furnace set to 200
10/5/2011	11:23:26 AM	H2 valve closed
10/5/2011	11:23:26 AM	BCl3 valve closed
10/5/2011	11:23:26 AM	PH3 valve closed
10/5/2011	11:23:26 AM	SiCl4 pre valve closed
10/5/2011	11:23:26 AM	SiCl4 post valve closed
10/5/2011	11:23:26 AM	Bypass valve closed
10/5/2011	11:23:26 AM	Bubbler valve closed
10/5/2011	11:23:26 AM	Helium valve opened
10/5/2011	11:23:26 AM	Main Vac valve opened
10/5/2011	11:23:26 AM	Helium MFC set to  20.000000
10/5/2011	11:23:26 AM	H2 MFC set to  0.000000
10/5/2011	11:23:26 AM	BCl3 MFC set to  0.000000
10/5/2011	11:23:26 AM	PHl3 MFC set to  0.000000
10/5/2011	11:23:26 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:23:26 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:23:27 AM	Tube furnace set to 200
10/5/2011	11:23:57 AM	Helium valve closed
10/5/2011	11:23:57 AM	H2 valve closed
10/5/2011	11:23:57 AM	BCl3 valve closed
10/5/2011	11:23:57 AM	PH3 valve closed
10/5/2011	11:23:57 AM	SiCl4 pre valve closed
10/5/2011	11:23:57 AM	SiCl4 post valve closed
10/5/2011	11:23:57 AM	Bypass valve closed
10/5/2011	11:23:57 AM	Bubbler valve closed
10/5/2011	11:23:57 AM	Main Vac valve opened
10/5/2011	11:23:57 AM	Helium MFC set to  0.000000
10/5/2011	11:23:57 AM	H2 MFC set to  0.000000
10/5/2011	11:23:57 AM	BCl3 MFC set to  0.000000
10/5/2011	11:23:57 AM	PHl3 MFC set to  0.000000
10/5/2011	11:23:57 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:23:57 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:23:57 AM	Tube furnace set to 200
10/5/2011	11:24:27 AM	H2 valve closed
10/5/2011	11:24:27 AM	BCl3 valve closed
10/5/2011	11:24:27 AM	PH3 valve closed
10/5/2011	11:24:27 AM	SiCl4 pre valve closed
10/5/2011	11:24:27 AM	SiCl4 post valve closed
10/5/2011	11:24:27 AM	Bypass valve closed
10/5/2011	11:24:27 AM	Bubbler valve closed
10/5/2011	11:24:27 AM	Helium valve opened
10/5/2011	11:24:27 AM	Main Vac valve opened
10/5/2011	11:24:27 AM	Helium MFC set to  20.000000
10/5/2011	11:24:27 AM	H2 MFC set to  0.000000
10/5/2011	11:24:27 AM	BCl3 MFC set to  0.000000
10/5/2011	11:24:27 AM	PHl3 MFC set to  0.000000
10/5/2011	11:24:27 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:24:27 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:24:27 AM	Tube furnace set to 200
10/5/2011	11:24:57 AM	Helium valve closed
10/5/2011	11:24:57 AM	H2 valve closed
10/5/2011	11:24:57 AM	BCl3 valve closed
10/5/2011	11:24:57 AM	PH3 valve closed
10/5/2011	11:24:57 AM	SiCl4 pre valve closed
10/5/2011	11:24:57 AM	SiCl4 post valve closed
10/5/2011	11:24:57 AM	Bypass valve closed
10/5/2011	11:24:57 AM	Bubbler valve closed
10/5/2011	11:24:57 AM	Main Vac valve opened
10/5/2011	11:24:57 AM	Helium MFC set to  0.000000
10/5/2011	11:24:57 AM	H2 MFC set to  0.000000
10/5/2011	11:24:57 AM	BCl3 MFC set to  0.000000
10/5/2011	11:24:57 AM	PHl3 MFC set to  0.000000
10/5/2011	11:24:57 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:24:57 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:24:57 AM	Tube furnace set to 200
10/5/2011	11:25:27 AM	H2 valve closed
10/5/2011	11:25:27 AM	BCl3 valve closed
10/5/2011	11:25:27 AM	PH3 valve closed
10/5/2011	11:25:27 AM	SiCl4 pre valve closed
10/5/2011	11:25:27 AM	SiCl4 post valve closed
10/5/2011	11:25:27 AM	Bypass valve closed
10/5/2011	11:25:27 AM	Bubbler valve closed
10/5/2011	11:25:27 AM	Helium valve opened
10/5/2011	11:25:27 AM	Main Vac valve opened
10/5/2011	11:25:27 AM	Helium MFC set to  20.000000
10/5/2011	11:25:27 AM	H2 MFC set to  0.000000
10/5/2011	11:25:27 AM	BCl3 MFC set to  0.000000
10/5/2011	11:25:27 AM	PHl3 MFC set to  0.000000
10/5/2011	11:25:27 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:25:27 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:25:27 AM	Tube furnace set to 200
10/5/2011	11:25:58 AM	Helium valve closed
10/5/2011	11:25:58 AM	H2 valve closed
10/5/2011	11:25:58 AM	BCl3 valve closed
10/5/2011	11:25:58 AM	PH3 valve closed
10/5/2011	11:25:58 AM	SiCl4 pre valve closed
10/5/2011	11:25:58 AM	SiCl4 post valve closed
10/5/2011	11:25:58 AM	Bypass valve closed
10/5/2011	11:25:58 AM	Bubbler valve closed
10/5/2011	11:25:58 AM	Main Vac valve opened
10/5/2011	11:25:58 AM	Helium MFC set to  0.000000
10/5/2011	11:25:58 AM	H2 MFC set to  0.000000
10/5/2011	11:25:58 AM	BCl3 MFC set to  0.000000
10/5/2011	11:25:58 AM	PHl3 MFC set to  0.000000
10/5/2011	11:25:58 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:25:58 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:25:58 AM	Tube furnace set to 200
10/5/2011	11:26:28 AM	H2 valve closed
10/5/2011	11:26:28 AM	BCl3 valve closed
10/5/2011	11:26:28 AM	PH3 valve closed
10/5/2011	11:26:28 AM	SiCl4 pre valve closed
10/5/2011	11:26:28 AM	SiCl4 post valve closed
10/5/2011	11:26:28 AM	Bypass valve closed
10/5/2011	11:26:28 AM	Bubbler valve closed
10/5/2011	11:26:28 AM	Helium valve opened
10/5/2011	11:26:28 AM	Main Vac valve opened
10/5/2011	11:26:28 AM	Helium MFC set to  20.000000
10/5/2011	11:26:28 AM	H2 MFC set to  0.000000
10/5/2011	11:26:28 AM	BCl3 MFC set to  0.000000
10/5/2011	11:26:28 AM	PHl3 MFC set to  0.000000
10/5/2011	11:26:28 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:26:28 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:26:28 AM	Tube furnace set to 200
10/5/2011	11:26:58 AM	Helium valve closed
10/5/2011	11:26:58 AM	H2 valve closed
10/5/2011	11:26:58 AM	BCl3 valve closed
10/5/2011	11:26:58 AM	PH3 valve closed
10/5/2011	11:26:58 AM	SiCl4 pre valve closed
10/5/2011	11:26:58 AM	SiCl4 post valve closed
10/5/2011	11:26:58 AM	Bypass valve closed
10/5/2011	11:26:58 AM	Bubbler valve closed
10/5/2011	11:26:58 AM	Main Vac valve opened
10/5/2011	11:26:58 AM	Helium MFC set to  0.000000
10/5/2011	11:26:58 AM	H2 MFC set to  0.000000
10/5/2011	11:26:58 AM	BCl3 MFC set to  0.000000
10/5/2011	11:26:58 AM	PHl3 MFC set to  0.000000
10/5/2011	11:26:58 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:26:58 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:26:58 AM	Tube furnace set to 200
10/5/2011	11:27:28 AM	H2 valve closed
10/5/2011	11:27:28 AM	BCl3 valve closed
10/5/2011	11:27:28 AM	PH3 valve closed
10/5/2011	11:27:28 AM	SiCl4 pre valve closed
10/5/2011	11:27:28 AM	SiCl4 post valve closed
10/5/2011	11:27:28 AM	Bypass valve closed
10/5/2011	11:27:28 AM	Bubbler valve closed
10/5/2011	11:27:28 AM	Helium valve opened
10/5/2011	11:27:28 AM	Main Vac valve opened
10/5/2011	11:27:28 AM	Helium MFC set to  20.000000
10/5/2011	11:27:28 AM	H2 MFC set to  0.000000
10/5/2011	11:27:28 AM	BCl3 MFC set to  0.000000
10/5/2011	11:27:28 AM	PHl3 MFC set to  0.000000
10/5/2011	11:27:28 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:27:28 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:27:28 AM	Tube furnace set to 200
10/5/2011	11:27:58 AM	Helium valve closed
10/5/2011	11:27:58 AM	H2 valve closed
10/5/2011	11:27:58 AM	BCl3 valve closed
10/5/2011	11:27:58 AM	PH3 valve closed
10/5/2011	11:27:58 AM	SiCl4 pre valve closed
10/5/2011	11:27:58 AM	SiCl4 post valve closed
10/5/2011	11:27:58 AM	Bypass valve closed
10/5/2011	11:27:58 AM	Bubbler valve closed
10/5/2011	11:27:58 AM	Main Vac valve opened
10/5/2011	11:27:58 AM	Helium MFC set to  0.000000
10/5/2011	11:27:58 AM	H2 MFC set to  0.000000
10/5/2011	11:27:58 AM	BCl3 MFC set to  0.000000
10/5/2011	11:27:58 AM	PHl3 MFC set to  0.000000
10/5/2011	11:27:58 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:27:58 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:27:59 AM	Tube furnace set to 200
10/5/2011	11:28:29 AM	H2 valve closed
10/5/2011	11:28:29 AM	BCl3 valve closed
10/5/2011	11:28:29 AM	PH3 valve closed
10/5/2011	11:28:29 AM	SiCl4 pre valve closed
10/5/2011	11:28:29 AM	SiCl4 post valve closed
10/5/2011	11:28:29 AM	Bypass valve closed
10/5/2011	11:28:29 AM	Bubbler valve closed
10/5/2011	11:28:29 AM	Helium valve opened
10/5/2011	11:28:29 AM	Main Vac valve opened
10/5/2011	11:28:29 AM	Helium MFC set to  20.000000
10/5/2011	11:28:29 AM	H2 MFC set to  0.000000
10/5/2011	11:28:29 AM	BCl3 MFC set to  0.000000
10/5/2011	11:28:29 AM	PHl3 MFC set to  0.000000
10/5/2011	11:28:29 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:28:29 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:28:29 AM	Tube furnace set to 200
10/5/2011	11:28:59 AM	Helium valve closed
10/5/2011	11:28:59 AM	H2 valve closed
10/5/2011	11:28:59 AM	BCl3 valve closed
10/5/2011	11:28:59 AM	PH3 valve closed
10/5/2011	11:28:59 AM	SiCl4 pre valve closed
10/5/2011	11:28:59 AM	SiCl4 post valve closed
10/5/2011	11:28:59 AM	Bypass valve closed
10/5/2011	11:28:59 AM	Bubbler valve closed
10/5/2011	11:28:59 AM	Main Vac valve opened
10/5/2011	11:28:59 AM	Helium MFC set to  0.000000
10/5/2011	11:28:59 AM	H2 MFC set to  0.000000
10/5/2011	11:28:59 AM	BCl3 MFC set to  0.000000
10/5/2011	11:28:59 AM	PHl3 MFC set to  0.000000
10/5/2011	11:28:59 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:28:59 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:28:59 AM	Tube furnace set to 200
10/5/2011	11:29:29 AM	H2 valve closed
10/5/2011	11:29:29 AM	BCl3 valve closed
10/5/2011	11:29:29 AM	PH3 valve closed
10/5/2011	11:29:29 AM	SiCl4 pre valve closed
10/5/2011	11:29:29 AM	SiCl4 post valve closed
10/5/2011	11:29:29 AM	Bypass valve closed
10/5/2011	11:29:29 AM	Bubbler valve closed
10/5/2011	11:29:29 AM	Helium valve opened
10/5/2011	11:29:29 AM	Main Vac valve opened
10/5/2011	11:29:29 AM	Helium MFC set to  20.000000
10/5/2011	11:29:29 AM	H2 MFC set to  0.000000
10/5/2011	11:29:29 AM	BCl3 MFC set to  0.000000
10/5/2011	11:29:29 AM	PHl3 MFC set to  0.000000
10/5/2011	11:29:29 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:29:29 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:29:29 AM	Tube furnace set to 200
10/5/2011	11:29:59 AM	Helium valve closed
10/5/2011	11:29:59 AM	H2 valve closed
10/5/2011	11:29:59 AM	BCl3 valve closed
10/5/2011	11:29:59 AM	PH3 valve closed
10/5/2011	11:29:59 AM	SiCl4 pre valve closed
10/5/2011	11:29:59 AM	SiCl4 post valve closed
10/5/2011	11:29:59 AM	Bypass valve closed
10/5/2011	11:29:59 AM	Bubbler valve closed
10/5/2011	11:29:59 AM	Main Vac valve opened
10/5/2011	11:29:59 AM	Helium MFC set to  0.000000
10/5/2011	11:29:59 AM	H2 MFC set to  0.000000
10/5/2011	11:29:59 AM	BCl3 MFC set to  0.000000
10/5/2011	11:29:59 AM	PHl3 MFC set to  0.000000
10/5/2011	11:29:59 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:29:59 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:29:59 AM	Tube furnace set to 200
10/5/2011	11:30:29 AM	H2 valve closed
10/5/2011	11:30:29 AM	BCl3 valve closed
10/5/2011	11:30:29 AM	PH3 valve closed
10/5/2011	11:30:29 AM	SiCl4 pre valve closed
10/5/2011	11:30:29 AM	SiCl4 post valve closed
10/5/2011	11:30:29 AM	Bypass valve closed
10/5/2011	11:30:29 AM	Bubbler valve closed
10/5/2011	11:30:29 AM	Helium valve opened
10/5/2011	11:30:29 AM	Main Vac valve opened
10/5/2011	11:30:29 AM	Helium MFC set to  20.000000
10/5/2011	11:30:29 AM	H2 MFC set to  0.000000
10/5/2011	11:30:29 AM	BCl3 MFC set to  0.000000
10/5/2011	11:30:29 AM	PHl3 MFC set to  0.000000
10/5/2011	11:30:30 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:30:30 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:30:30 AM	Tube furnace set to 200
10/5/2011	11:31:00 AM	Helium valve closed
10/5/2011	11:31:00 AM	H2 valve closed
10/5/2011	11:31:00 AM	BCl3 valve closed
10/5/2011	11:31:00 AM	PH3 valve closed
10/5/2011	11:31:00 AM	SiCl4 pre valve closed
10/5/2011	11:31:00 AM	SiCl4 post valve closed
10/5/2011	11:31:00 AM	Bypass valve closed
10/5/2011	11:31:00 AM	Bubbler valve closed
10/5/2011	11:31:00 AM	Main Vac valve opened
10/5/2011	11:31:00 AM	Helium MFC set to  0.000000
10/5/2011	11:31:00 AM	H2 MFC set to  0.000000
10/5/2011	11:31:00 AM	BCl3 MFC set to  0.000000
10/5/2011	11:31:00 AM	PHl3 MFC set to  0.000000
10/5/2011	11:31:00 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:31:00 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:31:00 AM	Tube furnace set to 200
10/5/2011	11:31:30 AM	H2 valve closed
10/5/2011	11:31:30 AM	BCl3 valve closed
10/5/2011	11:31:30 AM	PH3 valve closed
10/5/2011	11:31:30 AM	SiCl4 pre valve closed
10/5/2011	11:31:30 AM	SiCl4 post valve closed
10/5/2011	11:31:30 AM	Bypass valve closed
10/5/2011	11:31:30 AM	Bubbler valve closed
10/5/2011	11:31:30 AM	Helium valve opened
10/5/2011	11:31:30 AM	Main Vac valve opened
10/5/2011	11:31:30 AM	Helium MFC set to  20.000000
10/5/2011	11:31:30 AM	H2 MFC set to  0.000000
10/5/2011	11:31:30 AM	BCl3 MFC set to  0.000000
10/5/2011	11:31:30 AM	PHl3 MFC set to  0.000000
10/5/2011	11:31:30 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:31:30 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:31:30 AM	Tube furnace set to 200
10/5/2011	11:32:00 AM	Helium valve closed
10/5/2011	11:32:00 AM	H2 valve closed
10/5/2011	11:32:00 AM	BCl3 valve closed
10/5/2011	11:32:00 AM	PH3 valve closed
10/5/2011	11:32:00 AM	SiCl4 pre valve closed
10/5/2011	11:32:00 AM	SiCl4 post valve closed
10/5/2011	11:32:00 AM	Bypass valve closed
10/5/2011	11:32:00 AM	Bubbler valve closed
10/5/2011	11:32:00 AM	Main Vac valve opened
10/5/2011	11:32:00 AM	Helium MFC set to  0.000000
10/5/2011	11:32:00 AM	H2 MFC set to  0.000000
10/5/2011	11:32:00 AM	BCl3 MFC set to  0.000000
10/5/2011	11:32:00 AM	PHl3 MFC set to  0.000000
10/5/2011	11:32:00 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:32:00 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:32:00 AM	Tube furnace set to 200
10/5/2011	11:32:01 AM	Run finished at 11:32 AM
10/5/2011	11:37:02 AM	Recipe started at 11:36 AM
10/5/2011	11:37:02 AM	Helium valve closed
10/5/2011	11:37:02 AM	H2 valve closed
10/5/2011	11:37:02 AM	BCl3 valve closed
10/5/2011	11:37:02 AM	PH3 valve closed
10/5/2011	11:37:02 AM	SiCl4 pre valve closed
10/5/2011	11:37:02 AM	SiCl4 post valve closed
10/5/2011	11:37:02 AM	Bypass valve closed
10/5/2011	11:37:02 AM	Bubbler valve closed
10/5/2011	11:37:02 AM	Main Vac valve opened
10/5/2011	11:37:02 AM	Helium MFC set to  0.000000
10/5/2011	11:37:02 AM	H2 MFC set to  0.000000
10/5/2011	11:37:02 AM	BCl3 MFC set to  0.000000
10/5/2011	11:37:02 AM	PHl3 MFC set to  0.000000
10/5/2011	11:37:02 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:37:02 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:37:02 AM	Tube furnace set to 200
10/5/2011	11:37:32 AM	H2 valve closed
10/5/2011	11:37:32 AM	BCl3 valve closed
10/5/2011	11:37:32 AM	PH3 valve closed
10/5/2011	11:37:32 AM	SiCl4 pre valve closed
10/5/2011	11:37:32 AM	SiCl4 post valve closed
10/5/2011	11:37:32 AM	Bypass valve closed
10/5/2011	11:37:32 AM	Bubbler valve closed
10/5/2011	11:37:32 AM	Helium valve opened
10/5/2011	11:37:32 AM	Main Vac valve opened
10/5/2011	11:37:32 AM	Helium MFC set to  20.000000
10/5/2011	11:37:32 AM	H2 MFC set to  0.000000
10/5/2011	11:37:32 AM	BCl3 MFC set to  0.000000
10/5/2011	11:37:32 AM	PHl3 MFC set to  0.000000
10/5/2011	11:37:32 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:37:32 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:37:33 AM	Tube furnace set to 200
10/5/2011	11:38:03 AM	Helium valve closed
10/5/2011	11:38:03 AM	H2 valve closed
10/5/2011	11:38:03 AM	BCl3 valve closed
10/5/2011	11:38:03 AM	PH3 valve closed
10/5/2011	11:38:03 AM	SiCl4 pre valve closed
10/5/2011	11:38:03 AM	SiCl4 post valve closed
10/5/2011	11:38:03 AM	Bypass valve closed
10/5/2011	11:38:03 AM	Bubbler valve closed
10/5/2011	11:38:03 AM	Main Vac valve opened
10/5/2011	11:38:03 AM	Helium MFC set to  0.000000
10/5/2011	11:38:03 AM	H2 MFC set to  0.000000
10/5/2011	11:38:03 AM	BCl3 MFC set to  0.000000
10/5/2011	11:38:03 AM	PHl3 MFC set to  0.000000
10/5/2011	11:38:03 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:38:03 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:38:03 AM	Tube furnace set to 200
10/5/2011	11:38:33 AM	H2 valve closed
10/5/2011	11:38:33 AM	BCl3 valve closed
10/5/2011	11:38:33 AM	PH3 valve closed
10/5/2011	11:38:33 AM	SiCl4 pre valve closed
10/5/2011	11:38:33 AM	SiCl4 post valve closed
10/5/2011	11:38:33 AM	Bypass valve closed
10/5/2011	11:38:33 AM	Bubbler valve closed
10/5/2011	11:38:33 AM	Helium valve opened
10/5/2011	11:38:33 AM	Main Vac valve opened
10/5/2011	11:38:33 AM	Helium MFC set to  20.000000
10/5/2011	11:38:33 AM	H2 MFC set to  0.000000
10/5/2011	11:38:33 AM	BCl3 MFC set to  0.000000
10/5/2011	11:38:33 AM	PHl3 MFC set to  0.000000
10/5/2011	11:38:33 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:38:33 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:38:33 AM	Tube furnace set to 200
10/5/2011	11:39:03 AM	Helium valve closed
10/5/2011	11:39:03 AM	H2 valve closed
10/5/2011	11:39:03 AM	BCl3 valve closed
10/5/2011	11:39:03 AM	PH3 valve closed
10/5/2011	11:39:03 AM	SiCl4 pre valve closed
10/5/2011	11:39:03 AM	SiCl4 post valve closed
10/5/2011	11:39:03 AM	Bypass valve closed
10/5/2011	11:39:03 AM	Bubbler valve closed
10/5/2011	11:39:03 AM	Main Vac valve opened
10/5/2011	11:39:03 AM	Helium MFC set to  0.000000
10/5/2011	11:39:03 AM	H2 MFC set to  0.000000
10/5/2011	11:39:03 AM	BCl3 MFC set to  0.000000
10/5/2011	11:39:03 AM	PHl3 MFC set to  0.000000
10/5/2011	11:39:03 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:39:03 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:39:03 AM	Tube furnace set to 200
10/5/2011	11:39:33 AM	H2 valve closed
10/5/2011	11:39:33 AM	BCl3 valve closed
10/5/2011	11:39:33 AM	PH3 valve closed
10/5/2011	11:39:33 AM	SiCl4 pre valve closed
10/5/2011	11:39:33 AM	SiCl4 post valve closed
10/5/2011	11:39:33 AM	Bypass valve closed
10/5/2011	11:39:33 AM	Bubbler valve closed
10/5/2011	11:39:33 AM	Helium valve opened
10/5/2011	11:39:33 AM	Main Vac valve opened
10/5/2011	11:39:33 AM	Helium MFC set to  20.000000
10/5/2011	11:39:33 AM	H2 MFC set to  0.000000
10/5/2011	11:39:33 AM	BCl3 MFC set to  0.000000
10/5/2011	11:39:33 AM	PHl3 MFC set to  0.000000
10/5/2011	11:39:33 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:39:33 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:39:33 AM	Tube furnace set to 200
10/5/2011	11:40:03 AM	Helium valve closed
10/5/2011	11:40:03 AM	H2 valve closed
10/5/2011	11:40:03 AM	BCl3 valve closed
10/5/2011	11:40:03 AM	PH3 valve closed
10/5/2011	11:40:03 AM	SiCl4 pre valve closed
10/5/2011	11:40:03 AM	SiCl4 post valve closed
10/5/2011	11:40:03 AM	Bypass valve closed
10/5/2011	11:40:03 AM	Bubbler valve closed
10/5/2011	11:40:03 AM	Main Vac valve opened
10/5/2011	11:40:03 AM	Helium MFC set to  0.000000
10/5/2011	11:40:03 AM	H2 MFC set to  0.000000
10/5/2011	11:40:03 AM	BCl3 MFC set to  0.000000
10/5/2011	11:40:03 AM	PHl3 MFC set to  0.000000
10/5/2011	11:40:03 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:40:03 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:40:04 AM	Tube furnace set to 200
10/5/2011	11:40:34 AM	H2 valve closed
10/5/2011	11:40:34 AM	BCl3 valve closed
10/5/2011	11:40:34 AM	PH3 valve closed
10/5/2011	11:40:34 AM	SiCl4 pre valve closed
10/5/2011	11:40:34 AM	SiCl4 post valve closed
10/5/2011	11:40:34 AM	Bypass valve closed
10/5/2011	11:40:34 AM	Bubbler valve closed
10/5/2011	11:40:34 AM	Helium valve opened
10/5/2011	11:40:34 AM	Main Vac valve opened
10/5/2011	11:40:34 AM	Helium MFC set to  20.000000
10/5/2011	11:40:34 AM	H2 MFC set to  0.000000
10/5/2011	11:40:34 AM	BCl3 MFC set to  0.000000
10/5/2011	11:40:34 AM	PHl3 MFC set to  0.000000
10/5/2011	11:40:34 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:40:34 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:40:34 AM	Tube furnace set to 200
10/5/2011	11:41:04 AM	Helium valve closed
10/5/2011	11:41:04 AM	H2 valve closed
10/5/2011	11:41:04 AM	BCl3 valve closed
10/5/2011	11:41:04 AM	PH3 valve closed
10/5/2011	11:41:04 AM	SiCl4 pre valve closed
10/5/2011	11:41:04 AM	SiCl4 post valve closed
10/5/2011	11:41:04 AM	Bypass valve closed
10/5/2011	11:41:04 AM	Bubbler valve closed
10/5/2011	11:41:04 AM	Main Vac valve opened
10/5/2011	11:41:04 AM	Helium MFC set to  0.000000
10/5/2011	11:41:04 AM	H2 MFC set to  0.000000
10/5/2011	11:41:04 AM	BCl3 MFC set to  0.000000
10/5/2011	11:41:04 AM	PHl3 MFC set to  0.000000
10/5/2011	11:41:04 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:41:04 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:41:04 AM	Tube furnace set to 200
10/5/2011	11:41:34 AM	H2 valve closed
10/5/2011	11:41:34 AM	BCl3 valve closed
10/5/2011	11:41:34 AM	PH3 valve closed
10/5/2011	11:41:34 AM	SiCl4 pre valve closed
10/5/2011	11:41:34 AM	SiCl4 post valve closed
10/5/2011	11:41:34 AM	Bypass valve closed
10/5/2011	11:41:34 AM	Bubbler valve closed
10/5/2011	11:41:34 AM	Helium valve opened
10/5/2011	11:41:34 AM	Main Vac valve opened
10/5/2011	11:41:34 AM	Helium MFC set to  20.000000
10/5/2011	11:41:34 AM	H2 MFC set to  0.000000
10/5/2011	11:41:34 AM	BCl3 MFC set to  0.000000
10/5/2011	11:41:34 AM	PHl3 MFC set to  0.000000
10/5/2011	11:41:34 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:41:34 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:41:34 AM	Tube furnace set to 200
10/5/2011	11:42:04 AM	Helium valve closed
10/5/2011	11:42:04 AM	H2 valve closed
10/5/2011	11:42:04 AM	BCl3 valve closed
10/5/2011	11:42:04 AM	PH3 valve closed
10/5/2011	11:42:04 AM	SiCl4 pre valve closed
10/5/2011	11:42:04 AM	SiCl4 post valve closed
10/5/2011	11:42:04 AM	Bypass valve closed
10/5/2011	11:42:04 AM	Bubbler valve closed
10/5/2011	11:42:04 AM	Main Vac valve opened
10/5/2011	11:42:04 AM	Helium MFC set to  0.000000
10/5/2011	11:42:04 AM	H2 MFC set to  0.000000
10/5/2011	11:42:04 AM	BCl3 MFC set to  0.000000
10/5/2011	11:42:04 AM	PHl3 MFC set to  0.000000
10/5/2011	11:42:04 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:42:04 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:42:04 AM	Tube furnace set to 200
10/5/2011	11:42:34 AM	H2 valve closed
10/5/2011	11:42:34 AM	BCl3 valve closed
10/5/2011	11:42:34 AM	PH3 valve closed
10/5/2011	11:42:34 AM	SiCl4 pre valve closed
10/5/2011	11:42:34 AM	SiCl4 post valve closed
10/5/2011	11:42:34 AM	Bypass valve closed
10/5/2011	11:42:34 AM	Bubbler valve closed
10/5/2011	11:42:34 AM	Helium valve opened
10/5/2011	11:42:34 AM	Main Vac valve opened
10/5/2011	11:42:34 AM	Helium MFC set to  20.000000
10/5/2011	11:42:34 AM	H2 MFC set to  0.000000
10/5/2011	11:42:34 AM	BCl3 MFC set to  0.000000
10/5/2011	11:42:34 AM	PHl3 MFC set to  0.000000
10/5/2011	11:42:34 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:42:34 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:42:35 AM	Tube furnace set to 200
10/5/2011	11:43:05 AM	Helium valve closed
10/5/2011	11:43:05 AM	H2 valve closed
10/5/2011	11:43:05 AM	BCl3 valve closed
10/5/2011	11:43:05 AM	PH3 valve closed
10/5/2011	11:43:05 AM	SiCl4 pre valve closed
10/5/2011	11:43:05 AM	SiCl4 post valve closed
10/5/2011	11:43:05 AM	Bypass valve closed
10/5/2011	11:43:05 AM	Bubbler valve closed
10/5/2011	11:43:05 AM	Main Vac valve opened
10/5/2011	11:43:05 AM	Helium MFC set to  0.000000
10/5/2011	11:43:05 AM	H2 MFC set to  0.000000
10/5/2011	11:43:05 AM	BCl3 MFC set to  0.000000
10/5/2011	11:43:05 AM	PHl3 MFC set to  0.000000
10/5/2011	11:43:05 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:43:05 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:43:05 AM	Tube furnace set to 200
10/5/2011	11:43:35 AM	H2 valve closed
10/5/2011	11:43:35 AM	BCl3 valve closed
10/5/2011	11:43:35 AM	PH3 valve closed
10/5/2011	11:43:35 AM	SiCl4 pre valve closed
10/5/2011	11:43:35 AM	SiCl4 post valve closed
10/5/2011	11:43:35 AM	Bypass valve closed
10/5/2011	11:43:35 AM	Bubbler valve closed
10/5/2011	11:43:35 AM	Helium valve opened
10/5/2011	11:43:35 AM	Main Vac valve opened
10/5/2011	11:43:35 AM	Helium MFC set to  20.000000
10/5/2011	11:43:35 AM	H2 MFC set to  0.000000
10/5/2011	11:43:35 AM	BCl3 MFC set to  0.000000
10/5/2011	11:43:35 AM	PHl3 MFC set to  0.000000
10/5/2011	11:43:35 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:43:35 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:43:35 AM	Tube furnace set to 200
10/5/2011	11:44:05 AM	Helium valve closed
10/5/2011	11:44:05 AM	H2 valve closed
10/5/2011	11:44:05 AM	BCl3 valve closed
10/5/2011	11:44:05 AM	PH3 valve closed
10/5/2011	11:44:05 AM	SiCl4 pre valve closed
10/5/2011	11:44:05 AM	SiCl4 post valve closed
10/5/2011	11:44:05 AM	Bypass valve closed
10/5/2011	11:44:05 AM	Bubbler valve closed
10/5/2011	11:44:05 AM	Main Vac valve opened
10/5/2011	11:44:05 AM	Helium MFC set to  0.000000
10/5/2011	11:44:05 AM	H2 MFC set to  0.000000
10/5/2011	11:44:05 AM	BCl3 MFC set to  0.000000
10/5/2011	11:44:05 AM	PHl3 MFC set to  0.000000
10/5/2011	11:44:05 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:44:05 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:44:05 AM	Tube furnace set to 200
10/5/2011	11:44:35 AM	H2 valve closed
10/5/2011	11:44:35 AM	BCl3 valve closed
10/5/2011	11:44:35 AM	PH3 valve closed
10/5/2011	11:44:35 AM	SiCl4 pre valve closed
10/5/2011	11:44:35 AM	SiCl4 post valve closed
10/5/2011	11:44:35 AM	Bypass valve closed
10/5/2011	11:44:35 AM	Bubbler valve closed
10/5/2011	11:44:35 AM	Helium valve opened
10/5/2011	11:44:35 AM	Main Vac valve opened
10/5/2011	11:44:35 AM	Helium MFC set to  20.000000
10/5/2011	11:44:35 AM	H2 MFC set to  0.000000
10/5/2011	11:44:35 AM	BCl3 MFC set to  0.000000
10/5/2011	11:44:35 AM	PHl3 MFC set to  0.000000
10/5/2011	11:44:35 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:44:35 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:44:35 AM	Tube furnace set to 200
10/5/2011	11:45:05 AM	Helium valve closed
10/5/2011	11:45:05 AM	H2 valve closed
10/5/2011	11:45:05 AM	BCl3 valve closed
10/5/2011	11:45:06 AM	PH3 valve closed
10/5/2011	11:45:06 AM	SiCl4 pre valve closed
10/5/2011	11:45:06 AM	SiCl4 post valve closed
10/5/2011	11:45:06 AM	Bypass valve closed
10/5/2011	11:45:06 AM	Bubbler valve closed
10/5/2011	11:45:06 AM	Main Vac valve opened
10/5/2011	11:45:06 AM	Helium MFC set to  0.000000
10/5/2011	11:45:06 AM	H2 MFC set to  0.000000
10/5/2011	11:45:06 AM	BCl3 MFC set to  0.000000
10/5/2011	11:45:06 AM	PHl3 MFC set to  0.000000
10/5/2011	11:45:06 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:45:06 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:45:06 AM	Tube furnace set to 200
10/5/2011	11:45:36 AM	H2 valve closed
10/5/2011	11:45:36 AM	BCl3 valve closed
10/5/2011	11:45:36 AM	PH3 valve closed
10/5/2011	11:45:36 AM	SiCl4 pre valve closed
10/5/2011	11:45:36 AM	SiCl4 post valve closed
10/5/2011	11:45:36 AM	Bypass valve closed
10/5/2011	11:45:36 AM	Bubbler valve closed
10/5/2011	11:45:36 AM	Helium valve opened
10/5/2011	11:45:36 AM	Main Vac valve opened
10/5/2011	11:45:36 AM	Helium MFC set to  20.000000
10/5/2011	11:45:36 AM	H2 MFC set to  0.000000
10/5/2011	11:45:36 AM	BCl3 MFC set to  0.000000
10/5/2011	11:45:36 AM	PHl3 MFC set to  0.000000
10/5/2011	11:45:36 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:45:36 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:45:36 AM	Tube furnace set to 200
10/5/2011	11:46:06 AM	Helium valve closed
10/5/2011	11:46:06 AM	H2 valve closed
10/5/2011	11:46:06 AM	BCl3 valve closed
10/5/2011	11:46:06 AM	PH3 valve closed
10/5/2011	11:46:06 AM	SiCl4 pre valve closed
10/5/2011	11:46:06 AM	SiCl4 post valve closed
10/5/2011	11:46:06 AM	Bypass valve closed
10/5/2011	11:46:06 AM	Bubbler valve closed
10/5/2011	11:46:06 AM	Main Vac valve opened
10/5/2011	11:46:06 AM	Helium MFC set to  0.000000
10/5/2011	11:46:06 AM	H2 MFC set to  0.000000
10/5/2011	11:46:06 AM	BCl3 MFC set to  0.000000
10/5/2011	11:46:06 AM	PHl3 MFC set to  0.000000
10/5/2011	11:46:06 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:46:06 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:46:06 AM	Tube furnace set to 200
10/5/2011	11:46:36 AM	H2 valve closed
10/5/2011	11:46:36 AM	BCl3 valve closed
10/5/2011	11:46:36 AM	PH3 valve closed
10/5/2011	11:46:36 AM	SiCl4 pre valve closed
10/5/2011	11:46:36 AM	SiCl4 post valve closed
10/5/2011	11:46:36 AM	Bypass valve closed
10/5/2011	11:46:36 AM	Bubbler valve closed
10/5/2011	11:46:36 AM	Helium valve opened
10/5/2011	11:46:36 AM	Main Vac valve opened
10/5/2011	11:46:36 AM	Helium MFC set to  20.000000
10/5/2011	11:46:36 AM	H2 MFC set to  0.000000
10/5/2011	11:46:36 AM	BCl3 MFC set to  0.000000
10/5/2011	11:46:36 AM	PHl3 MFC set to  0.000000
10/5/2011	11:46:36 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:46:36 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:46:36 AM	Tube furnace set to 200
10/5/2011	11:47:06 AM	Helium valve closed
10/5/2011	11:47:06 AM	H2 valve closed
10/5/2011	11:47:06 AM	BCl3 valve closed
10/5/2011	11:47:06 AM	PH3 valve closed
10/5/2011	11:47:06 AM	SiCl4 pre valve closed
10/5/2011	11:47:06 AM	SiCl4 post valve closed
10/5/2011	11:47:06 AM	Bypass valve closed
10/5/2011	11:47:06 AM	Bubbler valve closed
10/5/2011	11:47:06 AM	Main Vac valve opened
10/5/2011	11:47:06 AM	Helium MFC set to  0.000000
10/5/2011	11:47:06 AM	H2 MFC set to  0.000000
10/5/2011	11:47:06 AM	BCl3 MFC set to  0.000000
10/5/2011	11:47:06 AM	PHl3 MFC set to  0.000000
10/5/2011	11:47:06 AM	SiCl4 MFC set to  0.000000
10/5/2011	11:47:06 AM	Bypass solenoid MFC set to  0.000000
10/5/2011	11:47:06 AM	Tube furnace set to 200
10/5/2011	11:47:07 AM	Run finished at 11:47 AM
10/5/2011	12:35:08 PM	Recipe started at 12:35 PM
10/5/2011	12:35:08 PM	Helium valve closed
10/5/2011	12:35:08 PM	H2 valve closed
10/5/2011	12:35:08 PM	BCl3 valve closed
10/5/2011	12:35:08 PM	PH3 valve closed
10/5/2011	12:35:08 PM	SiCl4 pre valve closed
10/5/2011	12:35:08 PM	SiCl4 post valve closed
10/5/2011	12:35:08 PM	Bypass valve closed
10/5/2011	12:35:08 PM	Bubbler valve closed
10/5/2011	12:35:08 PM	Main Vac valve opened
10/5/2011	12:35:08 PM	Helium MFC set to  0.000000
10/5/2011	12:35:08 PM	H2 MFC set to  0.000000
10/5/2011	12:35:08 PM	BCl3 MFC set to  0.000000
10/5/2011	12:35:08 PM	PHl3 MFC set to  0.000000
10/5/2011	12:35:08 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:35:08 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:35:08 PM	Tube furnace set to 200
10/5/2011	12:35:38 PM	H2 valve closed
10/5/2011	12:35:38 PM	BCl3 valve closed
10/5/2011	12:35:38 PM	PH3 valve closed
10/5/2011	12:35:38 PM	SiCl4 pre valve closed
10/5/2011	12:35:38 PM	SiCl4 post valve closed
10/5/2011	12:35:38 PM	Bypass valve closed
10/5/2011	12:35:38 PM	Bubbler valve closed
10/5/2011	12:35:38 PM	Helium valve opened
10/5/2011	12:35:38 PM	Main Vac valve opened
10/5/2011	12:35:38 PM	Helium MFC set to  20.000000
10/5/2011	12:35:38 PM	H2 MFC set to  0.000000
10/5/2011	12:35:38 PM	BCl3 MFC set to  0.000000
10/5/2011	12:35:38 PM	PHl3 MFC set to  0.000000
10/5/2011	12:35:38 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:35:38 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:35:38 PM	Tube furnace set to 200
10/5/2011	12:36:08 PM	Helium valve closed
10/5/2011	12:36:08 PM	H2 valve closed
10/5/2011	12:36:08 PM	BCl3 valve closed
10/5/2011	12:36:08 PM	PH3 valve closed
10/5/2011	12:36:08 PM	SiCl4 pre valve closed
10/5/2011	12:36:08 PM	SiCl4 post valve closed
10/5/2011	12:36:08 PM	Bypass valve closed
10/5/2011	12:36:08 PM	Bubbler valve closed
10/5/2011	12:36:08 PM	Main Vac valve opened
10/5/2011	12:36:08 PM	Helium MFC set to  0.000000
10/5/2011	12:36:08 PM	H2 MFC set to  0.000000
10/5/2011	12:36:08 PM	BCl3 MFC set to  0.000000
10/5/2011	12:36:08 PM	PHl3 MFC set to  0.000000
10/5/2011	12:36:08 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:36:08 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:36:09 PM	Tube furnace set to 200
10/5/2011	12:36:39 PM	H2 valve closed
10/5/2011	12:36:39 PM	BCl3 valve closed
10/5/2011	12:36:39 PM	PH3 valve closed
10/5/2011	12:36:39 PM	SiCl4 pre valve closed
10/5/2011	12:36:39 PM	SiCl4 post valve closed
10/5/2011	12:36:39 PM	Bypass valve closed
10/5/2011	12:36:39 PM	Bubbler valve closed
10/5/2011	12:36:39 PM	Helium valve opened
10/5/2011	12:36:39 PM	Main Vac valve opened
10/5/2011	12:36:39 PM	Helium MFC set to  20.000000
10/5/2011	12:36:39 PM	H2 MFC set to  0.000000
10/5/2011	12:36:39 PM	BCl3 MFC set to  0.000000
10/5/2011	12:36:39 PM	PHl3 MFC set to  0.000000
10/5/2011	12:36:39 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:36:39 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:36:39 PM	Tube furnace set to 200
10/5/2011	12:37:09 PM	Helium valve closed
10/5/2011	12:37:09 PM	H2 valve closed
10/5/2011	12:37:09 PM	BCl3 valve closed
10/5/2011	12:37:09 PM	PH3 valve closed
10/5/2011	12:37:09 PM	SiCl4 pre valve closed
10/5/2011	12:37:09 PM	SiCl4 post valve closed
10/5/2011	12:37:09 PM	Bypass valve closed
10/5/2011	12:37:09 PM	Bubbler valve closed
10/5/2011	12:37:09 PM	Main Vac valve opened
10/5/2011	12:37:09 PM	Helium MFC set to  0.000000
10/5/2011	12:37:09 PM	H2 MFC set to  0.000000
10/5/2011	12:37:09 PM	BCl3 MFC set to  0.000000
10/5/2011	12:37:09 PM	PHl3 MFC set to  0.000000
10/5/2011	12:37:09 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:37:09 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:37:09 PM	Tube furnace set to 200
10/5/2011	12:37:39 PM	H2 valve closed
10/5/2011	12:37:39 PM	BCl3 valve closed
10/5/2011	12:37:39 PM	PH3 valve closed
10/5/2011	12:37:39 PM	SiCl4 pre valve closed
10/5/2011	12:37:39 PM	SiCl4 post valve closed
10/5/2011	12:37:39 PM	Bypass valve closed
10/5/2011	12:37:39 PM	Bubbler valve closed
10/5/2011	12:37:39 PM	Helium valve opened
10/5/2011	12:37:39 PM	Main Vac valve opened
10/5/2011	12:37:39 PM	Helium MFC set to  20.000000
10/5/2011	12:37:39 PM	H2 MFC set to  0.000000
10/5/2011	12:37:39 PM	BCl3 MFC set to  0.000000
10/5/2011	12:37:39 PM	PHl3 MFC set to  0.000000
10/5/2011	12:37:39 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:37:39 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:37:39 PM	Tube furnace set to 200
10/5/2011	12:38:09 PM	Helium valve closed
10/5/2011	12:38:09 PM	H2 valve closed
10/5/2011	12:38:09 PM	BCl3 valve closed
10/5/2011	12:38:09 PM	PH3 valve closed
10/5/2011	12:38:09 PM	SiCl4 pre valve closed
10/5/2011	12:38:09 PM	SiCl4 post valve closed
10/5/2011	12:38:09 PM	Bypass valve closed
10/5/2011	12:38:09 PM	Bubbler valve closed
10/5/2011	12:38:09 PM	Main Vac valve opened
10/5/2011	12:38:09 PM	Helium MFC set to  0.000000
10/5/2011	12:38:09 PM	H2 MFC set to  0.000000
10/5/2011	12:38:09 PM	BCl3 MFC set to  0.000000
10/5/2011	12:38:09 PM	PHl3 MFC set to  0.000000
10/5/2011	12:38:09 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:38:09 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:38:09 PM	Tube furnace set to 200
10/5/2011	12:38:39 PM	H2 valve closed
10/5/2011	12:38:39 PM	BCl3 valve closed
10/5/2011	12:38:39 PM	PH3 valve closed
10/5/2011	12:38:39 PM	SiCl4 pre valve closed
10/5/2011	12:38:39 PM	SiCl4 post valve closed
10/5/2011	12:38:39 PM	Bypass valve closed
10/5/2011	12:38:39 PM	Bubbler valve closed
10/5/2011	12:38:39 PM	Helium valve opened
10/5/2011	12:38:39 PM	Main Vac valve opened
10/5/2011	12:38:39 PM	Helium MFC set to  20.000000
10/5/2011	12:38:39 PM	H2 MFC set to  0.000000
10/5/2011	12:38:39 PM	BCl3 MFC set to  0.000000
10/5/2011	12:38:39 PM	PHl3 MFC set to  0.000000
10/5/2011	12:38:39 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:38:39 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:38:40 PM	Tube furnace set to 200
10/5/2011	12:39:10 PM	Helium valve closed
10/5/2011	12:39:10 PM	H2 valve closed
10/5/2011	12:39:10 PM	BCl3 valve closed
10/5/2011	12:39:10 PM	PH3 valve closed
10/5/2011	12:39:10 PM	SiCl4 pre valve closed
10/5/2011	12:39:10 PM	SiCl4 post valve closed
10/5/2011	12:39:10 PM	Bypass valve closed
10/5/2011	12:39:10 PM	Bubbler valve closed
10/5/2011	12:39:10 PM	Main Vac valve opened
10/5/2011	12:39:10 PM	Helium MFC set to  0.000000
10/5/2011	12:39:10 PM	H2 MFC set to  0.000000
10/5/2011	12:39:10 PM	BCl3 MFC set to  0.000000
10/5/2011	12:39:10 PM	PHl3 MFC set to  0.000000
10/5/2011	12:39:10 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:39:10 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:39:10 PM	Tube furnace set to 200
10/5/2011	12:39:40 PM	H2 valve closed
10/5/2011	12:39:40 PM	BCl3 valve closed
10/5/2011	12:39:40 PM	PH3 valve closed
10/5/2011	12:39:40 PM	SiCl4 pre valve closed
10/5/2011	12:39:40 PM	SiCl4 post valve closed
10/5/2011	12:39:40 PM	Bypass valve closed
10/5/2011	12:39:40 PM	Bubbler valve closed
10/5/2011	12:39:40 PM	Helium valve opened
10/5/2011	12:39:40 PM	Main Vac valve opened
10/5/2011	12:39:40 PM	Helium MFC set to  20.000000
10/5/2011	12:39:40 PM	H2 MFC set to  0.000000
10/5/2011	12:39:40 PM	BCl3 MFC set to  0.000000
10/5/2011	12:39:40 PM	PHl3 MFC set to  0.000000
10/5/2011	12:39:40 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:39:40 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:39:40 PM	Tube furnace set to 200
10/5/2011	12:40:10 PM	Helium valve closed
10/5/2011	12:40:10 PM	H2 valve closed
10/5/2011	12:40:10 PM	BCl3 valve closed
10/5/2011	12:40:10 PM	PH3 valve closed
10/5/2011	12:40:10 PM	SiCl4 pre valve closed
10/5/2011	12:40:10 PM	SiCl4 post valve closed
10/5/2011	12:40:10 PM	Bypass valve closed
10/5/2011	12:40:10 PM	Bubbler valve closed
10/5/2011	12:40:10 PM	Main Vac valve opened
10/5/2011	12:40:10 PM	Helium MFC set to  0.000000
10/5/2011	12:40:10 PM	H2 MFC set to  0.000000
10/5/2011	12:40:10 PM	BCl3 MFC set to  0.000000
10/5/2011	12:40:10 PM	PHl3 MFC set to  0.000000
10/5/2011	12:40:10 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:40:10 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:40:10 PM	Tube furnace set to 200
10/5/2011	12:40:40 PM	H2 valve closed
10/5/2011	12:40:40 PM	BCl3 valve closed
10/5/2011	12:40:40 PM	PH3 valve closed
10/5/2011	12:40:40 PM	SiCl4 pre valve closed
10/5/2011	12:40:40 PM	SiCl4 post valve closed
10/5/2011	12:40:40 PM	Bypass valve closed
10/5/2011	12:40:40 PM	Bubbler valve closed
10/5/2011	12:40:40 PM	Helium valve opened
10/5/2011	12:40:40 PM	Main Vac valve opened
10/5/2011	12:40:40 PM	Helium MFC set to  20.000000
10/5/2011	12:40:40 PM	H2 MFC set to  0.000000
10/5/2011	12:40:40 PM	BCl3 MFC set to  0.000000
10/5/2011	12:40:40 PM	PHl3 MFC set to  0.000000
10/5/2011	12:40:40 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:40:40 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:40:40 PM	Tube furnace set to 200
10/5/2011	12:41:10 PM	Helium valve closed
10/5/2011	12:41:10 PM	H2 valve closed
10/5/2011	12:41:10 PM	BCl3 valve closed
10/5/2011	12:41:10 PM	PH3 valve closed
10/5/2011	12:41:10 PM	SiCl4 pre valve closed
10/5/2011	12:41:10 PM	SiCl4 post valve closed
10/5/2011	12:41:10 PM	Bypass valve closed
10/5/2011	12:41:10 PM	Bubbler valve closed
10/5/2011	12:41:10 PM	Main Vac valve opened
10/5/2011	12:41:10 PM	Helium MFC set to  0.000000
10/5/2011	12:41:10 PM	H2 MFC set to  0.000000
10/5/2011	12:41:10 PM	BCl3 MFC set to  0.000000
10/5/2011	12:41:10 PM	PHl3 MFC set to  0.000000
10/5/2011	12:41:10 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:41:10 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:41:11 PM	Tube furnace set to 200
10/5/2011	12:41:41 PM	H2 valve closed
10/5/2011	12:41:41 PM	BCl3 valve closed
10/5/2011	12:41:41 PM	PH3 valve closed
10/5/2011	12:41:41 PM	SiCl4 pre valve closed
10/5/2011	12:41:41 PM	SiCl4 post valve closed
10/5/2011	12:41:41 PM	Bypass valve closed
10/5/2011	12:41:41 PM	Bubbler valve closed
10/5/2011	12:41:41 PM	Helium valve opened
10/5/2011	12:41:41 PM	Main Vac valve opened
10/5/2011	12:41:41 PM	Helium MFC set to  20.000000
10/5/2011	12:41:41 PM	H2 MFC set to  0.000000
10/5/2011	12:41:41 PM	BCl3 MFC set to  0.000000
10/5/2011	12:41:41 PM	PHl3 MFC set to  0.000000
10/5/2011	12:41:41 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:41:41 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:41:41 PM	Tube furnace set to 200
10/5/2011	12:42:11 PM	Helium valve closed
10/5/2011	12:42:11 PM	H2 valve closed
10/5/2011	12:42:11 PM	BCl3 valve closed
10/5/2011	12:42:11 PM	PH3 valve closed
10/5/2011	12:42:11 PM	SiCl4 pre valve closed
10/5/2011	12:42:11 PM	SiCl4 post valve closed
10/5/2011	12:42:11 PM	Bypass valve closed
10/5/2011	12:42:11 PM	Bubbler valve closed
10/5/2011	12:42:11 PM	Main Vac valve opened
10/5/2011	12:42:11 PM	Helium MFC set to  0.000000
10/5/2011	12:42:11 PM	H2 MFC set to  0.000000
10/5/2011	12:42:11 PM	BCl3 MFC set to  0.000000
10/5/2011	12:42:11 PM	PHl3 MFC set to  0.000000
10/5/2011	12:42:11 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:42:11 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:42:11 PM	Tube furnace set to 200
10/5/2011	12:42:41 PM	H2 valve closed
10/5/2011	12:42:41 PM	BCl3 valve closed
10/5/2011	12:42:41 PM	PH3 valve closed
10/5/2011	12:42:41 PM	SiCl4 pre valve closed
10/5/2011	12:42:41 PM	SiCl4 post valve closed
10/5/2011	12:42:41 PM	Bypass valve closed
10/5/2011	12:42:41 PM	Bubbler valve closed
10/5/2011	12:42:41 PM	Helium valve opened
10/5/2011	12:42:41 PM	Main Vac valve opened
10/5/2011	12:42:41 PM	Helium MFC set to  20.000000
10/5/2011	12:42:41 PM	H2 MFC set to  0.000000
10/5/2011	12:42:41 PM	BCl3 MFC set to  0.000000
10/5/2011	12:42:41 PM	PHl3 MFC set to  0.000000
10/5/2011	12:42:41 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:42:41 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:42:41 PM	Tube furnace set to 200
10/5/2011	12:43:11 PM	Helium valve closed
10/5/2011	12:43:11 PM	H2 valve closed
10/5/2011	12:43:11 PM	BCl3 valve closed
10/5/2011	12:43:11 PM	PH3 valve closed
10/5/2011	12:43:11 PM	SiCl4 pre valve closed
10/5/2011	12:43:11 PM	SiCl4 post valve closed
10/5/2011	12:43:11 PM	Bypass valve closed
10/5/2011	12:43:11 PM	Bubbler valve closed
10/5/2011	12:43:11 PM	Main Vac valve opened
10/5/2011	12:43:11 PM	Helium MFC set to  0.000000
10/5/2011	12:43:11 PM	H2 MFC set to  0.000000
10/5/2011	12:43:11 PM	BCl3 MFC set to  0.000000
10/5/2011	12:43:11 PM	PHl3 MFC set to  0.000000
10/5/2011	12:43:11 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:43:11 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:43:11 PM	Tube furnace set to 200
10/5/2011	12:43:41 PM	H2 valve closed
10/5/2011	12:43:41 PM	BCl3 valve closed
10/5/2011	12:43:41 PM	PH3 valve closed
10/5/2011	12:43:41 PM	SiCl4 pre valve closed
10/5/2011	12:43:41 PM	SiCl4 post valve closed
10/5/2011	12:43:41 PM	Bypass valve closed
10/5/2011	12:43:41 PM	Bubbler valve closed
10/5/2011	12:43:41 PM	Helium valve opened
10/5/2011	12:43:41 PM	Main Vac valve opened
10/5/2011	12:43:41 PM	Helium MFC set to  20.000000
10/5/2011	12:43:41 PM	H2 MFC set to  0.000000
10/5/2011	12:43:41 PM	BCl3 MFC set to  0.000000
10/5/2011	12:43:41 PM	PHl3 MFC set to  0.000000
10/5/2011	12:43:41 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:43:41 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:43:42 PM	Tube furnace set to 200
10/5/2011	12:44:12 PM	Helium valve closed
10/5/2011	12:44:12 PM	H2 valve closed
10/5/2011	12:44:12 PM	BCl3 valve closed
10/5/2011	12:44:12 PM	PH3 valve closed
10/5/2011	12:44:12 PM	SiCl4 pre valve closed
10/5/2011	12:44:12 PM	SiCl4 post valve closed
10/5/2011	12:44:12 PM	Bypass valve closed
10/5/2011	12:44:12 PM	Bubbler valve closed
10/5/2011	12:44:12 PM	Main Vac valve opened
10/5/2011	12:44:12 PM	Helium MFC set to  0.000000
10/5/2011	12:44:12 PM	H2 MFC set to  0.000000
10/5/2011	12:44:12 PM	BCl3 MFC set to  0.000000
10/5/2011	12:44:12 PM	PHl3 MFC set to  0.000000
10/5/2011	12:44:12 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:44:12 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:44:12 PM	Tube furnace set to 200
10/5/2011	12:44:42 PM	H2 valve closed
10/5/2011	12:44:42 PM	BCl3 valve closed
10/5/2011	12:44:42 PM	PH3 valve closed
10/5/2011	12:44:42 PM	SiCl4 pre valve closed
10/5/2011	12:44:42 PM	SiCl4 post valve closed
10/5/2011	12:44:42 PM	Bypass valve closed
10/5/2011	12:44:42 PM	Bubbler valve closed
10/5/2011	12:44:42 PM	Helium valve opened
10/5/2011	12:44:42 PM	Main Vac valve opened
10/5/2011	12:44:42 PM	Helium MFC set to  20.000000
10/5/2011	12:44:42 PM	H2 MFC set to  0.000000
10/5/2011	12:44:42 PM	BCl3 MFC set to  0.000000
10/5/2011	12:44:42 PM	PHl3 MFC set to  0.000000
10/5/2011	12:44:42 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:44:42 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:44:42 PM	Tube furnace set to 200
10/5/2011	12:45:12 PM	Helium valve closed
10/5/2011	12:45:12 PM	H2 valve closed
10/5/2011	12:45:12 PM	BCl3 valve closed
10/5/2011	12:45:12 PM	PH3 valve closed
10/5/2011	12:45:12 PM	SiCl4 pre valve closed
10/5/2011	12:45:12 PM	SiCl4 post valve closed
10/5/2011	12:45:12 PM	Bypass valve closed
10/5/2011	12:45:12 PM	Bubbler valve closed
10/5/2011	12:45:12 PM	Main Vac valve opened
10/5/2011	12:45:12 PM	Helium MFC set to  0.000000
10/5/2011	12:45:12 PM	H2 MFC set to  0.000000
10/5/2011	12:45:12 PM	BCl3 MFC set to  0.000000
10/5/2011	12:45:12 PM	PHl3 MFC set to  0.000000
10/5/2011	12:45:12 PM	SiCl4 MFC set to  0.000000
10/5/2011	12:45:12 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	12:45:12 PM	Tube furnace set to 200
10/5/2011	12:45:13 PM	Run finished at 12:45 PM
10/5/2011	1:24:58 PM	Recipe started at 1:24 PM
10/5/2011	1:24:58 PM	Helium valve closed
10/5/2011	1:24:58 PM	H2 valve closed
10/5/2011	1:24:58 PM	BCl3 valve closed
10/5/2011	1:24:58 PM	PH3 valve closed
10/5/2011	1:24:58 PM	SiCl4 pre valve closed
10/5/2011	1:24:58 PM	SiCl4 post valve closed
10/5/2011	1:24:58 PM	Bypass valve closed
10/5/2011	1:24:58 PM	Bubbler valve closed
10/5/2011	1:24:58 PM	Main Vac valve opened
10/5/2011	1:24:58 PM	Helium MFC set to  0.000000
10/5/2011	1:24:58 PM	H2 MFC set to  0.000000
10/5/2011	1:24:58 PM	BCl3 MFC set to  0.000000
10/5/2011	1:24:58 PM	PHl3 MFC set to  0.000000
10/5/2011	1:24:58 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:24:58 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:24:59 PM	Tube furnace set to 200
10/5/2011	1:25:00 PM	H2 valve closed
10/5/2011	1:25:00 PM	BCl3 valve closed
10/5/2011	1:25:00 PM	PH3 valve closed
10/5/2011	1:25:00 PM	SiCl4 pre valve closed
10/5/2011	1:25:00 PM	SiCl4 post valve closed
10/5/2011	1:25:00 PM	Bypass valve closed
10/5/2011	1:25:00 PM	Bubbler valve closed
10/5/2011	1:25:00 PM	Helium valve opened
10/5/2011	1:25:00 PM	Main Vac valve opened
10/5/2011	1:25:00 PM	Helium MFC set to  20.000000
10/5/2011	1:25:00 PM	H2 MFC set to  0.000000
10/5/2011	1:25:00 PM	BCl3 MFC set to  0.000000
10/5/2011	1:25:00 PM	PHl3 MFC set to  0.000000
10/5/2011	1:25:00 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:25:00 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:25:01 PM	Tube furnace set to 200
10/5/2011	1:25:31 PM	Helium valve closed
10/5/2011	1:25:31 PM	H2 valve closed
10/5/2011	1:25:31 PM	BCl3 valve closed
10/5/2011	1:25:31 PM	PH3 valve closed
10/5/2011	1:25:31 PM	SiCl4 pre valve closed
10/5/2011	1:25:31 PM	SiCl4 post valve closed
10/5/2011	1:25:31 PM	Bypass valve closed
10/5/2011	1:25:31 PM	Bubbler valve closed
10/5/2011	1:25:31 PM	Main Vac valve opened
10/5/2011	1:25:31 PM	Helium MFC set to  0.000000
10/5/2011	1:25:31 PM	H2 MFC set to  0.000000
10/5/2011	1:25:31 PM	BCl3 MFC set to  0.000000
10/5/2011	1:25:31 PM	PHl3 MFC set to  0.000000
10/5/2011	1:25:31 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:25:31 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:25:31 PM	Tube furnace set to 200
10/5/2011	1:26:01 PM	H2 valve closed
10/5/2011	1:26:01 PM	BCl3 valve closed
10/5/2011	1:26:01 PM	PH3 valve closed
10/5/2011	1:26:01 PM	SiCl4 pre valve closed
10/5/2011	1:26:01 PM	SiCl4 post valve closed
10/5/2011	1:26:01 PM	Bypass valve closed
10/5/2011	1:26:01 PM	Bubbler valve closed
10/5/2011	1:26:01 PM	Helium valve opened
10/5/2011	1:26:01 PM	Main Vac valve opened
10/5/2011	1:26:01 PM	Helium MFC set to  20.000000
10/5/2011	1:26:01 PM	H2 MFC set to  0.000000
10/5/2011	1:26:01 PM	BCl3 MFC set to  0.000000
10/5/2011	1:26:01 PM	PHl3 MFC set to  0.000000
10/5/2011	1:26:01 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:26:01 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:26:01 PM	Tube furnace set to 200
10/5/2011	1:26:31 PM	Helium valve closed
10/5/2011	1:26:31 PM	H2 valve closed
10/5/2011	1:26:31 PM	BCl3 valve closed
10/5/2011	1:26:31 PM	PH3 valve closed
10/5/2011	1:26:31 PM	SiCl4 pre valve closed
10/5/2011	1:26:31 PM	SiCl4 post valve closed
10/5/2011	1:26:31 PM	Bypass valve closed
10/5/2011	1:26:31 PM	Bubbler valve closed
10/5/2011	1:26:31 PM	Main Vac valve opened
10/5/2011	1:26:31 PM	Helium MFC set to  0.000000
10/5/2011	1:26:31 PM	H2 MFC set to  0.000000
10/5/2011	1:26:31 PM	BCl3 MFC set to  0.000000
10/5/2011	1:26:31 PM	PHl3 MFC set to  0.000000
10/5/2011	1:26:31 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:26:31 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:26:31 PM	Tube furnace set to 200
10/5/2011	1:27:01 PM	H2 valve closed
10/5/2011	1:27:01 PM	BCl3 valve closed
10/5/2011	1:27:01 PM	PH3 valve closed
10/5/2011	1:27:01 PM	SiCl4 pre valve closed
10/5/2011	1:27:01 PM	SiCl4 post valve closed
10/5/2011	1:27:01 PM	Bypass valve closed
10/5/2011	1:27:01 PM	Bubbler valve closed
10/5/2011	1:27:01 PM	Helium valve opened
10/5/2011	1:27:01 PM	Main Vac valve opened
10/5/2011	1:27:01 PM	Helium MFC set to  20.000000
10/5/2011	1:27:01 PM	H2 MFC set to  0.000000
10/5/2011	1:27:01 PM	BCl3 MFC set to  0.000000
10/5/2011	1:27:01 PM	PHl3 MFC set to  0.000000
10/5/2011	1:27:01 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:27:01 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:27:01 PM	Tube furnace set to 200
10/5/2011	1:27:31 PM	Helium valve closed
10/5/2011	1:27:31 PM	H2 valve closed
10/5/2011	1:27:31 PM	BCl3 valve closed
10/5/2011	1:27:31 PM	PH3 valve closed
10/5/2011	1:27:31 PM	SiCl4 pre valve closed
10/5/2011	1:27:31 PM	SiCl4 post valve closed
10/5/2011	1:27:31 PM	Bypass valve closed
10/5/2011	1:27:31 PM	Bubbler valve closed
10/5/2011	1:27:31 PM	Main Vac valve opened
10/5/2011	1:27:31 PM	Helium MFC set to  0.000000
10/5/2011	1:27:31 PM	H2 MFC set to  0.000000
10/5/2011	1:27:31 PM	BCl3 MFC set to  0.000000
10/5/2011	1:27:31 PM	PHl3 MFC set to  0.000000
10/5/2011	1:27:31 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:27:31 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:27:32 PM	Tube furnace set to 200
10/5/2011	1:28:02 PM	H2 valve closed
10/5/2011	1:28:02 PM	BCl3 valve closed
10/5/2011	1:28:02 PM	PH3 valve closed
10/5/2011	1:28:02 PM	SiCl4 pre valve closed
10/5/2011	1:28:02 PM	SiCl4 post valve closed
10/5/2011	1:28:02 PM	Bypass valve closed
10/5/2011	1:28:02 PM	Bubbler valve closed
10/5/2011	1:28:02 PM	Helium valve opened
10/5/2011	1:28:02 PM	Main Vac valve opened
10/5/2011	1:28:02 PM	Helium MFC set to  20.000000
10/5/2011	1:28:02 PM	H2 MFC set to  0.000000
10/5/2011	1:28:02 PM	BCl3 MFC set to  0.000000
10/5/2011	1:28:02 PM	PHl3 MFC set to  0.000000
10/5/2011	1:28:02 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:28:02 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:28:02 PM	Tube furnace set to 200
10/5/2011	1:28:32 PM	Helium valve closed
10/5/2011	1:28:32 PM	H2 valve closed
10/5/2011	1:28:32 PM	BCl3 valve closed
10/5/2011	1:28:32 PM	PH3 valve closed
10/5/2011	1:28:32 PM	SiCl4 pre valve closed
10/5/2011	1:28:32 PM	SiCl4 post valve closed
10/5/2011	1:28:32 PM	Bypass valve closed
10/5/2011	1:28:32 PM	Bubbler valve closed
10/5/2011	1:28:32 PM	Main Vac valve opened
10/5/2011	1:28:32 PM	Helium MFC set to  0.000000
10/5/2011	1:28:32 PM	H2 MFC set to  0.000000
10/5/2011	1:28:32 PM	BCl3 MFC set to  0.000000
10/5/2011	1:28:32 PM	PHl3 MFC set to  0.000000
10/5/2011	1:28:32 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:28:32 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:28:32 PM	Tube furnace set to 200
10/5/2011	1:29:02 PM	H2 valve closed
10/5/2011	1:29:02 PM	BCl3 valve closed
10/5/2011	1:29:02 PM	PH3 valve closed
10/5/2011	1:29:02 PM	SiCl4 pre valve closed
10/5/2011	1:29:02 PM	SiCl4 post valve closed
10/5/2011	1:29:02 PM	Bypass valve closed
10/5/2011	1:29:02 PM	Bubbler valve closed
10/5/2011	1:29:02 PM	Helium valve opened
10/5/2011	1:29:02 PM	Main Vac valve opened
10/5/2011	1:29:02 PM	Helium MFC set to  20.000000
10/5/2011	1:29:02 PM	H2 MFC set to  0.000000
10/5/2011	1:29:02 PM	BCl3 MFC set to  0.000000
10/5/2011	1:29:02 PM	PHl3 MFC set to  0.000000
10/5/2011	1:29:02 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:29:02 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:29:02 PM	Tube furnace set to 200
10/5/2011	1:29:32 PM	Helium valve closed
10/5/2011	1:29:32 PM	H2 valve closed
10/5/2011	1:29:32 PM	BCl3 valve closed
10/5/2011	1:29:32 PM	PH3 valve closed
10/5/2011	1:29:32 PM	SiCl4 pre valve closed
10/5/2011	1:29:32 PM	SiCl4 post valve closed
10/5/2011	1:29:32 PM	Bypass valve closed
10/5/2011	1:29:32 PM	Bubbler valve closed
10/5/2011	1:29:32 PM	Main Vac valve opened
10/5/2011	1:29:32 PM	Helium MFC set to  0.000000
10/5/2011	1:29:32 PM	H2 MFC set to  0.000000
10/5/2011	1:29:32 PM	BCl3 MFC set to  0.000000
10/5/2011	1:29:32 PM	PHl3 MFC set to  0.000000
10/5/2011	1:29:32 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:29:32 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:29:32 PM	Tube furnace set to 200
10/5/2011	1:30:02 PM	H2 valve closed
10/5/2011	1:30:02 PM	BCl3 valve closed
10/5/2011	1:30:02 PM	PH3 valve closed
10/5/2011	1:30:02 PM	SiCl4 pre valve closed
10/5/2011	1:30:02 PM	SiCl4 post valve closed
10/5/2011	1:30:02 PM	Bypass valve closed
10/5/2011	1:30:02 PM	Bubbler valve closed
10/5/2011	1:30:02 PM	Helium valve opened
10/5/2011	1:30:02 PM	Main Vac valve opened
10/5/2011	1:30:02 PM	Helium MFC set to  20.000000
10/5/2011	1:30:02 PM	H2 MFC set to  0.000000
10/5/2011	1:30:02 PM	BCl3 MFC set to  0.000000
10/5/2011	1:30:02 PM	PHl3 MFC set to  0.000000
10/5/2011	1:30:02 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:30:02 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:30:03 PM	Tube furnace set to 200
10/5/2011	1:30:33 PM	Helium valve closed
10/5/2011	1:30:33 PM	H2 valve closed
10/5/2011	1:30:33 PM	BCl3 valve closed
10/5/2011	1:30:33 PM	PH3 valve closed
10/5/2011	1:30:33 PM	SiCl4 pre valve closed
10/5/2011	1:30:33 PM	SiCl4 post valve closed
10/5/2011	1:30:33 PM	Bypass valve closed
10/5/2011	1:30:33 PM	Bubbler valve closed
10/5/2011	1:30:33 PM	Main Vac valve opened
10/5/2011	1:30:33 PM	Helium MFC set to  0.000000
10/5/2011	1:30:33 PM	H2 MFC set to  0.000000
10/5/2011	1:30:33 PM	BCl3 MFC set to  0.000000
10/5/2011	1:30:33 PM	PHl3 MFC set to  0.000000
10/5/2011	1:30:33 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:30:33 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:30:33 PM	Tube furnace set to 200
10/5/2011	1:31:03 PM	H2 valve closed
10/5/2011	1:31:03 PM	BCl3 valve closed
10/5/2011	1:31:03 PM	PH3 valve closed
10/5/2011	1:31:03 PM	SiCl4 pre valve closed
10/5/2011	1:31:03 PM	SiCl4 post valve closed
10/5/2011	1:31:03 PM	Bypass valve closed
10/5/2011	1:31:03 PM	Bubbler valve closed
10/5/2011	1:31:03 PM	Helium valve opened
10/5/2011	1:31:03 PM	Main Vac valve opened
10/5/2011	1:31:03 PM	Helium MFC set to  20.000000
10/5/2011	1:31:03 PM	H2 MFC set to  0.000000
10/5/2011	1:31:03 PM	BCl3 MFC set to  0.000000
10/5/2011	1:31:03 PM	PHl3 MFC set to  0.000000
10/5/2011	1:31:03 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:31:03 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:31:03 PM	Tube furnace set to 200
10/5/2011	1:31:33 PM	Helium valve closed
10/5/2011	1:31:33 PM	H2 valve closed
10/5/2011	1:31:33 PM	BCl3 valve closed
10/5/2011	1:31:33 PM	PH3 valve closed
10/5/2011	1:31:33 PM	SiCl4 pre valve closed
10/5/2011	1:31:33 PM	SiCl4 post valve closed
10/5/2011	1:31:33 PM	Bypass valve closed
10/5/2011	1:31:33 PM	Bubbler valve closed
10/5/2011	1:31:33 PM	Main Vac valve opened
10/5/2011	1:31:33 PM	Helium MFC set to  0.000000
10/5/2011	1:31:33 PM	H2 MFC set to  0.000000
10/5/2011	1:31:33 PM	BCl3 MFC set to  0.000000
10/5/2011	1:31:33 PM	PHl3 MFC set to  0.000000
10/5/2011	1:31:33 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:31:33 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:31:33 PM	Tube furnace set to 200
10/5/2011	1:32:03 PM	H2 valve closed
10/5/2011	1:32:03 PM	BCl3 valve closed
10/5/2011	1:32:03 PM	PH3 valve closed
10/5/2011	1:32:03 PM	SiCl4 pre valve closed
10/5/2011	1:32:03 PM	SiCl4 post valve closed
10/5/2011	1:32:03 PM	Bypass valve closed
10/5/2011	1:32:03 PM	Bubbler valve closed
10/5/2011	1:32:03 PM	Helium valve opened
10/5/2011	1:32:03 PM	Main Vac valve opened
10/5/2011	1:32:03 PM	Helium MFC set to  20.000000
10/5/2011	1:32:03 PM	H2 MFC set to  0.000000
10/5/2011	1:32:03 PM	BCl3 MFC set to  0.000000
10/5/2011	1:32:03 PM	PHl3 MFC set to  0.000000
10/5/2011	1:32:03 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:32:03 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:32:03 PM	Tube furnace set to 200
10/5/2011	1:32:33 PM	Helium valve closed
10/5/2011	1:32:33 PM	H2 valve closed
10/5/2011	1:32:33 PM	BCl3 valve closed
10/5/2011	1:32:33 PM	PH3 valve closed
10/5/2011	1:32:33 PM	SiCl4 pre valve closed
10/5/2011	1:32:33 PM	SiCl4 post valve closed
10/5/2011	1:32:33 PM	Bypass valve closed
10/5/2011	1:32:33 PM	Bubbler valve closed
10/5/2011	1:32:33 PM	Main Vac valve opened
10/5/2011	1:32:33 PM	Helium MFC set to  0.000000
10/5/2011	1:32:33 PM	H2 MFC set to  0.000000
10/5/2011	1:32:33 PM	BCl3 MFC set to  0.000000
10/5/2011	1:32:33 PM	PHl3 MFC set to  0.000000
10/5/2011	1:32:33 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:32:33 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:32:34 PM	Tube furnace set to 200
10/5/2011	1:33:04 PM	H2 valve closed
10/5/2011	1:33:04 PM	BCl3 valve closed
10/5/2011	1:33:04 PM	PH3 valve closed
10/5/2011	1:33:04 PM	SiCl4 pre valve closed
10/5/2011	1:33:04 PM	SiCl4 post valve closed
10/5/2011	1:33:04 PM	Bypass valve closed
10/5/2011	1:33:04 PM	Bubbler valve closed
10/5/2011	1:33:04 PM	Helium valve opened
10/5/2011	1:33:04 PM	Main Vac valve opened
10/5/2011	1:33:04 PM	Helium MFC set to  20.000000
10/5/2011	1:33:04 PM	H2 MFC set to  0.000000
10/5/2011	1:33:04 PM	BCl3 MFC set to  0.000000
10/5/2011	1:33:04 PM	PHl3 MFC set to  0.000000
10/5/2011	1:33:04 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:33:04 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:33:04 PM	Tube furnace set to 200
10/5/2011	1:33:34 PM	Helium valve closed
10/5/2011	1:33:34 PM	H2 valve closed
10/5/2011	1:33:34 PM	BCl3 valve closed
10/5/2011	1:33:34 PM	PH3 valve closed
10/5/2011	1:33:34 PM	SiCl4 pre valve closed
10/5/2011	1:33:34 PM	SiCl4 post valve closed
10/5/2011	1:33:34 PM	Bypass valve closed
10/5/2011	1:33:34 PM	Bubbler valve closed
10/5/2011	1:33:34 PM	Main Vac valve opened
10/5/2011	1:33:34 PM	Helium MFC set to  0.000000
10/5/2011	1:33:34 PM	H2 MFC set to  0.000000
10/5/2011	1:33:34 PM	BCl3 MFC set to  0.000000
10/5/2011	1:33:34 PM	PHl3 MFC set to  0.000000
10/5/2011	1:33:34 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:33:34 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:33:34 PM	Tube furnace set to 200
10/5/2011	1:34:04 PM	H2 valve closed
10/5/2011	1:34:04 PM	BCl3 valve closed
10/5/2011	1:34:04 PM	PH3 valve closed
10/5/2011	1:34:04 PM	SiCl4 pre valve closed
10/5/2011	1:34:04 PM	SiCl4 post valve closed
10/5/2011	1:34:04 PM	Bypass valve closed
10/5/2011	1:34:04 PM	Bubbler valve closed
10/5/2011	1:34:04 PM	Helium valve opened
10/5/2011	1:34:04 PM	Main Vac valve opened
10/5/2011	1:34:04 PM	Helium MFC set to  20.000000
10/5/2011	1:34:04 PM	H2 MFC set to  0.000000
10/5/2011	1:34:04 PM	BCl3 MFC set to  0.000000
10/5/2011	1:34:04 PM	PHl3 MFC set to  0.000000
10/5/2011	1:34:04 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:34:04 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:34:04 PM	Tube furnace set to 200
10/5/2011	1:34:34 PM	Helium valve closed
10/5/2011	1:34:34 PM	H2 valve closed
10/5/2011	1:34:34 PM	BCl3 valve closed
10/5/2011	1:34:34 PM	PH3 valve closed
10/5/2011	1:34:34 PM	SiCl4 pre valve closed
10/5/2011	1:34:34 PM	SiCl4 post valve closed
10/5/2011	1:34:34 PM	Bypass valve closed
10/5/2011	1:34:34 PM	Bubbler valve closed
10/5/2011	1:34:34 PM	Main Vac valve opened
10/5/2011	1:34:34 PM	Helium MFC set to  0.000000
10/5/2011	1:34:34 PM	H2 MFC set to  0.000000
10/5/2011	1:34:34 PM	BCl3 MFC set to  0.000000
10/5/2011	1:34:34 PM	PHl3 MFC set to  0.000000
10/5/2011	1:34:34 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:34:34 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:34:34 PM	Tube furnace set to 200
10/5/2011	1:34:35 PM	Run finished at 1:34 PM
10/5/2011	1:51:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/5/2011	1:51:36 PM	Recipe started at 1:51 PM
10/5/2011	1:51:36 PM	Helium valve closed
10/5/2011	1:51:36 PM	H2 valve closed
10/5/2011	1:51:36 PM	BCl3 valve closed
10/5/2011	1:51:36 PM	PH3 valve closed
10/5/2011	1:51:36 PM	SiCl4 pre valve closed
10/5/2011	1:51:36 PM	SiCl4 post valve closed
10/5/2011	1:51:36 PM	Main Vac valve closed
10/5/2011	1:51:36 PM	Bypass valve closed
10/5/2011	1:51:36 PM	Bubbler valve closed
10/5/2011	1:51:36 PM	Helium MFC set to  0.000000
10/5/2011	1:51:36 PM	H2 MFC set to  0.000000
10/5/2011	1:51:36 PM	BCl3 MFC set to  0.000000
10/5/2011	1:51:36 PM	PHl3 MFC set to  0.000000
10/5/2011	1:51:36 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:51:36 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:51:36 PM	Tube furnace set to 0
10/5/2011	1:51:40 PM	H2 valve closed
10/5/2011	1:51:40 PM	BCl3 valve closed
10/5/2011	1:51:40 PM	PH3 valve closed
10/5/2011	1:51:40 PM	SiCl4 pre valve closed
10/5/2011	1:51:40 PM	SiCl4 post valve closed
10/5/2011	1:51:40 PM	Main Vac valve closed
10/5/2011	1:51:40 PM	Bypass valve closed
10/5/2011	1:51:40 PM	Bubbler valve closed
10/5/2011	1:51:40 PM	Helium valve opened
10/5/2011	1:51:40 PM	Helium MFC set to  500.000000
10/5/2011	1:51:40 PM	H2 MFC set to  0.000000
10/5/2011	1:51:40 PM	BCl3 MFC set to  0.000000
10/5/2011	1:51:40 PM	PHl3 MFC set to  0.000000
10/5/2011	1:51:40 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:51:40 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:51:40 PM	Tube furnace set to 0
10/5/2011	1:52:41 PM	Helium valve closed
10/5/2011	1:52:41 PM	H2 valve closed
10/5/2011	1:52:41 PM	BCl3 valve closed
10/5/2011	1:52:41 PM	PH3 valve closed
10/5/2011	1:52:41 PM	SiCl4 pre valve closed
10/5/2011	1:52:41 PM	SiCl4 post valve closed
10/5/2011	1:52:41 PM	Main Vac valve closed
10/5/2011	1:52:41 PM	Bypass valve closed
10/5/2011	1:52:41 PM	Bubbler valve closed
10/5/2011	1:52:41 PM	Helium MFC set to  0.000000
10/5/2011	1:52:41 PM	H2 MFC set to  0.000000
10/5/2011	1:52:41 PM	BCl3 MFC set to  0.000000
10/5/2011	1:52:41 PM	PHl3 MFC set to  0.000000
10/5/2011	1:52:41 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:52:41 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:52:41 PM	Tube furnace set to 0
10/5/2011	1:52:42 PM	Run finished at 1:52 PM
10/5/2011	1:52:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/5/2011	1:56:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2011	1:56:53 PM	Recipe started at 1:56 PM
10/5/2011	1:56:53 PM	Helium valve closed
10/5/2011	1:56:53 PM	H2 valve closed
10/5/2011	1:56:53 PM	BCl3 valve closed
10/5/2011	1:56:53 PM	PH3 valve closed
10/5/2011	1:56:53 PM	SiCl4 pre valve closed
10/5/2011	1:56:53 PM	SiCl4 post valve closed
10/5/2011	1:56:53 PM	Main Vac valve closed
10/5/2011	1:56:53 PM	Bubbler valve closed
10/5/2011	1:56:53 PM	Bypass valve opened
10/5/2011	1:56:53 PM	Helium MFC set to  0.000000
10/5/2011	1:56:53 PM	H2 MFC set to  0.000000
10/5/2011	1:56:53 PM	BCl3 MFC set to  0.000000
10/5/2011	1:56:53 PM	PHl3 MFC set to  0.000000
10/5/2011	1:56:53 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:56:53 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:56:53 PM	Tube furnace set to 0
10/5/2011	1:57:56 PM	Helium valve closed
10/5/2011	1:57:56 PM	H2 valve closed
10/5/2011	1:57:56 PM	BCl3 valve closed
10/5/2011	1:57:56 PM	PH3 valve closed
10/5/2011	1:57:56 PM	SiCl4 pre valve closed
10/5/2011	1:57:56 PM	SiCl4 post valve closed
10/5/2011	1:57:56 PM	Main Vac valve closed
10/5/2011	1:57:56 PM	Bubbler valve closed
10/5/2011	1:57:56 PM	Bypass valve opened
10/5/2011	1:57:56 PM	Helium MFC set to  0.000000
10/5/2011	1:57:56 PM	H2 MFC set to  0.000000
10/5/2011	1:57:56 PM	BCl3 MFC set to  0.000000
10/5/2011	1:57:56 PM	PHl3 MFC set to  0.000000
10/5/2011	1:57:56 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:57:56 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:57:57 PM	Tube furnace set to 0
10/5/2011	1:58:57 PM	Helium valve closed
10/5/2011	1:58:57 PM	H2 valve closed
10/5/2011	1:58:57 PM	BCl3 valve closed
10/5/2011	1:58:57 PM	PH3 valve closed
10/5/2011	1:58:57 PM	SiCl4 pre valve closed
10/5/2011	1:58:57 PM	SiCl4 post valve closed
10/5/2011	1:58:57 PM	Bypass valve closed
10/5/2011	1:58:57 PM	Bubbler valve closed
10/5/2011	1:58:57 PM	Main Vac valve opened
10/5/2011	1:58:57 PM	Helium MFC set to  0.000000
10/5/2011	1:58:57 PM	H2 MFC set to  0.000000
10/5/2011	1:58:57 PM	BCl3 MFC set to  0.000000
10/5/2011	1:58:57 PM	PHl3 MFC set to  0.000000
10/5/2011	1:58:57 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:58:57 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:58:57 PM	Tube furnace set to 0
10/5/2011	1:58:58 PM	Run finished at 1:58 PM
10/5/2011	1:58:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2011	1:59:57 PM	Recipe started at 1:59 PM
10/5/2011	1:59:57 PM	Helium valve closed
10/5/2011	1:59:57 PM	H2 valve closed
10/5/2011	1:59:57 PM	BCl3 valve closed
10/5/2011	1:59:57 PM	PH3 valve closed
10/5/2011	1:59:57 PM	SiCl4 pre valve closed
10/5/2011	1:59:57 PM	SiCl4 post valve closed
10/5/2011	1:59:57 PM	Bypass valve closed
10/5/2011	1:59:57 PM	Bubbler valve closed
10/5/2011	1:59:57 PM	Main Vac valve opened
10/5/2011	1:59:57 PM	Helium MFC set to  0.000000
10/5/2011	1:59:57 PM	H2 MFC set to  0.000000
10/5/2011	1:59:57 PM	BCl3 MFC set to  0.000000
10/5/2011	1:59:57 PM	PHl3 MFC set to  0.000000
10/5/2011	1:59:57 PM	SiCl4 MFC set to  0.000000
10/5/2011	1:59:57 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	1:59:57 PM	Tube furnace set to 200
10/5/2011	2:00:27 PM	H2 valve closed
10/5/2011	2:00:27 PM	BCl3 valve closed
10/5/2011	2:00:27 PM	PH3 valve closed
10/5/2011	2:00:27 PM	SiCl4 pre valve closed
10/5/2011	2:00:27 PM	SiCl4 post valve closed
10/5/2011	2:00:27 PM	Bypass valve closed
10/5/2011	2:00:27 PM	Bubbler valve closed
10/5/2011	2:00:27 PM	Helium valve opened
10/5/2011	2:00:27 PM	Main Vac valve opened
10/5/2011	2:00:27 PM	Helium MFC set to  20.000000
10/5/2011	2:00:27 PM	H2 MFC set to  0.000000
10/5/2011	2:00:27 PM	BCl3 MFC set to  0.000000
10/5/2011	2:00:27 PM	PHl3 MFC set to  0.000000
10/5/2011	2:00:27 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:00:27 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:00:27 PM	Tube furnace set to 200
10/5/2011	2:00:57 PM	Helium valve closed
10/5/2011	2:00:57 PM	H2 valve closed
10/5/2011	2:00:57 PM	BCl3 valve closed
10/5/2011	2:00:57 PM	PH3 valve closed
10/5/2011	2:00:57 PM	SiCl4 pre valve closed
10/5/2011	2:00:57 PM	SiCl4 post valve closed
10/5/2011	2:00:57 PM	Bypass valve closed
10/5/2011	2:00:57 PM	Bubbler valve closed
10/5/2011	2:00:57 PM	Main Vac valve opened
10/5/2011	2:00:57 PM	Helium MFC set to  0.000000
10/5/2011	2:00:57 PM	H2 MFC set to  0.000000
10/5/2011	2:00:57 PM	BCl3 MFC set to  0.000000
10/5/2011	2:00:57 PM	PHl3 MFC set to  0.000000
10/5/2011	2:00:57 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:00:57 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:00:57 PM	Tube furnace set to 200
10/5/2011	2:01:27 PM	H2 valve closed
10/5/2011	2:01:27 PM	BCl3 valve closed
10/5/2011	2:01:27 PM	PH3 valve closed
10/5/2011	2:01:27 PM	SiCl4 pre valve closed
10/5/2011	2:01:27 PM	SiCl4 post valve closed
10/5/2011	2:01:27 PM	Bypass valve closed
10/5/2011	2:01:27 PM	Bubbler valve closed
10/5/2011	2:01:27 PM	Helium valve opened
10/5/2011	2:01:27 PM	Main Vac valve opened
10/5/2011	2:01:27 PM	Helium MFC set to  20.000000
10/5/2011	2:01:27 PM	H2 MFC set to  0.000000
10/5/2011	2:01:27 PM	BCl3 MFC set to  0.000000
10/5/2011	2:01:27 PM	PHl3 MFC set to  0.000000
10/5/2011	2:01:27 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:01:27 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:01:27 PM	Tube furnace set to 200
10/5/2011	2:01:57 PM	Helium valve closed
10/5/2011	2:01:57 PM	H2 valve closed
10/5/2011	2:01:57 PM	BCl3 valve closed
10/5/2011	2:01:57 PM	PH3 valve closed
10/5/2011	2:01:57 PM	SiCl4 pre valve closed
10/5/2011	2:01:57 PM	SiCl4 post valve closed
10/5/2011	2:01:57 PM	Bypass valve closed
10/5/2011	2:01:57 PM	Bubbler valve closed
10/5/2011	2:01:57 PM	Main Vac valve opened
10/5/2011	2:01:57 PM	Helium MFC set to  0.000000
10/5/2011	2:01:57 PM	H2 MFC set to  0.000000
10/5/2011	2:01:57 PM	BCl3 MFC set to  0.000000
10/5/2011	2:01:57 PM	PHl3 MFC set to  0.000000
10/5/2011	2:01:57 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:01:57 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:01:58 PM	Tube furnace set to 200
10/5/2011	2:02:28 PM	H2 valve closed
10/5/2011	2:02:28 PM	BCl3 valve closed
10/5/2011	2:02:28 PM	PH3 valve closed
10/5/2011	2:02:28 PM	SiCl4 pre valve closed
10/5/2011	2:02:28 PM	SiCl4 post valve closed
10/5/2011	2:02:28 PM	Bypass valve closed
10/5/2011	2:02:28 PM	Bubbler valve closed
10/5/2011	2:02:28 PM	Helium valve opened
10/5/2011	2:02:28 PM	Main Vac valve opened
10/5/2011	2:02:28 PM	Helium MFC set to  20.000000
10/5/2011	2:02:28 PM	H2 MFC set to  0.000000
10/5/2011	2:02:28 PM	BCl3 MFC set to  0.000000
10/5/2011	2:02:28 PM	PHl3 MFC set to  0.000000
10/5/2011	2:02:28 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:02:28 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:02:28 PM	Tube furnace set to 200
10/5/2011	2:02:58 PM	Helium valve closed
10/5/2011	2:02:58 PM	H2 valve closed
10/5/2011	2:02:58 PM	BCl3 valve closed
10/5/2011	2:02:58 PM	PH3 valve closed
10/5/2011	2:02:58 PM	SiCl4 pre valve closed
10/5/2011	2:02:58 PM	SiCl4 post valve closed
10/5/2011	2:02:58 PM	Bypass valve closed
10/5/2011	2:02:58 PM	Bubbler valve closed
10/5/2011	2:02:58 PM	Main Vac valve opened
10/5/2011	2:02:58 PM	Helium MFC set to  0.000000
10/5/2011	2:02:58 PM	H2 MFC set to  0.000000
10/5/2011	2:02:58 PM	BCl3 MFC set to  0.000000
10/5/2011	2:02:58 PM	PHl3 MFC set to  0.000000
10/5/2011	2:02:58 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:02:58 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:02:58 PM	Tube furnace set to 200
10/5/2011	2:03:28 PM	H2 valve closed
10/5/2011	2:03:28 PM	BCl3 valve closed
10/5/2011	2:03:28 PM	PH3 valve closed
10/5/2011	2:03:28 PM	SiCl4 pre valve closed
10/5/2011	2:03:28 PM	SiCl4 post valve closed
10/5/2011	2:03:28 PM	Bypass valve closed
10/5/2011	2:03:28 PM	Bubbler valve closed
10/5/2011	2:03:28 PM	Helium valve opened
10/5/2011	2:03:28 PM	Main Vac valve opened
10/5/2011	2:03:28 PM	Helium MFC set to  20.000000
10/5/2011	2:03:28 PM	H2 MFC set to  0.000000
10/5/2011	2:03:28 PM	BCl3 MFC set to  0.000000
10/5/2011	2:03:28 PM	PHl3 MFC set to  0.000000
10/5/2011	2:03:28 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:03:28 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:03:28 PM	Tube furnace set to 200
10/5/2011	2:03:58 PM	Helium valve closed
10/5/2011	2:03:58 PM	H2 valve closed
10/5/2011	2:03:58 PM	BCl3 valve closed
10/5/2011	2:03:58 PM	PH3 valve closed
10/5/2011	2:03:58 PM	SiCl4 pre valve closed
10/5/2011	2:03:58 PM	SiCl4 post valve closed
10/5/2011	2:03:58 PM	Bypass valve closed
10/5/2011	2:03:58 PM	Bubbler valve closed
10/5/2011	2:03:58 PM	Main Vac valve opened
10/5/2011	2:03:58 PM	Helium MFC set to  0.000000
10/5/2011	2:03:58 PM	H2 MFC set to  0.000000
10/5/2011	2:03:58 PM	BCl3 MFC set to  0.000000
10/5/2011	2:03:58 PM	PHl3 MFC set to  0.000000
10/5/2011	2:03:58 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:03:58 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:03:58 PM	Tube furnace set to 200
10/5/2011	2:04:28 PM	H2 valve closed
10/5/2011	2:04:28 PM	BCl3 valve closed
10/5/2011	2:04:28 PM	PH3 valve closed
10/5/2011	2:04:28 PM	SiCl4 pre valve closed
10/5/2011	2:04:28 PM	SiCl4 post valve closed
10/5/2011	2:04:28 PM	Bypass valve closed
10/5/2011	2:04:28 PM	Bubbler valve closed
10/5/2011	2:04:28 PM	Helium valve opened
10/5/2011	2:04:28 PM	Main Vac valve opened
10/5/2011	2:04:28 PM	Helium MFC set to  20.000000
10/5/2011	2:04:28 PM	H2 MFC set to  0.000000
10/5/2011	2:04:29 PM	BCl3 MFC set to  0.000000
10/5/2011	2:04:29 PM	PHl3 MFC set to  0.000000
10/5/2011	2:04:29 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:04:29 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:04:29 PM	Tube furnace set to 200
10/5/2011	2:04:59 PM	Helium valve closed
10/5/2011	2:04:59 PM	H2 valve closed
10/5/2011	2:04:59 PM	BCl3 valve closed
10/5/2011	2:04:59 PM	PH3 valve closed
10/5/2011	2:04:59 PM	SiCl4 pre valve closed
10/5/2011	2:04:59 PM	SiCl4 post valve closed
10/5/2011	2:04:59 PM	Bypass valve closed
10/5/2011	2:04:59 PM	Bubbler valve closed
10/5/2011	2:04:59 PM	Main Vac valve opened
10/5/2011	2:04:59 PM	Helium MFC set to  0.000000
10/5/2011	2:04:59 PM	H2 MFC set to  0.000000
10/5/2011	2:04:59 PM	BCl3 MFC set to  0.000000
10/5/2011	2:04:59 PM	PHl3 MFC set to  0.000000
10/5/2011	2:04:59 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:04:59 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:04:59 PM	Tube furnace set to 200
10/5/2011	2:05:29 PM	H2 valve closed
10/5/2011	2:05:29 PM	BCl3 valve closed
10/5/2011	2:05:29 PM	PH3 valve closed
10/5/2011	2:05:29 PM	SiCl4 pre valve closed
10/5/2011	2:05:29 PM	SiCl4 post valve closed
10/5/2011	2:05:29 PM	Bypass valve closed
10/5/2011	2:05:29 PM	Bubbler valve closed
10/5/2011	2:05:29 PM	Helium valve opened
10/5/2011	2:05:29 PM	Main Vac valve opened
10/5/2011	2:05:29 PM	Helium MFC set to  20.000000
10/5/2011	2:05:29 PM	H2 MFC set to  0.000000
10/5/2011	2:05:29 PM	BCl3 MFC set to  0.000000
10/5/2011	2:05:29 PM	PHl3 MFC set to  0.000000
10/5/2011	2:05:29 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:05:29 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:05:29 PM	Tube furnace set to 200
10/5/2011	2:05:59 PM	Helium valve closed
10/5/2011	2:05:59 PM	H2 valve closed
10/5/2011	2:05:59 PM	BCl3 valve closed
10/5/2011	2:05:59 PM	PH3 valve closed
10/5/2011	2:05:59 PM	SiCl4 pre valve closed
10/5/2011	2:05:59 PM	SiCl4 post valve closed
10/5/2011	2:05:59 PM	Bypass valve closed
10/5/2011	2:05:59 PM	Bubbler valve closed
10/5/2011	2:05:59 PM	Main Vac valve opened
10/5/2011	2:05:59 PM	Helium MFC set to  0.000000
10/5/2011	2:05:59 PM	H2 MFC set to  0.000000
10/5/2011	2:05:59 PM	BCl3 MFC set to  0.000000
10/5/2011	2:05:59 PM	PHl3 MFC set to  0.000000
10/5/2011	2:05:59 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:05:59 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:05:59 PM	Tube furnace set to 200
10/5/2011	2:06:29 PM	H2 valve closed
10/5/2011	2:06:29 PM	BCl3 valve closed
10/5/2011	2:06:29 PM	PH3 valve closed
10/5/2011	2:06:29 PM	SiCl4 pre valve closed
10/5/2011	2:06:29 PM	SiCl4 post valve closed
10/5/2011	2:06:29 PM	Bypass valve closed
10/5/2011	2:06:29 PM	Bubbler valve closed
10/5/2011	2:06:29 PM	Helium valve opened
10/5/2011	2:06:29 PM	Main Vac valve opened
10/5/2011	2:06:29 PM	Helium MFC set to  20.000000
10/5/2011	2:06:29 PM	H2 MFC set to  0.000000
10/5/2011	2:06:29 PM	BCl3 MFC set to  0.000000
10/5/2011	2:06:29 PM	PHl3 MFC set to  0.000000
10/5/2011	2:06:29 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:06:29 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:06:29 PM	Tube furnace set to 200
10/5/2011	2:07:00 PM	Helium valve closed
10/5/2011	2:07:00 PM	H2 valve closed
10/5/2011	2:07:00 PM	BCl3 valve closed
10/5/2011	2:07:00 PM	PH3 valve closed
10/5/2011	2:07:00 PM	SiCl4 pre valve closed
10/5/2011	2:07:00 PM	SiCl4 post valve closed
10/5/2011	2:07:00 PM	Bypass valve closed
10/5/2011	2:07:00 PM	Bubbler valve closed
10/5/2011	2:07:00 PM	Main Vac valve opened
10/5/2011	2:07:00 PM	Helium MFC set to  0.000000
10/5/2011	2:07:00 PM	H2 MFC set to  0.000000
10/5/2011	2:07:00 PM	BCl3 MFC set to  0.000000
10/5/2011	2:07:00 PM	PHl3 MFC set to  0.000000
10/5/2011	2:07:00 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:07:00 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:07:00 PM	Tube furnace set to 200
10/5/2011	2:07:30 PM	H2 valve closed
10/5/2011	2:07:30 PM	BCl3 valve closed
10/5/2011	2:07:30 PM	PH3 valve closed
10/5/2011	2:07:30 PM	SiCl4 pre valve closed
10/5/2011	2:07:30 PM	SiCl4 post valve closed
10/5/2011	2:07:30 PM	Bypass valve closed
10/5/2011	2:07:30 PM	Bubbler valve closed
10/5/2011	2:07:30 PM	Helium valve opened
10/5/2011	2:07:30 PM	Main Vac valve opened
10/5/2011	2:07:30 PM	Helium MFC set to  20.000000
10/5/2011	2:07:30 PM	H2 MFC set to  0.000000
10/5/2011	2:07:30 PM	BCl3 MFC set to  0.000000
10/5/2011	2:07:30 PM	PHl3 MFC set to  0.000000
10/5/2011	2:07:30 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:07:30 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:07:30 PM	Tube furnace set to 200
10/5/2011	2:08:00 PM	Helium valve closed
10/5/2011	2:08:00 PM	H2 valve closed
10/5/2011	2:08:00 PM	BCl3 valve closed
10/5/2011	2:08:00 PM	PH3 valve closed
10/5/2011	2:08:00 PM	SiCl4 pre valve closed
10/5/2011	2:08:00 PM	SiCl4 post valve closed
10/5/2011	2:08:00 PM	Bypass valve closed
10/5/2011	2:08:00 PM	Bubbler valve closed
10/5/2011	2:08:00 PM	Main Vac valve opened
10/5/2011	2:08:00 PM	Helium MFC set to  0.000000
10/5/2011	2:08:00 PM	H2 MFC set to  0.000000
10/5/2011	2:08:00 PM	BCl3 MFC set to  0.000000
10/5/2011	2:08:00 PM	PHl3 MFC set to  0.000000
10/5/2011	2:08:00 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:08:00 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:08:00 PM	Tube furnace set to 200
10/5/2011	2:08:30 PM	H2 valve closed
10/5/2011	2:08:30 PM	BCl3 valve closed
10/5/2011	2:08:30 PM	PH3 valve closed
10/5/2011	2:08:30 PM	SiCl4 pre valve closed
10/5/2011	2:08:30 PM	SiCl4 post valve closed
10/5/2011	2:08:30 PM	Bypass valve closed
10/5/2011	2:08:30 PM	Bubbler valve closed
10/5/2011	2:08:30 PM	Helium valve opened
10/5/2011	2:08:30 PM	Main Vac valve opened
10/5/2011	2:08:30 PM	Helium MFC set to  20.000000
10/5/2011	2:08:30 PM	H2 MFC set to  0.000000
10/5/2011	2:08:30 PM	BCl3 MFC set to  0.000000
10/5/2011	2:08:30 PM	PHl3 MFC set to  0.000000
10/5/2011	2:08:30 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:08:30 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:08:30 PM	Tube furnace set to 200
10/5/2011	2:09:00 PM	Helium valve closed
10/5/2011	2:09:00 PM	H2 valve closed
10/5/2011	2:09:00 PM	BCl3 valve closed
10/5/2011	2:09:00 PM	PH3 valve closed
10/5/2011	2:09:00 PM	SiCl4 pre valve closed
10/5/2011	2:09:00 PM	SiCl4 post valve closed
10/5/2011	2:09:00 PM	Bypass valve closed
10/5/2011	2:09:00 PM	Bubbler valve closed
10/5/2011	2:09:00 PM	Main Vac valve opened
10/5/2011	2:09:00 PM	Helium MFC set to  0.000000
10/5/2011	2:09:00 PM	H2 MFC set to  0.000000
10/5/2011	2:09:00 PM	BCl3 MFC set to  0.000000
10/5/2011	2:09:00 PM	PHl3 MFC set to  0.000000
10/5/2011	2:09:00 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:09:00 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:09:00 PM	Tube furnace set to 200
10/5/2011	2:09:31 PM	H2 valve closed
10/5/2011	2:09:31 PM	BCl3 valve closed
10/5/2011	2:09:31 PM	PH3 valve closed
10/5/2011	2:09:31 PM	SiCl4 pre valve closed
10/5/2011	2:09:31 PM	SiCl4 post valve closed
10/5/2011	2:09:31 PM	Bypass valve closed
10/5/2011	2:09:31 PM	Bubbler valve closed
10/5/2011	2:09:31 PM	Helium valve opened
10/5/2011	2:09:31 PM	Main Vac valve opened
10/5/2011	2:09:31 PM	Helium MFC set to  20.000000
10/5/2011	2:09:31 PM	H2 MFC set to  0.000000
10/5/2011	2:09:31 PM	BCl3 MFC set to  0.000000
10/5/2011	2:09:31 PM	PHl3 MFC set to  0.000000
10/5/2011	2:09:31 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:09:31 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:09:31 PM	Tube furnace set to 200
10/5/2011	2:10:01 PM	Helium valve closed
10/5/2011	2:10:01 PM	H2 valve closed
10/5/2011	2:10:01 PM	BCl3 valve closed
10/5/2011	2:10:01 PM	PH3 valve closed
10/5/2011	2:10:01 PM	SiCl4 pre valve closed
10/5/2011	2:10:01 PM	SiCl4 post valve closed
10/5/2011	2:10:01 PM	Bypass valve closed
10/5/2011	2:10:01 PM	Bubbler valve closed
10/5/2011	2:10:01 PM	Main Vac valve opened
10/5/2011	2:10:01 PM	Helium MFC set to  0.000000
10/5/2011	2:10:01 PM	H2 MFC set to  0.000000
10/5/2011	2:10:01 PM	BCl3 MFC set to  0.000000
10/5/2011	2:10:01 PM	PHl3 MFC set to  0.000000
10/5/2011	2:10:01 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:10:01 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:10:01 PM	Tube furnace set to 200
10/5/2011	2:10:02 PM	Run finished at 2:10 PM
10/5/2011	2:11:04 PM	Recipe started at 2:10 PM
10/5/2011	2:11:04 PM	Helium valve closed
10/5/2011	2:11:04 PM	H2 valve closed
10/5/2011	2:11:04 PM	BCl3 valve closed
10/5/2011	2:11:04 PM	PH3 valve closed
10/5/2011	2:11:04 PM	SiCl4 pre valve closed
10/5/2011	2:11:04 PM	SiCl4 post valve closed
10/5/2011	2:11:04 PM	Bypass valve closed
10/5/2011	2:11:04 PM	Bubbler valve closed
10/5/2011	2:11:04 PM	Main Vac valve opened
10/5/2011	2:11:04 PM	Helium MFC set to  0.000000
10/5/2011	2:11:04 PM	H2 MFC set to  0.000000
10/5/2011	2:11:04 PM	BCl3 MFC set to  0.000000
10/5/2011	2:11:04 PM	PHl3 MFC set to  0.000000
10/5/2011	2:11:04 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:11:04 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:11:04 PM	Tube furnace set to 200
10/5/2011	2:11:19 PM	H2 valve closed
10/5/2011	2:11:19 PM	BCl3 valve closed
10/5/2011	2:11:19 PM	PH3 valve closed
10/5/2011	2:11:19 PM	SiCl4 pre valve closed
10/5/2011	2:11:19 PM	SiCl4 post valve closed
10/5/2011	2:11:19 PM	Bypass valve closed
10/5/2011	2:11:19 PM	Bubbler valve closed
10/5/2011	2:11:19 PM	Helium valve opened
10/5/2011	2:11:19 PM	Main Vac valve opened
10/5/2011	2:11:19 PM	Helium MFC set to  20.000000
10/5/2011	2:11:19 PM	H2 MFC set to  0.000000
10/5/2011	2:11:19 PM	BCl3 MFC set to  0.000000
10/5/2011	2:11:19 PM	PHl3 MFC set to  0.000000
10/5/2011	2:11:19 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:11:19 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:11:19 PM	Tube furnace set to 200
10/5/2011	2:11:49 PM	Helium valve closed
10/5/2011	2:11:49 PM	H2 valve closed
10/5/2011	2:11:49 PM	BCl3 valve closed
10/5/2011	2:11:49 PM	PH3 valve closed
10/5/2011	2:11:49 PM	SiCl4 pre valve closed
10/5/2011	2:11:49 PM	SiCl4 post valve closed
10/5/2011	2:11:49 PM	Bypass valve closed
10/5/2011	2:11:49 PM	Bubbler valve closed
10/5/2011	2:11:49 PM	Main Vac valve opened
10/5/2011	2:11:49 PM	Helium MFC set to  0.000000
10/5/2011	2:11:49 PM	H2 MFC set to  0.000000
10/5/2011	2:11:49 PM	BCl3 MFC set to  0.000000
10/5/2011	2:11:49 PM	PHl3 MFC set to  0.000000
10/5/2011	2:11:49 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:11:49 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:11:49 PM	Tube furnace set to 200
10/5/2011	2:12:20 PM	H2 valve closed
10/5/2011	2:12:20 PM	BCl3 valve closed
10/5/2011	2:12:20 PM	PH3 valve closed
10/5/2011	2:12:20 PM	SiCl4 pre valve closed
10/5/2011	2:12:20 PM	SiCl4 post valve closed
10/5/2011	2:12:20 PM	Bypass valve closed
10/5/2011	2:12:20 PM	Bubbler valve closed
10/5/2011	2:12:20 PM	Helium valve opened
10/5/2011	2:12:20 PM	Main Vac valve opened
10/5/2011	2:12:20 PM	Helium MFC set to  20.000000
10/5/2011	2:12:20 PM	H2 MFC set to  0.000000
10/5/2011	2:12:20 PM	BCl3 MFC set to  0.000000
10/5/2011	2:12:20 PM	PHl3 MFC set to  0.000000
10/5/2011	2:12:20 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:12:20 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:12:20 PM	Tube furnace set to 200
10/5/2011	2:12:50 PM	Helium valve closed
10/5/2011	2:12:50 PM	H2 valve closed
10/5/2011	2:12:50 PM	BCl3 valve closed
10/5/2011	2:12:50 PM	PH3 valve closed
10/5/2011	2:12:50 PM	SiCl4 pre valve closed
10/5/2011	2:12:50 PM	SiCl4 post valve closed
10/5/2011	2:12:50 PM	Bypass valve closed
10/5/2011	2:12:50 PM	Bubbler valve closed
10/5/2011	2:12:50 PM	Main Vac valve opened
10/5/2011	2:12:50 PM	Helium MFC set to  0.000000
10/5/2011	2:12:50 PM	H2 MFC set to  0.000000
10/5/2011	2:12:50 PM	BCl3 MFC set to  0.000000
10/5/2011	2:12:50 PM	PHl3 MFC set to  0.000000
10/5/2011	2:12:50 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:12:50 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:12:50 PM	Tube furnace set to 200
10/5/2011	2:13:20 PM	H2 valve closed
10/5/2011	2:13:20 PM	BCl3 valve closed
10/5/2011	2:13:20 PM	PH3 valve closed
10/5/2011	2:13:20 PM	SiCl4 pre valve closed
10/5/2011	2:13:20 PM	SiCl4 post valve closed
10/5/2011	2:13:20 PM	Bypass valve closed
10/5/2011	2:13:20 PM	Bubbler valve closed
10/5/2011	2:13:20 PM	Helium valve opened
10/5/2011	2:13:20 PM	Main Vac valve opened
10/5/2011	2:13:20 PM	Helium MFC set to  20.000000
10/5/2011	2:13:20 PM	H2 MFC set to  0.000000
10/5/2011	2:13:20 PM	BCl3 MFC set to  0.000000
10/5/2011	2:13:20 PM	PHl3 MFC set to  0.000000
10/5/2011	2:13:20 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:13:20 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:13:20 PM	Tube furnace set to 200
10/5/2011	2:13:50 PM	Helium valve closed
10/5/2011	2:13:50 PM	H2 valve closed
10/5/2011	2:13:50 PM	BCl3 valve closed
10/5/2011	2:13:50 PM	PH3 valve closed
10/5/2011	2:13:50 PM	SiCl4 pre valve closed
10/5/2011	2:13:50 PM	SiCl4 post valve closed
10/5/2011	2:13:50 PM	Bypass valve closed
10/5/2011	2:13:50 PM	Bubbler valve closed
10/5/2011	2:13:50 PM	Main Vac valve opened
10/5/2011	2:13:50 PM	Helium MFC set to  0.000000
10/5/2011	2:13:50 PM	H2 MFC set to  0.000000
10/5/2011	2:13:50 PM	BCl3 MFC set to  0.000000
10/5/2011	2:13:50 PM	PHl3 MFC set to  0.000000
10/5/2011	2:13:50 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:13:50 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:13:50 PM	Tube furnace set to 200
10/5/2011	2:14:20 PM	H2 valve closed
10/5/2011	2:14:20 PM	BCl3 valve closed
10/5/2011	2:14:20 PM	PH3 valve closed
10/5/2011	2:14:20 PM	SiCl4 pre valve closed
10/5/2011	2:14:20 PM	SiCl4 post valve closed
10/5/2011	2:14:20 PM	Bypass valve closed
10/5/2011	2:14:20 PM	Bubbler valve closed
10/5/2011	2:14:20 PM	Helium valve opened
10/5/2011	2:14:20 PM	Main Vac valve opened
10/5/2011	2:14:20 PM	Helium MFC set to  20.000000
10/5/2011	2:14:20 PM	H2 MFC set to  0.000000
10/5/2011	2:14:20 PM	BCl3 MFC set to  0.000000
10/5/2011	2:14:20 PM	PHl3 MFC set to  0.000000
10/5/2011	2:14:20 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:14:20 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:14:21 PM	Tube furnace set to 200
10/5/2011	2:14:51 PM	Helium valve closed
10/5/2011	2:14:51 PM	H2 valve closed
10/5/2011	2:14:51 PM	BCl3 valve closed
10/5/2011	2:14:51 PM	PH3 valve closed
10/5/2011	2:14:51 PM	SiCl4 pre valve closed
10/5/2011	2:14:51 PM	SiCl4 post valve closed
10/5/2011	2:14:51 PM	Bypass valve closed
10/5/2011	2:14:51 PM	Bubbler valve closed
10/5/2011	2:14:51 PM	Main Vac valve opened
10/5/2011	2:14:51 PM	Helium MFC set to  0.000000
10/5/2011	2:14:51 PM	H2 MFC set to  0.000000
10/5/2011	2:14:51 PM	BCl3 MFC set to  0.000000
10/5/2011	2:14:51 PM	PHl3 MFC set to  0.000000
10/5/2011	2:14:51 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:14:51 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:14:51 PM	Tube furnace set to 200
10/5/2011	2:15:21 PM	H2 valve closed
10/5/2011	2:15:21 PM	BCl3 valve closed
10/5/2011	2:15:21 PM	PH3 valve closed
10/5/2011	2:15:21 PM	SiCl4 pre valve closed
10/5/2011	2:15:21 PM	SiCl4 post valve closed
10/5/2011	2:15:21 PM	Bypass valve closed
10/5/2011	2:15:21 PM	Bubbler valve closed
10/5/2011	2:15:21 PM	Helium valve opened
10/5/2011	2:15:21 PM	Main Vac valve opened
10/5/2011	2:15:21 PM	Helium MFC set to  20.000000
10/5/2011	2:15:21 PM	H2 MFC set to  0.000000
10/5/2011	2:15:21 PM	BCl3 MFC set to  0.000000
10/5/2011	2:15:21 PM	PHl3 MFC set to  0.000000
10/5/2011	2:15:21 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:15:21 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:15:21 PM	Tube furnace set to 200
10/5/2011	2:15:51 PM	Helium valve closed
10/5/2011	2:15:51 PM	H2 valve closed
10/5/2011	2:15:51 PM	BCl3 valve closed
10/5/2011	2:15:51 PM	PH3 valve closed
10/5/2011	2:15:51 PM	SiCl4 pre valve closed
10/5/2011	2:15:51 PM	SiCl4 post valve closed
10/5/2011	2:15:51 PM	Bypass valve closed
10/5/2011	2:15:51 PM	Bubbler valve closed
10/5/2011	2:15:51 PM	Main Vac valve opened
10/5/2011	2:15:51 PM	Helium MFC set to  0.000000
10/5/2011	2:15:51 PM	H2 MFC set to  0.000000
10/5/2011	2:15:51 PM	BCl3 MFC set to  0.000000
10/5/2011	2:15:51 PM	PHl3 MFC set to  0.000000
10/5/2011	2:15:51 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:15:51 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:15:51 PM	Tube furnace set to 200
10/5/2011	2:16:21 PM	H2 valve closed
10/5/2011	2:16:21 PM	BCl3 valve closed
10/5/2011	2:16:21 PM	PH3 valve closed
10/5/2011	2:16:21 PM	SiCl4 pre valve closed
10/5/2011	2:16:21 PM	SiCl4 post valve closed
10/5/2011	2:16:21 PM	Bypass valve closed
10/5/2011	2:16:21 PM	Bubbler valve closed
10/5/2011	2:16:21 PM	Helium valve opened
10/5/2011	2:16:21 PM	Main Vac valve opened
10/5/2011	2:16:21 PM	Helium MFC set to  20.000000
10/5/2011	2:16:21 PM	H2 MFC set to  0.000000
10/5/2011	2:16:21 PM	BCl3 MFC set to  0.000000
10/5/2011	2:16:21 PM	PHl3 MFC set to  0.000000
10/5/2011	2:16:21 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:16:21 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:16:21 PM	Tube furnace set to 200
10/5/2011	2:16:51 PM	Helium valve closed
10/5/2011	2:16:51 PM	H2 valve closed
10/5/2011	2:16:51 PM	BCl3 valve closed
10/5/2011	2:16:51 PM	PH3 valve closed
10/5/2011	2:16:51 PM	SiCl4 pre valve closed
10/5/2011	2:16:51 PM	SiCl4 post valve closed
10/5/2011	2:16:51 PM	Bypass valve closed
10/5/2011	2:16:51 PM	Bubbler valve closed
10/5/2011	2:16:51 PM	Main Vac valve opened
10/5/2011	2:16:51 PM	Helium MFC set to  0.000000
10/5/2011	2:16:51 PM	H2 MFC set to  0.000000
10/5/2011	2:16:51 PM	BCl3 MFC set to  0.000000
10/5/2011	2:16:51 PM	PHl3 MFC set to  0.000000
10/5/2011	2:16:51 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:16:51 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:16:52 PM	Tube furnace set to 200
10/5/2011	2:17:22 PM	H2 valve closed
10/5/2011	2:17:22 PM	BCl3 valve closed
10/5/2011	2:17:22 PM	PH3 valve closed
10/5/2011	2:17:22 PM	SiCl4 pre valve closed
10/5/2011	2:17:22 PM	SiCl4 post valve closed
10/5/2011	2:17:22 PM	Bypass valve closed
10/5/2011	2:17:22 PM	Bubbler valve closed
10/5/2011	2:17:22 PM	Helium valve opened
10/5/2011	2:17:22 PM	Main Vac valve opened
10/5/2011	2:17:22 PM	Helium MFC set to  20.000000
10/5/2011	2:17:22 PM	H2 MFC set to  0.000000
10/5/2011	2:17:22 PM	BCl3 MFC set to  0.000000
10/5/2011	2:17:22 PM	PHl3 MFC set to  0.000000
10/5/2011	2:17:22 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:17:22 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:17:22 PM	Tube furnace set to 200
10/5/2011	2:17:52 PM	Helium valve closed
10/5/2011	2:17:52 PM	H2 valve closed
10/5/2011	2:17:52 PM	BCl3 valve closed
10/5/2011	2:17:52 PM	PH3 valve closed
10/5/2011	2:17:52 PM	SiCl4 pre valve closed
10/5/2011	2:17:52 PM	SiCl4 post valve closed
10/5/2011	2:17:52 PM	Bypass valve closed
10/5/2011	2:17:52 PM	Bubbler valve closed
10/5/2011	2:17:52 PM	Main Vac valve opened
10/5/2011	2:17:52 PM	Helium MFC set to  0.000000
10/5/2011	2:17:52 PM	H2 MFC set to  0.000000
10/5/2011	2:17:52 PM	BCl3 MFC set to  0.000000
10/5/2011	2:17:52 PM	PHl3 MFC set to  0.000000
10/5/2011	2:17:52 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:17:52 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:17:52 PM	Tube furnace set to 200
10/5/2011	2:18:22 PM	H2 valve closed
10/5/2011	2:18:22 PM	BCl3 valve closed
10/5/2011	2:18:22 PM	PH3 valve closed
10/5/2011	2:18:22 PM	SiCl4 pre valve closed
10/5/2011	2:18:22 PM	SiCl4 post valve closed
10/5/2011	2:18:22 PM	Bypass valve closed
10/5/2011	2:18:22 PM	Bubbler valve closed
10/5/2011	2:18:22 PM	Helium valve opened
10/5/2011	2:18:22 PM	Main Vac valve opened
10/5/2011	2:18:22 PM	Helium MFC set to  20.000000
10/5/2011	2:18:22 PM	H2 MFC set to  0.000000
10/5/2011	2:18:22 PM	BCl3 MFC set to  0.000000
10/5/2011	2:18:22 PM	PHl3 MFC set to  0.000000
10/5/2011	2:18:22 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:18:22 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:18:22 PM	Tube furnace set to 200
10/5/2011	2:18:52 PM	Helium valve closed
10/5/2011	2:18:52 PM	H2 valve closed
10/5/2011	2:18:52 PM	BCl3 valve closed
10/5/2011	2:18:52 PM	PH3 valve closed
10/5/2011	2:18:52 PM	SiCl4 pre valve closed
10/5/2011	2:18:52 PM	SiCl4 post valve closed
10/5/2011	2:18:52 PM	Bypass valve closed
10/5/2011	2:18:52 PM	Bubbler valve closed
10/5/2011	2:18:52 PM	Main Vac valve opened
10/5/2011	2:18:52 PM	Helium MFC set to  0.000000
10/5/2011	2:18:52 PM	H2 MFC set to  0.000000
10/5/2011	2:18:52 PM	BCl3 MFC set to  0.000000
10/5/2011	2:18:52 PM	PHl3 MFC set to  0.000000
10/5/2011	2:18:52 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:18:52 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:18:52 PM	Tube furnace set to 200
10/5/2011	2:19:22 PM	H2 valve closed
10/5/2011	2:19:22 PM	BCl3 valve closed
10/5/2011	2:19:22 PM	PH3 valve closed
10/5/2011	2:19:22 PM	SiCl4 pre valve closed
10/5/2011	2:19:22 PM	SiCl4 post valve closed
10/5/2011	2:19:22 PM	Bypass valve closed
10/5/2011	2:19:22 PM	Bubbler valve closed
10/5/2011	2:19:22 PM	Helium valve opened
10/5/2011	2:19:22 PM	Main Vac valve opened
10/5/2011	2:19:22 PM	Helium MFC set to  20.000000
10/5/2011	2:19:22 PM	H2 MFC set to  0.000000
10/5/2011	2:19:22 PM	BCl3 MFC set to  0.000000
10/5/2011	2:19:22 PM	PHl3 MFC set to  0.000000
10/5/2011	2:19:22 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:19:22 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:19:23 PM	Tube furnace set to 200
10/5/2011	2:19:53 PM	Helium valve closed
10/5/2011	2:19:53 PM	H2 valve closed
10/5/2011	2:19:53 PM	BCl3 valve closed
10/5/2011	2:19:53 PM	PH3 valve closed
10/5/2011	2:19:53 PM	SiCl4 pre valve closed
10/5/2011	2:19:53 PM	SiCl4 post valve closed
10/5/2011	2:19:53 PM	Bypass valve closed
10/5/2011	2:19:53 PM	Bubbler valve closed
10/5/2011	2:19:53 PM	Main Vac valve opened
10/5/2011	2:19:53 PM	Helium MFC set to  0.000000
10/5/2011	2:19:53 PM	H2 MFC set to  0.000000
10/5/2011	2:19:53 PM	BCl3 MFC set to  0.000000
10/5/2011	2:19:53 PM	PHl3 MFC set to  0.000000
10/5/2011	2:19:53 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:19:53 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:19:53 PM	Tube furnace set to 200
10/5/2011	2:20:23 PM	H2 valve closed
10/5/2011	2:20:23 PM	BCl3 valve closed
10/5/2011	2:20:23 PM	PH3 valve closed
10/5/2011	2:20:23 PM	SiCl4 pre valve closed
10/5/2011	2:20:23 PM	SiCl4 post valve closed
10/5/2011	2:20:23 PM	Bypass valve closed
10/5/2011	2:20:23 PM	Bubbler valve closed
10/5/2011	2:20:23 PM	Helium valve opened
10/5/2011	2:20:23 PM	Main Vac valve opened
10/5/2011	2:20:23 PM	Helium MFC set to  20.000000
10/5/2011	2:20:23 PM	H2 MFC set to  0.000000
10/5/2011	2:20:23 PM	BCl3 MFC set to  0.000000
10/5/2011	2:20:23 PM	PHl3 MFC set to  0.000000
10/5/2011	2:20:23 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:20:23 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:20:23 PM	Tube furnace set to 200
10/5/2011	2:20:53 PM	Helium valve closed
10/5/2011	2:20:53 PM	H2 valve closed
10/5/2011	2:20:53 PM	BCl3 valve closed
10/5/2011	2:20:53 PM	PH3 valve closed
10/5/2011	2:20:53 PM	SiCl4 pre valve closed
10/5/2011	2:20:53 PM	SiCl4 post valve closed
10/5/2011	2:20:53 PM	Bypass valve closed
10/5/2011	2:20:53 PM	Bubbler valve closed
10/5/2011	2:20:53 PM	Main Vac valve opened
10/5/2011	2:20:53 PM	Helium MFC set to  0.000000
10/5/2011	2:20:53 PM	H2 MFC set to  0.000000
10/5/2011	2:20:53 PM	BCl3 MFC set to  0.000000
10/5/2011	2:20:53 PM	PHl3 MFC set to  0.000000
10/5/2011	2:20:53 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:20:53 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:20:53 PM	Tube furnace set to 200
10/5/2011	2:20:54 PM	Run finished at 2:20 PM
10/5/2011	2:21:24 PM	Recipe started at 2:21 PM
10/5/2011	2:21:24 PM	Helium valve closed
10/5/2011	2:21:24 PM	H2 valve closed
10/5/2011	2:21:24 PM	BCl3 valve closed
10/5/2011	2:21:24 PM	PH3 valve closed
10/5/2011	2:21:24 PM	SiCl4 pre valve closed
10/5/2011	2:21:24 PM	SiCl4 post valve closed
10/5/2011	2:21:24 PM	Bypass valve closed
10/5/2011	2:21:24 PM	Bubbler valve closed
10/5/2011	2:21:24 PM	Main Vac valve opened
10/5/2011	2:21:24 PM	Helium MFC set to  0.000000
10/5/2011	2:21:24 PM	H2 MFC set to  0.000000
10/5/2011	2:21:24 PM	BCl3 MFC set to  0.000000
10/5/2011	2:21:24 PM	PHl3 MFC set to  0.000000
10/5/2011	2:21:24 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:21:24 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:21:24 PM	Tube furnace set to 200
10/5/2011	2:21:26 PM	H2 valve closed
10/5/2011	2:21:26 PM	BCl3 valve closed
10/5/2011	2:21:26 PM	PH3 valve closed
10/5/2011	2:21:26 PM	SiCl4 pre valve closed
10/5/2011	2:21:26 PM	SiCl4 post valve closed
10/5/2011	2:21:26 PM	Bypass valve closed
10/5/2011	2:21:26 PM	Bubbler valve closed
10/5/2011	2:21:26 PM	Helium valve opened
10/5/2011	2:21:26 PM	Main Vac valve opened
10/5/2011	2:21:26 PM	Helium MFC set to  20.000000
10/5/2011	2:21:26 PM	H2 MFC set to  0.000000
10/5/2011	2:21:26 PM	BCl3 MFC set to  0.000000
10/5/2011	2:21:26 PM	PHl3 MFC set to  0.000000
10/5/2011	2:21:26 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:21:26 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:21:26 PM	Tube furnace set to 200
10/5/2011	2:21:56 PM	Helium valve closed
10/5/2011	2:21:56 PM	H2 valve closed
10/5/2011	2:21:56 PM	BCl3 valve closed
10/5/2011	2:21:56 PM	PH3 valve closed
10/5/2011	2:21:56 PM	SiCl4 pre valve closed
10/5/2011	2:21:56 PM	SiCl4 post valve closed
10/5/2011	2:21:56 PM	Bypass valve closed
10/5/2011	2:21:56 PM	Bubbler valve closed
10/5/2011	2:21:56 PM	Main Vac valve opened
10/5/2011	2:21:56 PM	Helium MFC set to  0.000000
10/5/2011	2:21:56 PM	H2 MFC set to  0.000000
10/5/2011	2:21:56 PM	BCl3 MFC set to  0.000000
10/5/2011	2:21:56 PM	PHl3 MFC set to  0.000000
10/5/2011	2:21:56 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:21:56 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:21:57 PM	Tube furnace set to 200
10/5/2011	2:22:27 PM	H2 valve closed
10/5/2011	2:22:27 PM	BCl3 valve closed
10/5/2011	2:22:27 PM	PH3 valve closed
10/5/2011	2:22:27 PM	SiCl4 pre valve closed
10/5/2011	2:22:27 PM	SiCl4 post valve closed
10/5/2011	2:22:27 PM	Bypass valve closed
10/5/2011	2:22:27 PM	Bubbler valve closed
10/5/2011	2:22:27 PM	Helium valve opened
10/5/2011	2:22:27 PM	Main Vac valve opened
10/5/2011	2:22:27 PM	Helium MFC set to  20.000000
10/5/2011	2:22:27 PM	H2 MFC set to  0.000000
10/5/2011	2:22:27 PM	BCl3 MFC set to  0.000000
10/5/2011	2:22:27 PM	PHl3 MFC set to  0.000000
10/5/2011	2:22:27 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:22:27 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:22:27 PM	Tube furnace set to 200
10/5/2011	2:22:57 PM	Helium valve closed
10/5/2011	2:22:57 PM	H2 valve closed
10/5/2011	2:22:57 PM	BCl3 valve closed
10/5/2011	2:22:57 PM	PH3 valve closed
10/5/2011	2:22:57 PM	SiCl4 pre valve closed
10/5/2011	2:22:57 PM	SiCl4 post valve closed
10/5/2011	2:22:57 PM	Bypass valve closed
10/5/2011	2:22:57 PM	Bubbler valve closed
10/5/2011	2:22:57 PM	Main Vac valve opened
10/5/2011	2:22:57 PM	Helium MFC set to  0.000000
10/5/2011	2:22:57 PM	H2 MFC set to  0.000000
10/5/2011	2:22:57 PM	BCl3 MFC set to  0.000000
10/5/2011	2:22:57 PM	PHl3 MFC set to  0.000000
10/5/2011	2:22:57 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:22:57 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:22:57 PM	Tube furnace set to 200
10/5/2011	2:23:27 PM	H2 valve closed
10/5/2011	2:23:27 PM	BCl3 valve closed
10/5/2011	2:23:27 PM	PH3 valve closed
10/5/2011	2:23:27 PM	SiCl4 pre valve closed
10/5/2011	2:23:27 PM	SiCl4 post valve closed
10/5/2011	2:23:27 PM	Bypass valve closed
10/5/2011	2:23:27 PM	Bubbler valve closed
10/5/2011	2:23:27 PM	Helium valve opened
10/5/2011	2:23:27 PM	Main Vac valve opened
10/5/2011	2:23:27 PM	Helium MFC set to  20.000000
10/5/2011	2:23:27 PM	H2 MFC set to  0.000000
10/5/2011	2:23:27 PM	BCl3 MFC set to  0.000000
10/5/2011	2:23:27 PM	PHl3 MFC set to  0.000000
10/5/2011	2:23:27 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:23:27 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:23:27 PM	Tube furnace set to 200
10/5/2011	2:23:57 PM	Helium valve closed
10/5/2011	2:23:57 PM	H2 valve closed
10/5/2011	2:23:57 PM	BCl3 valve closed
10/5/2011	2:23:57 PM	PH3 valve closed
10/5/2011	2:23:57 PM	SiCl4 pre valve closed
10/5/2011	2:23:57 PM	SiCl4 post valve closed
10/5/2011	2:23:57 PM	Bypass valve closed
10/5/2011	2:23:57 PM	Bubbler valve closed
10/5/2011	2:23:57 PM	Main Vac valve opened
10/5/2011	2:23:57 PM	Helium MFC set to  0.000000
10/5/2011	2:23:57 PM	H2 MFC set to  0.000000
10/5/2011	2:23:57 PM	BCl3 MFC set to  0.000000
10/5/2011	2:23:57 PM	PHl3 MFC set to  0.000000
10/5/2011	2:23:57 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:23:57 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:23:57 PM	Tube furnace set to 200
10/5/2011	2:24:27 PM	H2 valve closed
10/5/2011	2:24:27 PM	BCl3 valve closed
10/5/2011	2:24:27 PM	PH3 valve closed
10/5/2011	2:24:27 PM	SiCl4 pre valve closed
10/5/2011	2:24:27 PM	SiCl4 post valve closed
10/5/2011	2:24:27 PM	Bypass valve closed
10/5/2011	2:24:27 PM	Bubbler valve closed
10/5/2011	2:24:27 PM	Helium valve opened
10/5/2011	2:24:27 PM	Main Vac valve opened
10/5/2011	2:24:27 PM	Helium MFC set to  20.000000
10/5/2011	2:24:27 PM	H2 MFC set to  0.000000
10/5/2011	2:24:27 PM	BCl3 MFC set to  0.000000
10/5/2011	2:24:27 PM	PHl3 MFC set to  0.000000
10/5/2011	2:24:27 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:24:27 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:24:28 PM	Tube furnace set to 200
10/5/2011	2:24:58 PM	Helium valve closed
10/5/2011	2:24:58 PM	H2 valve closed
10/5/2011	2:24:58 PM	BCl3 valve closed
10/5/2011	2:24:58 PM	PH3 valve closed
10/5/2011	2:24:58 PM	SiCl4 pre valve closed
10/5/2011	2:24:58 PM	SiCl4 post valve closed
10/5/2011	2:24:58 PM	Bypass valve closed
10/5/2011	2:24:58 PM	Bubbler valve closed
10/5/2011	2:24:58 PM	Main Vac valve opened
10/5/2011	2:24:58 PM	Helium MFC set to  0.000000
10/5/2011	2:24:58 PM	H2 MFC set to  0.000000
10/5/2011	2:24:58 PM	BCl3 MFC set to  0.000000
10/5/2011	2:24:58 PM	PHl3 MFC set to  0.000000
10/5/2011	2:24:58 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:24:58 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:24:58 PM	Tube furnace set to 200
10/5/2011	2:25:28 PM	H2 valve closed
10/5/2011	2:25:28 PM	BCl3 valve closed
10/5/2011	2:25:28 PM	PH3 valve closed
10/5/2011	2:25:28 PM	SiCl4 pre valve closed
10/5/2011	2:25:28 PM	SiCl4 post valve closed
10/5/2011	2:25:28 PM	Bypass valve closed
10/5/2011	2:25:28 PM	Bubbler valve closed
10/5/2011	2:25:28 PM	Helium valve opened
10/5/2011	2:25:28 PM	Main Vac valve opened
10/5/2011	2:25:28 PM	Helium MFC set to  20.000000
10/5/2011	2:25:28 PM	H2 MFC set to  0.000000
10/5/2011	2:25:28 PM	BCl3 MFC set to  0.000000
10/5/2011	2:25:28 PM	PHl3 MFC set to  0.000000
10/5/2011	2:25:28 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:25:28 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:25:28 PM	Tube furnace set to 200
10/5/2011	2:25:58 PM	Helium valve closed
10/5/2011	2:25:58 PM	H2 valve closed
10/5/2011	2:25:58 PM	BCl3 valve closed
10/5/2011	2:25:58 PM	PH3 valve closed
10/5/2011	2:25:58 PM	SiCl4 pre valve closed
10/5/2011	2:25:58 PM	SiCl4 post valve closed
10/5/2011	2:25:58 PM	Bypass valve closed
10/5/2011	2:25:58 PM	Bubbler valve closed
10/5/2011	2:25:58 PM	Main Vac valve opened
10/5/2011	2:25:58 PM	Helium MFC set to  0.000000
10/5/2011	2:25:58 PM	H2 MFC set to  0.000000
10/5/2011	2:25:58 PM	BCl3 MFC set to  0.000000
10/5/2011	2:25:58 PM	PHl3 MFC set to  0.000000
10/5/2011	2:25:58 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:25:58 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:25:58 PM	Tube furnace set to 200
10/5/2011	2:26:28 PM	H2 valve closed
10/5/2011	2:26:28 PM	BCl3 valve closed
10/5/2011	2:26:28 PM	PH3 valve closed
10/5/2011	2:26:28 PM	SiCl4 pre valve closed
10/5/2011	2:26:28 PM	SiCl4 post valve closed
10/5/2011	2:26:28 PM	Bypass valve closed
10/5/2011	2:26:28 PM	Bubbler valve closed
10/5/2011	2:26:28 PM	Helium valve opened
10/5/2011	2:26:28 PM	Main Vac valve opened
10/5/2011	2:26:28 PM	Helium MFC set to  20.000000
10/5/2011	2:26:28 PM	H2 MFC set to  0.000000
10/5/2011	2:26:28 PM	BCl3 MFC set to  0.000000
10/5/2011	2:26:28 PM	PHl3 MFC set to  0.000000
10/5/2011	2:26:28 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:26:28 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:26:28 PM	Tube furnace set to 200
10/5/2011	2:26:58 PM	Helium valve closed
10/5/2011	2:26:58 PM	H2 valve closed
10/5/2011	2:26:59 PM	BCl3 valve closed
10/5/2011	2:26:59 PM	PH3 valve closed
10/5/2011	2:26:59 PM	SiCl4 pre valve closed
10/5/2011	2:26:59 PM	SiCl4 post valve closed
10/5/2011	2:26:59 PM	Bypass valve closed
10/5/2011	2:26:59 PM	Bubbler valve closed
10/5/2011	2:26:59 PM	Main Vac valve opened
10/5/2011	2:26:59 PM	Helium MFC set to  0.000000
10/5/2011	2:26:59 PM	H2 MFC set to  0.000000
10/5/2011	2:26:59 PM	BCl3 MFC set to  0.000000
10/5/2011	2:26:59 PM	PHl3 MFC set to  0.000000
10/5/2011	2:26:59 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:26:59 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:26:59 PM	Tube furnace set to 200
10/5/2011	2:27:29 PM	H2 valve closed
10/5/2011	2:27:29 PM	BCl3 valve closed
10/5/2011	2:27:29 PM	PH3 valve closed
10/5/2011	2:27:29 PM	SiCl4 pre valve closed
10/5/2011	2:27:29 PM	SiCl4 post valve closed
10/5/2011	2:27:29 PM	Bypass valve closed
10/5/2011	2:27:29 PM	Bubbler valve closed
10/5/2011	2:27:29 PM	Helium valve opened
10/5/2011	2:27:29 PM	Main Vac valve opened
10/5/2011	2:27:29 PM	Helium MFC set to  20.000000
10/5/2011	2:27:29 PM	H2 MFC set to  0.000000
10/5/2011	2:27:29 PM	BCl3 MFC set to  0.000000
10/5/2011	2:27:29 PM	PHl3 MFC set to  0.000000
10/5/2011	2:27:29 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:27:29 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:27:29 PM	Tube furnace set to 200
10/5/2011	2:27:59 PM	Helium valve closed
10/5/2011	2:27:59 PM	H2 valve closed
10/5/2011	2:27:59 PM	BCl3 valve closed
10/5/2011	2:27:59 PM	PH3 valve closed
10/5/2011	2:27:59 PM	SiCl4 pre valve closed
10/5/2011	2:27:59 PM	SiCl4 post valve closed
10/5/2011	2:27:59 PM	Bypass valve closed
10/5/2011	2:27:59 PM	Bubbler valve closed
10/5/2011	2:27:59 PM	Main Vac valve opened
10/5/2011	2:27:59 PM	Helium MFC set to  0.000000
10/5/2011	2:27:59 PM	H2 MFC set to  0.000000
10/5/2011	2:27:59 PM	BCl3 MFC set to  0.000000
10/5/2011	2:27:59 PM	PHl3 MFC set to  0.000000
10/5/2011	2:27:59 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:27:59 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:27:59 PM	Tube furnace set to 200
10/5/2011	2:28:29 PM	H2 valve closed
10/5/2011	2:28:29 PM	BCl3 valve closed
10/5/2011	2:28:29 PM	PH3 valve closed
10/5/2011	2:28:29 PM	SiCl4 pre valve closed
10/5/2011	2:28:29 PM	SiCl4 post valve closed
10/5/2011	2:28:29 PM	Bypass valve closed
10/5/2011	2:28:29 PM	Bubbler valve closed
10/5/2011	2:28:29 PM	Helium valve opened
10/5/2011	2:28:29 PM	Main Vac valve opened
10/5/2011	2:28:29 PM	Helium MFC set to  20.000000
10/5/2011	2:28:29 PM	H2 MFC set to  0.000000
10/5/2011	2:28:29 PM	BCl3 MFC set to  0.000000
10/5/2011	2:28:29 PM	PHl3 MFC set to  0.000000
10/5/2011	2:28:29 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:28:29 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:28:29 PM	Tube furnace set to 200
10/5/2011	2:28:59 PM	Helium valve closed
10/5/2011	2:28:59 PM	H2 valve closed
10/5/2011	2:28:59 PM	BCl3 valve closed
10/5/2011	2:28:59 PM	PH3 valve closed
10/5/2011	2:28:59 PM	SiCl4 pre valve closed
10/5/2011	2:28:59 PM	SiCl4 post valve closed
10/5/2011	2:28:59 PM	Bypass valve closed
10/5/2011	2:28:59 PM	Bubbler valve closed
10/5/2011	2:28:59 PM	Main Vac valve opened
10/5/2011	2:28:59 PM	Helium MFC set to  0.000000
10/5/2011	2:28:59 PM	H2 MFC set to  0.000000
10/5/2011	2:28:59 PM	BCl3 MFC set to  0.000000
10/5/2011	2:28:59 PM	PHl3 MFC set to  0.000000
10/5/2011	2:28:59 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:28:59 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:29:00 PM	Tube furnace set to 200
10/5/2011	2:29:30 PM	H2 valve closed
10/5/2011	2:29:30 PM	BCl3 valve closed
10/5/2011	2:29:30 PM	PH3 valve closed
10/5/2011	2:29:30 PM	SiCl4 pre valve closed
10/5/2011	2:29:30 PM	SiCl4 post valve closed
10/5/2011	2:29:30 PM	Bypass valve closed
10/5/2011	2:29:30 PM	Bubbler valve closed
10/5/2011	2:29:30 PM	Helium valve opened
10/5/2011	2:29:30 PM	Main Vac valve opened
10/5/2011	2:29:30 PM	Helium MFC set to  20.000000
10/5/2011	2:29:30 PM	H2 MFC set to  0.000000
10/5/2011	2:29:30 PM	BCl3 MFC set to  0.000000
10/5/2011	2:29:30 PM	PHl3 MFC set to  0.000000
10/5/2011	2:29:30 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:29:30 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:29:30 PM	Tube furnace set to 200
10/5/2011	2:30:00 PM	Helium valve closed
10/5/2011	2:30:00 PM	H2 valve closed
10/5/2011	2:30:00 PM	BCl3 valve closed
10/5/2011	2:30:00 PM	PH3 valve closed
10/5/2011	2:30:00 PM	SiCl4 pre valve closed
10/5/2011	2:30:00 PM	SiCl4 post valve closed
10/5/2011	2:30:00 PM	Bypass valve closed
10/5/2011	2:30:00 PM	Bubbler valve closed
10/5/2011	2:30:00 PM	Main Vac valve opened
10/5/2011	2:30:00 PM	Helium MFC set to  0.000000
10/5/2011	2:30:00 PM	H2 MFC set to  0.000000
10/5/2011	2:30:00 PM	BCl3 MFC set to  0.000000
10/5/2011	2:30:00 PM	PHl3 MFC set to  0.000000
10/5/2011	2:30:00 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:30:00 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:30:00 PM	Tube furnace set to 200
10/5/2011	2:30:30 PM	H2 valve closed
10/5/2011	2:30:30 PM	BCl3 valve closed
10/5/2011	2:30:30 PM	PH3 valve closed
10/5/2011	2:30:30 PM	SiCl4 pre valve closed
10/5/2011	2:30:30 PM	SiCl4 post valve closed
10/5/2011	2:30:30 PM	Bypass valve closed
10/5/2011	2:30:30 PM	Bubbler valve closed
10/5/2011	2:30:30 PM	Helium valve opened
10/5/2011	2:30:30 PM	Main Vac valve opened
10/5/2011	2:30:30 PM	Helium MFC set to  20.000000
10/5/2011	2:30:30 PM	H2 MFC set to  0.000000
10/5/2011	2:30:30 PM	BCl3 MFC set to  0.000000
10/5/2011	2:30:30 PM	PHl3 MFC set to  0.000000
10/5/2011	2:30:30 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:30:30 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:30:30 PM	Tube furnace set to 200
10/5/2011	2:31:00 PM	Helium valve closed
10/5/2011	2:31:00 PM	H2 valve closed
10/5/2011	2:31:00 PM	BCl3 valve closed
10/5/2011	2:31:00 PM	PH3 valve closed
10/5/2011	2:31:00 PM	SiCl4 pre valve closed
10/5/2011	2:31:00 PM	SiCl4 post valve closed
10/5/2011	2:31:00 PM	Bypass valve closed
10/5/2011	2:31:00 PM	Bubbler valve closed
10/5/2011	2:31:00 PM	Main Vac valve opened
10/5/2011	2:31:00 PM	Helium MFC set to  0.000000
10/5/2011	2:31:00 PM	H2 MFC set to  0.000000
10/5/2011	2:31:00 PM	BCl3 MFC set to  0.000000
10/5/2011	2:31:00 PM	PHl3 MFC set to  0.000000
10/5/2011	2:31:00 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:31:00 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:31:00 PM	Tube furnace set to 200
10/5/2011	2:31:01 PM	Run finished at 2:31 PM
10/5/2011	2:34:25 PM	Recipe started at 2:34 PM
10/5/2011	2:34:25 PM	Helium valve closed
10/5/2011	2:34:25 PM	H2 valve closed
10/5/2011	2:34:25 PM	BCl3 valve closed
10/5/2011	2:34:25 PM	PH3 valve closed
10/5/2011	2:34:25 PM	SiCl4 pre valve closed
10/5/2011	2:34:25 PM	SiCl4 post valve closed
10/5/2011	2:34:25 PM	Bypass valve closed
10/5/2011	2:34:25 PM	Bubbler valve closed
10/5/2011	2:34:25 PM	Main Vac valve opened
10/5/2011	2:34:25 PM	Helium MFC set to  0.000000
10/5/2011	2:34:25 PM	H2 MFC set to  0.000000
10/5/2011	2:34:25 PM	BCl3 MFC set to  0.000000
10/5/2011	2:34:25 PM	PHl3 MFC set to  0.000000
10/5/2011	2:34:25 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:34:25 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:34:25 PM	Tube furnace set to 200
10/5/2011	2:34:27 PM	H2 valve closed
10/5/2011	2:34:27 PM	BCl3 valve closed
10/5/2011	2:34:27 PM	PH3 valve closed
10/5/2011	2:34:27 PM	SiCl4 pre valve closed
10/5/2011	2:34:27 PM	SiCl4 post valve closed
10/5/2011	2:34:27 PM	Bypass valve closed
10/5/2011	2:34:27 PM	Bubbler valve closed
10/5/2011	2:34:27 PM	Helium valve opened
10/5/2011	2:34:27 PM	Main Vac valve opened
10/5/2011	2:34:27 PM	Helium MFC set to  20.000000
10/5/2011	2:34:27 PM	H2 MFC set to  0.000000
10/5/2011	2:34:27 PM	BCl3 MFC set to  0.000000
10/5/2011	2:34:27 PM	PHl3 MFC set to  0.000000
10/5/2011	2:34:27 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:34:27 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:34:27 PM	Tube furnace set to 200
10/5/2011	2:34:57 PM	Helium valve closed
10/5/2011	2:34:57 PM	H2 valve closed
10/5/2011	2:34:57 PM	BCl3 valve closed
10/5/2011	2:34:57 PM	PH3 valve closed
10/5/2011	2:34:57 PM	SiCl4 pre valve closed
10/5/2011	2:34:57 PM	SiCl4 post valve closed
10/5/2011	2:34:57 PM	Bypass valve closed
10/5/2011	2:34:57 PM	Bubbler valve closed
10/5/2011	2:34:57 PM	Main Vac valve opened
10/5/2011	2:34:57 PM	Helium MFC set to  0.000000
10/5/2011	2:34:57 PM	H2 MFC set to  0.000000
10/5/2011	2:34:57 PM	BCl3 MFC set to  0.000000
10/5/2011	2:34:57 PM	PHl3 MFC set to  0.000000
10/5/2011	2:34:57 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:34:57 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:34:57 PM	Tube furnace set to 200
10/5/2011	2:35:27 PM	H2 valve closed
10/5/2011	2:35:27 PM	BCl3 valve closed
10/5/2011	2:35:27 PM	PH3 valve closed
10/5/2011	2:35:27 PM	SiCl4 pre valve closed
10/5/2011	2:35:27 PM	SiCl4 post valve closed
10/5/2011	2:35:27 PM	Bypass valve closed
10/5/2011	2:35:27 PM	Bubbler valve closed
10/5/2011	2:35:27 PM	Helium valve opened
10/5/2011	2:35:27 PM	Main Vac valve opened
10/5/2011	2:35:27 PM	Helium MFC set to  20.000000
10/5/2011	2:35:27 PM	H2 MFC set to  0.000000
10/5/2011	2:35:27 PM	BCl3 MFC set to  0.000000
10/5/2011	2:35:27 PM	PHl3 MFC set to  0.000000
10/5/2011	2:35:27 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:35:27 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:35:27 PM	Tube furnace set to 200
10/5/2011	2:35:57 PM	Helium valve closed
10/5/2011	2:35:57 PM	H2 valve closed
10/5/2011	2:35:57 PM	BCl3 valve closed
10/5/2011	2:35:57 PM	PH3 valve closed
10/5/2011	2:35:57 PM	SiCl4 pre valve closed
10/5/2011	2:35:57 PM	SiCl4 post valve closed
10/5/2011	2:35:57 PM	Bypass valve closed
10/5/2011	2:35:57 PM	Bubbler valve closed
10/5/2011	2:35:57 PM	Main Vac valve opened
10/5/2011	2:35:57 PM	Helium MFC set to  0.000000
10/5/2011	2:35:57 PM	H2 MFC set to  0.000000
10/5/2011	2:35:57 PM	BCl3 MFC set to  0.000000
10/5/2011	2:35:57 PM	PHl3 MFC set to  0.000000
10/5/2011	2:35:57 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:35:57 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:35:57 PM	Tube furnace set to 200
10/5/2011	2:36:27 PM	H2 valve closed
10/5/2011	2:36:27 PM	BCl3 valve closed
10/5/2011	2:36:27 PM	PH3 valve closed
10/5/2011	2:36:27 PM	SiCl4 pre valve closed
10/5/2011	2:36:27 PM	SiCl4 post valve closed
10/5/2011	2:36:27 PM	Bypass valve closed
10/5/2011	2:36:27 PM	Bubbler valve closed
10/5/2011	2:36:27 PM	Helium valve opened
10/5/2011	2:36:27 PM	Main Vac valve opened
10/5/2011	2:36:27 PM	Helium MFC set to  20.000000
10/5/2011	2:36:27 PM	H2 MFC set to  0.000000
10/5/2011	2:36:27 PM	BCl3 MFC set to  0.000000
10/5/2011	2:36:27 PM	PHl3 MFC set to  0.000000
10/5/2011	2:36:27 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:36:27 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:36:28 PM	Tube furnace set to 200
10/5/2011	2:36:58 PM	Helium valve closed
10/5/2011	2:36:58 PM	H2 valve closed
10/5/2011	2:36:58 PM	BCl3 valve closed
10/5/2011	2:36:58 PM	PH3 valve closed
10/5/2011	2:36:58 PM	SiCl4 pre valve closed
10/5/2011	2:36:58 PM	SiCl4 post valve closed
10/5/2011	2:36:58 PM	Bypass valve closed
10/5/2011	2:36:58 PM	Bubbler valve closed
10/5/2011	2:36:58 PM	Main Vac valve opened
10/5/2011	2:36:58 PM	Helium MFC set to  0.000000
10/5/2011	2:36:58 PM	H2 MFC set to  0.000000
10/5/2011	2:36:58 PM	BCl3 MFC set to  0.000000
10/5/2011	2:36:58 PM	PHl3 MFC set to  0.000000
10/5/2011	2:36:58 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:36:58 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:36:58 PM	Tube furnace set to 200
10/5/2011	2:37:28 PM	H2 valve closed
10/5/2011	2:37:28 PM	BCl3 valve closed
10/5/2011	2:37:28 PM	PH3 valve closed
10/5/2011	2:37:28 PM	SiCl4 pre valve closed
10/5/2011	2:37:28 PM	SiCl4 post valve closed
10/5/2011	2:37:28 PM	Bypass valve closed
10/5/2011	2:37:28 PM	Bubbler valve closed
10/5/2011	2:37:28 PM	Helium valve opened
10/5/2011	2:37:28 PM	Main Vac valve opened
10/5/2011	2:37:28 PM	Helium MFC set to  20.000000
10/5/2011	2:37:28 PM	H2 MFC set to  0.000000
10/5/2011	2:37:28 PM	BCl3 MFC set to  0.000000
10/5/2011	2:37:28 PM	PHl3 MFC set to  0.000000
10/5/2011	2:37:28 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:37:28 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:37:28 PM	Tube furnace set to 200
10/5/2011	2:37:58 PM	Helium valve closed
10/5/2011	2:37:58 PM	H2 valve closed
10/5/2011	2:37:58 PM	BCl3 valve closed
10/5/2011	2:37:58 PM	PH3 valve closed
10/5/2011	2:37:58 PM	SiCl4 pre valve closed
10/5/2011	2:37:58 PM	SiCl4 post valve closed
10/5/2011	2:37:58 PM	Bypass valve closed
10/5/2011	2:37:58 PM	Bubbler valve closed
10/5/2011	2:37:58 PM	Main Vac valve opened
10/5/2011	2:37:58 PM	Helium MFC set to  0.000000
10/5/2011	2:37:58 PM	H2 MFC set to  0.000000
10/5/2011	2:37:58 PM	BCl3 MFC set to  0.000000
10/5/2011	2:37:58 PM	PHl3 MFC set to  0.000000
10/5/2011	2:37:58 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:37:58 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:37:58 PM	Tube furnace set to 200
10/5/2011	2:38:28 PM	H2 valve closed
10/5/2011	2:38:28 PM	BCl3 valve closed
10/5/2011	2:38:28 PM	PH3 valve closed
10/5/2011	2:38:28 PM	SiCl4 pre valve closed
10/5/2011	2:38:28 PM	SiCl4 post valve closed
10/5/2011	2:38:28 PM	Bypass valve closed
10/5/2011	2:38:28 PM	Bubbler valve closed
10/5/2011	2:38:28 PM	Helium valve opened
10/5/2011	2:38:28 PM	Main Vac valve opened
10/5/2011	2:38:28 PM	Helium MFC set to  20.000000
10/5/2011	2:38:28 PM	H2 MFC set to  0.000000
10/5/2011	2:38:28 PM	BCl3 MFC set to  0.000000
10/5/2011	2:38:28 PM	PHl3 MFC set to  0.000000
10/5/2011	2:38:28 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:38:28 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:38:28 PM	Tube furnace set to 200
10/5/2011	2:38:58 PM	Helium valve closed
10/5/2011	2:38:58 PM	H2 valve closed
10/5/2011	2:38:58 PM	BCl3 valve closed
10/5/2011	2:38:58 PM	PH3 valve closed
10/5/2011	2:38:58 PM	SiCl4 pre valve closed
10/5/2011	2:38:58 PM	SiCl4 post valve closed
10/5/2011	2:38:58 PM	Bypass valve closed
10/5/2011	2:38:58 PM	Bubbler valve closed
10/5/2011	2:38:58 PM	Main Vac valve opened
10/5/2011	2:38:58 PM	Helium MFC set to  0.000000
10/5/2011	2:38:58 PM	H2 MFC set to  0.000000
10/5/2011	2:38:58 PM	BCl3 MFC set to  0.000000
10/5/2011	2:38:58 PM	PHl3 MFC set to  0.000000
10/5/2011	2:38:58 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:38:58 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:38:59 PM	Tube furnace set to 200
10/5/2011	2:39:29 PM	H2 valve closed
10/5/2011	2:39:29 PM	BCl3 valve closed
10/5/2011	2:39:29 PM	PH3 valve closed
10/5/2011	2:39:29 PM	SiCl4 pre valve closed
10/5/2011	2:39:29 PM	SiCl4 post valve closed
10/5/2011	2:39:29 PM	Bypass valve closed
10/5/2011	2:39:29 PM	Bubbler valve closed
10/5/2011	2:39:29 PM	Helium valve opened
10/5/2011	2:39:29 PM	Main Vac valve opened
10/5/2011	2:39:29 PM	Helium MFC set to  20.000000
10/5/2011	2:39:29 PM	H2 MFC set to  0.000000
10/5/2011	2:39:29 PM	BCl3 MFC set to  0.000000
10/5/2011	2:39:29 PM	PHl3 MFC set to  0.000000
10/5/2011	2:39:29 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:39:29 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:39:29 PM	Tube furnace set to 200
10/5/2011	2:39:59 PM	Helium valve closed
10/5/2011	2:39:59 PM	H2 valve closed
10/5/2011	2:39:59 PM	BCl3 valve closed
10/5/2011	2:39:59 PM	PH3 valve closed
10/5/2011	2:39:59 PM	SiCl4 pre valve closed
10/5/2011	2:39:59 PM	SiCl4 post valve closed
10/5/2011	2:39:59 PM	Bypass valve closed
10/5/2011	2:39:59 PM	Bubbler valve closed
10/5/2011	2:39:59 PM	Main Vac valve opened
10/5/2011	2:39:59 PM	Helium MFC set to  0.000000
10/5/2011	2:39:59 PM	H2 MFC set to  0.000000
10/5/2011	2:39:59 PM	BCl3 MFC set to  0.000000
10/5/2011	2:39:59 PM	PHl3 MFC set to  0.000000
10/5/2011	2:39:59 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:39:59 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:39:59 PM	Tube furnace set to 200
10/5/2011	2:40:29 PM	H2 valve closed
10/5/2011	2:40:29 PM	BCl3 valve closed
10/5/2011	2:40:29 PM	PH3 valve closed
10/5/2011	2:40:29 PM	SiCl4 pre valve closed
10/5/2011	2:40:29 PM	SiCl4 post valve closed
10/5/2011	2:40:29 PM	Bypass valve closed
10/5/2011	2:40:29 PM	Bubbler valve closed
10/5/2011	2:40:29 PM	Helium valve opened
10/5/2011	2:40:29 PM	Main Vac valve opened
10/5/2011	2:40:29 PM	Helium MFC set to  20.000000
10/5/2011	2:40:29 PM	H2 MFC set to  0.000000
10/5/2011	2:40:29 PM	BCl3 MFC set to  0.000000
10/5/2011	2:40:29 PM	PHl3 MFC set to  0.000000
10/5/2011	2:40:29 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:40:29 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:40:29 PM	Tube furnace set to 200
10/5/2011	2:40:59 PM	Helium valve closed
10/5/2011	2:40:59 PM	H2 valve closed
10/5/2011	2:40:59 PM	BCl3 valve closed
10/5/2011	2:40:59 PM	PH3 valve closed
10/5/2011	2:40:59 PM	SiCl4 pre valve closed
10/5/2011	2:40:59 PM	SiCl4 post valve closed
10/5/2011	2:40:59 PM	Bypass valve closed
10/5/2011	2:40:59 PM	Bubbler valve closed
10/5/2011	2:40:59 PM	Main Vac valve opened
10/5/2011	2:40:59 PM	Helium MFC set to  0.000000
10/5/2011	2:40:59 PM	H2 MFC set to  0.000000
10/5/2011	2:40:59 PM	BCl3 MFC set to  0.000000
10/5/2011	2:40:59 PM	PHl3 MFC set to  0.000000
10/5/2011	2:40:59 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:40:59 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:40:59 PM	Tube furnace set to 200
10/5/2011	2:41:29 PM	H2 valve closed
10/5/2011	2:41:29 PM	BCl3 valve closed
10/5/2011	2:41:29 PM	PH3 valve closed
10/5/2011	2:41:29 PM	SiCl4 pre valve closed
10/5/2011	2:41:29 PM	SiCl4 post valve closed
10/5/2011	2:41:29 PM	Bypass valve closed
10/5/2011	2:41:29 PM	Bubbler valve closed
10/5/2011	2:41:29 PM	Helium valve opened
10/5/2011	2:41:29 PM	Main Vac valve opened
10/5/2011	2:41:29 PM	Helium MFC set to  20.000000
10/5/2011	2:41:29 PM	H2 MFC set to  0.000000
10/5/2011	2:41:29 PM	BCl3 MFC set to  0.000000
10/5/2011	2:41:29 PM	PHl3 MFC set to  0.000000
10/5/2011	2:41:29 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:41:29 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:41:30 PM	Tube furnace set to 200
10/5/2011	2:42:00 PM	Helium valve closed
10/5/2011	2:42:00 PM	H2 valve closed
10/5/2011	2:42:00 PM	BCl3 valve closed
10/5/2011	2:42:00 PM	PH3 valve closed
10/5/2011	2:42:00 PM	SiCl4 pre valve closed
10/5/2011	2:42:00 PM	SiCl4 post valve closed
10/5/2011	2:42:00 PM	Bypass valve closed
10/5/2011	2:42:00 PM	Bubbler valve closed
10/5/2011	2:42:00 PM	Main Vac valve opened
10/5/2011	2:42:00 PM	Helium MFC set to  0.000000
10/5/2011	2:42:00 PM	H2 MFC set to  0.000000
10/5/2011	2:42:00 PM	BCl3 MFC set to  0.000000
10/5/2011	2:42:00 PM	PHl3 MFC set to  0.000000
10/5/2011	2:42:00 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:42:00 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:42:00 PM	Tube furnace set to 200
10/5/2011	2:42:30 PM	H2 valve closed
10/5/2011	2:42:30 PM	BCl3 valve closed
10/5/2011	2:42:30 PM	PH3 valve closed
10/5/2011	2:42:30 PM	SiCl4 pre valve closed
10/5/2011	2:42:30 PM	SiCl4 post valve closed
10/5/2011	2:42:30 PM	Bypass valve closed
10/5/2011	2:42:30 PM	Bubbler valve closed
10/5/2011	2:42:30 PM	Helium valve opened
10/5/2011	2:42:30 PM	Main Vac valve opened
10/5/2011	2:42:30 PM	Helium MFC set to  20.000000
10/5/2011	2:42:30 PM	H2 MFC set to  0.000000
10/5/2011	2:42:30 PM	BCl3 MFC set to  0.000000
10/5/2011	2:42:30 PM	PHl3 MFC set to  0.000000
10/5/2011	2:42:30 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:42:30 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:42:30 PM	Tube furnace set to 200
10/5/2011	2:43:00 PM	Helium valve closed
10/5/2011	2:43:00 PM	H2 valve closed
10/5/2011	2:43:00 PM	BCl3 valve closed
10/5/2011	2:43:00 PM	PH3 valve closed
10/5/2011	2:43:00 PM	SiCl4 pre valve closed
10/5/2011	2:43:00 PM	SiCl4 post valve closed
10/5/2011	2:43:00 PM	Bypass valve closed
10/5/2011	2:43:00 PM	Bubbler valve closed
10/5/2011	2:43:00 PM	Main Vac valve opened
10/5/2011	2:43:00 PM	Helium MFC set to  0.000000
10/5/2011	2:43:00 PM	H2 MFC set to  0.000000
10/5/2011	2:43:00 PM	BCl3 MFC set to  0.000000
10/5/2011	2:43:00 PM	PHl3 MFC set to  0.000000
10/5/2011	2:43:00 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:43:00 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:43:00 PM	Tube furnace set to 200
10/5/2011	2:43:30 PM	H2 valve closed
10/5/2011	2:43:30 PM	BCl3 valve closed
10/5/2011	2:43:30 PM	PH3 valve closed
10/5/2011	2:43:30 PM	SiCl4 pre valve closed
10/5/2011	2:43:30 PM	SiCl4 post valve closed
10/5/2011	2:43:30 PM	Bypass valve closed
10/5/2011	2:43:30 PM	Bubbler valve closed
10/5/2011	2:43:30 PM	Helium valve opened
10/5/2011	2:43:30 PM	Main Vac valve opened
10/5/2011	2:43:30 PM	Helium MFC set to  20.000000
10/5/2011	2:43:30 PM	H2 MFC set to  0.000000
10/5/2011	2:43:30 PM	BCl3 MFC set to  0.000000
10/5/2011	2:43:30 PM	PHl3 MFC set to  0.000000
10/5/2011	2:43:30 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:43:30 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:43:30 PM	Tube furnace set to 200
10/5/2011	2:44:00 PM	Helium valve closed
10/5/2011	2:44:00 PM	H2 valve closed
10/5/2011	2:44:00 PM	BCl3 valve closed
10/5/2011	2:44:00 PM	PH3 valve closed
10/5/2011	2:44:00 PM	SiCl4 pre valve closed
10/5/2011	2:44:00 PM	SiCl4 post valve closed
10/5/2011	2:44:01 PM	Bypass valve closed
10/5/2011	2:44:01 PM	Bubbler valve closed
10/5/2011	2:44:01 PM	Main Vac valve opened
10/5/2011	2:44:01 PM	Helium MFC set to  0.000000
10/5/2011	2:44:01 PM	H2 MFC set to  0.000000
10/5/2011	2:44:01 PM	BCl3 MFC set to  0.000000
10/5/2011	2:44:01 PM	PHl3 MFC set to  0.000000
10/5/2011	2:44:01 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:44:01 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:44:01 PM	Tube furnace set to 200
10/5/2011	2:44:02 PM	Run finished at 2:44 PM
10/5/2011	2:44:47 PM	Main Vac valve closed
10/5/2011	2:44:52 PM	Main Vac valve opened
10/5/2011	2:49:07 PM	Recipe started at 2:49 PM
10/5/2011	2:49:07 PM	Helium valve closed
10/5/2011	2:49:07 PM	H2 valve closed
10/5/2011	2:49:07 PM	BCl3 valve closed
10/5/2011	2:49:07 PM	PH3 valve closed
10/5/2011	2:49:07 PM	SiCl4 pre valve closed
10/5/2011	2:49:07 PM	SiCl4 post valve closed
10/5/2011	2:49:07 PM	Main Vac valve closed
10/5/2011	2:49:07 PM	Bypass valve closed
10/5/2011	2:49:07 PM	Bubbler valve closed
10/5/2011	2:49:07 PM	Helium MFC set to  0.000000
10/5/2011	2:49:07 PM	H2 MFC set to  0.000000
10/5/2011	2:49:07 PM	BCl3 MFC set to  0.000000
10/5/2011	2:49:07 PM	PHl3 MFC set to  0.000000
10/5/2011	2:49:07 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:49:07 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:49:07 PM	Tube furnace set to 0
10/5/2011	2:49:10 PM	Helium valve closed
10/5/2011	2:49:10 PM	BCl3 valve closed
10/5/2011	2:49:10 PM	PH3 valve closed
10/5/2011	2:49:10 PM	SiCl4 pre valve closed
10/5/2011	2:49:10 PM	SiCl4 post valve closed
10/5/2011	2:49:10 PM	Main Vac valve closed
10/5/2011	2:49:10 PM	Bypass valve closed
10/5/2011	2:49:10 PM	Bubbler valve closed
10/5/2011	2:49:10 PM	H2 valve opened
10/5/2011	2:49:10 PM	Helium MFC set to  0.000000
10/5/2011	2:49:10 PM	H2 MFC set to  500.000000
10/5/2011	2:49:10 PM	BCl3 MFC set to  0.000000
10/5/2011	2:49:10 PM	PHl3 MFC set to  0.000000
10/5/2011	2:49:10 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:49:10 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:49:10 PM	Tube furnace set to 0
10/5/2011	2:50:14 PM	Helium valve closed
10/5/2011	2:50:14 PM	BCl3 valve closed
10/5/2011	2:50:14 PM	PH3 valve closed
10/5/2011	2:50:14 PM	SiCl4 pre valve closed
10/5/2011	2:50:14 PM	SiCl4 post valve closed
10/5/2011	2:50:14 PM	Main Vac valve closed
10/5/2011	2:50:14 PM	Bypass valve closed
10/5/2011	2:50:14 PM	H2 valve opened
10/5/2011	2:50:14 PM	Bubbler valve opened
10/5/2011	2:50:14 PM	Helium MFC set to  0.000000
10/5/2011	2:50:14 PM	H2 MFC set to  500.000000
10/5/2011	2:50:14 PM	BCl3 MFC set to  0.000000
10/5/2011	2:50:14 PM	PHl3 MFC set to  0.000000
10/5/2011	2:50:14 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:50:14 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:50:14 PM	Tube furnace set to 0
10/5/2011	2:50:15 PM	Helium valve closed
10/5/2011	2:50:15 PM	BCl3 valve closed
10/5/2011	2:50:15 PM	PH3 valve closed
10/5/2011	2:50:15 PM	SiCl4 pre valve closed
10/5/2011	2:50:15 PM	SiCl4 post valve closed
10/5/2011	2:50:15 PM	Main Vac valve closed
10/5/2011	2:50:15 PM	Bypass valve closed
10/5/2011	2:50:15 PM	H2 valve opened
10/5/2011	2:50:15 PM	Bubbler valve opened
10/5/2011	2:50:15 PM	Helium MFC set to  0.000000
10/5/2011	2:50:15 PM	H2 MFC set to  500.000000
10/5/2011	2:50:15 PM	BCl3 MFC set to  0.000000
10/5/2011	2:50:15 PM	PHl3 MFC set to  0.000000
10/5/2011	2:50:15 PM	SiCl4 MFC set to  0.000000
10/5/2011	2:50:15 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	2:50:15 PM	Tube furnace set to 1000
10/5/2011	3:10:15 PM	Helium valve closed
10/5/2011	3:10:15 PM	PH3 valve closed
10/5/2011	3:10:15 PM	Main Vac valve closed
10/5/2011	3:10:15 PM	Bypass valve closed
10/5/2011	3:10:15 PM	H2 valve opened
10/5/2011	3:10:15 PM	BCl3 valve opened
10/5/2011	3:10:15 PM	SiCl4 pre valve opened
10/5/2011	3:10:15 PM	SiCl4 post valve opened
10/5/2011	3:10:15 PM	Bubbler valve opened
10/5/2011	3:10:15 PM	Helium MFC set to  0.000000
10/5/2011	3:10:15 PM	H2 MFC set to  500.000000
10/5/2011	3:10:15 PM	BCl3 MFC set to  2.300000
10/5/2011	3:10:15 PM	PHl3 MFC set to  0.000000
10/5/2011	3:10:15 PM	SiCl4 MFC set to  50.000000
10/5/2011	3:10:15 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	3:10:15 PM	Tube furnace set to 1000
10/5/2011	3:26:15 PM	Helium valve closed
10/5/2011	3:26:15 PM	BCl3 valve closed
10/5/2011	3:26:15 PM	PH3 valve closed
10/5/2011	3:26:15 PM	SiCl4 pre valve closed
10/5/2011	3:26:15 PM	SiCl4 post valve closed
10/5/2011	3:26:15 PM	Main Vac valve closed
10/5/2011	3:26:15 PM	Bypass valve closed
10/5/2011	3:26:15 PM	H2 valve opened
10/5/2011	3:26:15 PM	Bubbler valve opened
10/5/2011	3:26:15 PM	Helium MFC set to  0.000000
10/5/2011	3:26:15 PM	H2 MFC set to  500.000000
10/5/2011	3:26:15 PM	BCl3 MFC set to  0.000000
10/5/2011	3:26:15 PM	PHl3 MFC set to  0.000000
10/5/2011	3:26:15 PM	SiCl4 MFC set to  0.000000
10/5/2011	3:26:15 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	3:26:15 PM	Tube furnace set to 750
10/5/2011	3:31:16 PM	H2 valve closed
10/5/2011	3:31:16 PM	BCl3 valve closed
10/5/2011	3:31:16 PM	PH3 valve closed
10/5/2011	3:31:16 PM	SiCl4 pre valve closed
10/5/2011	3:31:16 PM	SiCl4 post valve closed
10/5/2011	3:31:16 PM	Main Vac valve closed
10/5/2011	3:31:16 PM	Bypass valve closed
10/5/2011	3:31:16 PM	Helium valve opened
10/5/2011	3:31:16 PM	Bubbler valve opened
10/5/2011	3:31:16 PM	Helium MFC set to  500.000000
10/5/2011	3:31:16 PM	H2 MFC set to  0.000000
10/5/2011	3:31:16 PM	BCl3 MFC set to  0.000000
10/5/2011	3:31:16 PM	PHl3 MFC set to  0.000000
10/5/2011	3:31:16 PM	SiCl4 MFC set to  0.000000
10/5/2011	3:31:16 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	3:31:16 PM	Tube furnace set to 0
10/5/2011	3:51:16 PM	Helium valve closed
10/5/2011	3:51:16 PM	H2 valve closed
10/5/2011	3:51:16 PM	BCl3 valve closed
10/5/2011	3:51:16 PM	PH3 valve closed
10/5/2011	3:51:16 PM	SiCl4 pre valve closed
10/5/2011	3:51:16 PM	SiCl4 post valve closed
10/5/2011	3:51:16 PM	Main Vac valve closed
10/5/2011	3:51:16 PM	Bypass valve closed
10/5/2011	3:51:16 PM	Bubbler valve closed
10/5/2011	3:51:16 PM	Helium MFC set to  0.000000
10/5/2011	3:51:16 PM	H2 MFC set to  0.000000
10/5/2011	3:51:16 PM	BCl3 MFC set to  0.000000
10/5/2011	3:51:16 PM	PHl3 MFC set to  0.000000
10/5/2011	3:51:16 PM	SiCl4 MFC set to  0.000000
10/5/2011	3:51:16 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	3:51:16 PM	Tube furnace set to 0
10/5/2011	3:51:17 PM	Run finished at 3:51 PM
10/5/2011	4:04:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/5/2011	4:04:49 PM	Recipe started at 4:04 PM
10/5/2011	4:04:49 PM	Helium valve closed
10/5/2011	4:04:49 PM	H2 valve closed
10/5/2011	4:04:49 PM	BCl3 valve closed
10/5/2011	4:04:49 PM	PH3 valve closed
10/5/2011	4:04:50 PM	SiCl4 pre valve closed
10/5/2011	4:04:50 PM	SiCl4 post valve closed
10/5/2011	4:04:50 PM	Main Vac valve closed
10/5/2011	4:04:50 PM	Bypass valve closed
10/5/2011	4:04:50 PM	Bubbler valve closed
10/5/2011	4:04:50 PM	Helium MFC set to  0.000000
10/5/2011	4:04:50 PM	H2 MFC set to  0.000000
10/5/2011	4:04:50 PM	BCl3 MFC set to  0.000000
10/5/2011	4:04:50 PM	PHl3 MFC set to  0.000000
10/5/2011	4:04:50 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:04:50 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:04:50 PM	Tube furnace set to 0
10/5/2011	4:04:53 PM	H2 valve closed
10/5/2011	4:04:53 PM	BCl3 valve closed
10/5/2011	4:04:53 PM	PH3 valve closed
10/5/2011	4:04:53 PM	SiCl4 pre valve closed
10/5/2011	4:04:53 PM	SiCl4 post valve closed
10/5/2011	4:04:53 PM	Main Vac valve closed
10/5/2011	4:04:53 PM	Bypass valve closed
10/5/2011	4:04:53 PM	Bubbler valve closed
10/5/2011	4:04:53 PM	Helium valve opened
10/5/2011	4:04:53 PM	Helium MFC set to  500.000000
10/5/2011	4:04:53 PM	H2 MFC set to  0.000000
10/5/2011	4:04:53 PM	BCl3 MFC set to  0.000000
10/5/2011	4:04:53 PM	PHl3 MFC set to  0.000000
10/5/2011	4:04:53 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:04:53 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:04:53 PM	Tube furnace set to 0
10/5/2011	4:04:55 PM	Helium valve closed
10/5/2011	4:04:55 PM	H2 valve closed
10/5/2011	4:04:55 PM	BCl3 valve closed
10/5/2011	4:04:55 PM	PH3 valve closed
10/5/2011	4:04:55 PM	SiCl4 pre valve closed
10/5/2011	4:04:55 PM	SiCl4 post valve closed
10/5/2011	4:04:55 PM	Main Vac valve closed
10/5/2011	4:04:55 PM	Bypass valve closed
10/5/2011	4:04:55 PM	Bubbler valve closed
10/5/2011	4:04:55 PM	Helium MFC set to  0.000000
10/5/2011	4:04:55 PM	H2 MFC set to  0.000000
10/5/2011	4:04:55 PM	BCl3 MFC set to  0.000000
10/5/2011	4:04:55 PM	PHl3 MFC set to  0.000000
10/5/2011	4:04:55 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:04:55 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:04:56 PM	Tube furnace set to 0
10/5/2011	4:04:57 PM	Run finished at 4:04 PM
10/5/2011	4:04:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/5/2011	4:18:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2011	4:18:17 PM	Recipe started at 4:18 PM
10/5/2011	4:18:17 PM	Helium valve closed
10/5/2011	4:18:17 PM	H2 valve closed
10/5/2011	4:18:17 PM	BCl3 valve closed
10/5/2011	4:18:17 PM	PH3 valve closed
10/5/2011	4:18:17 PM	SiCl4 pre valve closed
10/5/2011	4:18:17 PM	SiCl4 post valve closed
10/5/2011	4:18:17 PM	Main Vac valve closed
10/5/2011	4:18:17 PM	Bubbler valve closed
10/5/2011	4:18:17 PM	Bypass valve opened
10/5/2011	4:18:17 PM	Helium MFC set to  0.000000
10/5/2011	4:18:17 PM	H2 MFC set to  0.000000
10/5/2011	4:18:17 PM	BCl3 MFC set to  0.000000
10/5/2011	4:18:17 PM	PHl3 MFC set to  0.000000
10/5/2011	4:18:17 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:18:17 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:18:17 PM	Tube furnace set to 0
10/5/2011	4:19:29 PM	Helium valve closed
10/5/2011	4:19:29 PM	H2 valve closed
10/5/2011	4:19:29 PM	BCl3 valve closed
10/5/2011	4:19:29 PM	PH3 valve closed
10/5/2011	4:19:29 PM	SiCl4 pre valve closed
10/5/2011	4:19:29 PM	SiCl4 post valve closed
10/5/2011	4:19:29 PM	Main Vac valve closed
10/5/2011	4:19:29 PM	Bubbler valve closed
10/5/2011	4:19:29 PM	Bypass valve opened
10/5/2011	4:19:29 PM	Helium MFC set to  0.000000
10/5/2011	4:19:29 PM	H2 MFC set to  0.000000
10/5/2011	4:19:29 PM	BCl3 MFC set to  0.000000
10/5/2011	4:19:29 PM	PHl3 MFC set to  0.000000
10/5/2011	4:19:29 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:19:29 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:19:30 PM	Tube furnace set to 0
10/5/2011	4:20:30 PM	Helium valve closed
10/5/2011	4:20:30 PM	H2 valve closed
10/5/2011	4:20:30 PM	BCl3 valve closed
10/5/2011	4:20:30 PM	PH3 valve closed
10/5/2011	4:20:30 PM	SiCl4 pre valve closed
10/5/2011	4:20:30 PM	SiCl4 post valve closed
10/5/2011	4:20:30 PM	Bypass valve closed
10/5/2011	4:20:30 PM	Bubbler valve closed
10/5/2011	4:20:30 PM	Main Vac valve opened
10/5/2011	4:20:30 PM	Helium MFC set to  0.000000
10/5/2011	4:20:30 PM	H2 MFC set to  0.000000
10/5/2011	4:20:30 PM	BCl3 MFC set to  0.000000
10/5/2011	4:20:30 PM	PHl3 MFC set to  0.000000
10/5/2011	4:20:30 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:20:30 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:20:30 PM	Tube furnace set to 0
10/5/2011	4:20:31 PM	Run finished at 4:20 PM
10/5/2011	4:20:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2011	4:26:17 PM	Recipe started at 4:26 PM
10/5/2011	4:26:17 PM	Helium valve closed
10/5/2011	4:26:17 PM	H2 valve closed
10/5/2011	4:26:17 PM	BCl3 valve closed
10/5/2011	4:26:17 PM	PH3 valve closed
10/5/2011	4:26:17 PM	SiCl4 pre valve closed
10/5/2011	4:26:17 PM	SiCl4 post valve closed
10/5/2011	4:26:17 PM	Bypass valve closed
10/5/2011	4:26:17 PM	Bubbler valve closed
10/5/2011	4:26:17 PM	Main Vac valve opened
10/5/2011	4:26:17 PM	Helium MFC set to  0.000000
10/5/2011	4:26:17 PM	H2 MFC set to  0.000000
10/5/2011	4:26:17 PM	BCl3 MFC set to  0.000000
10/5/2011	4:26:17 PM	PHl3 MFC set to  0.000000
10/5/2011	4:26:17 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:26:17 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:26:18 PM	Tube furnace set to 200
10/5/2011	4:26:48 PM	H2 valve closed
10/5/2011	4:26:48 PM	BCl3 valve closed
10/5/2011	4:26:48 PM	PH3 valve closed
10/5/2011	4:26:48 PM	SiCl4 pre valve closed
10/5/2011	4:26:48 PM	SiCl4 post valve closed
10/5/2011	4:26:48 PM	Bypass valve closed
10/5/2011	4:26:48 PM	Bubbler valve closed
10/5/2011	4:26:48 PM	Helium valve opened
10/5/2011	4:26:48 PM	Main Vac valve opened
10/5/2011	4:26:48 PM	Helium MFC set to  20.000000
10/5/2011	4:26:48 PM	H2 MFC set to  0.000000
10/5/2011	4:26:48 PM	BCl3 MFC set to  0.000000
10/5/2011	4:26:48 PM	PHl3 MFC set to  0.000000
10/5/2011	4:26:48 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:26:48 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:26:48 PM	Tube furnace set to 200
10/5/2011	4:27:18 PM	Helium valve closed
10/5/2011	4:27:18 PM	H2 valve closed
10/5/2011	4:27:18 PM	BCl3 valve closed
10/5/2011	4:27:18 PM	PH3 valve closed
10/5/2011	4:27:18 PM	SiCl4 pre valve closed
10/5/2011	4:27:18 PM	SiCl4 post valve closed
10/5/2011	4:27:18 PM	Bypass valve closed
10/5/2011	4:27:18 PM	Bubbler valve closed
10/5/2011	4:27:18 PM	Main Vac valve opened
10/5/2011	4:27:18 PM	Helium MFC set to  0.000000
10/5/2011	4:27:18 PM	H2 MFC set to  0.000000
10/5/2011	4:27:18 PM	BCl3 MFC set to  0.000000
10/5/2011	4:27:18 PM	PHl3 MFC set to  0.000000
10/5/2011	4:27:18 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:27:18 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:27:18 PM	Tube furnace set to 200
10/5/2011	4:27:48 PM	H2 valve closed
10/5/2011	4:27:48 PM	BCl3 valve closed
10/5/2011	4:27:48 PM	PH3 valve closed
10/5/2011	4:27:48 PM	SiCl4 pre valve closed
10/5/2011	4:27:48 PM	SiCl4 post valve closed
10/5/2011	4:27:48 PM	Bypass valve closed
10/5/2011	4:27:48 PM	Bubbler valve closed
10/5/2011	4:27:48 PM	Helium valve opened
10/5/2011	4:27:48 PM	Main Vac valve opened
10/5/2011	4:27:48 PM	Helium MFC set to  20.000000
10/5/2011	4:27:48 PM	H2 MFC set to  0.000000
10/5/2011	4:27:48 PM	BCl3 MFC set to  0.000000
10/5/2011	4:27:48 PM	PHl3 MFC set to  0.000000
10/5/2011	4:27:48 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:27:48 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:27:48 PM	Tube furnace set to 200
10/5/2011	4:28:18 PM	Helium valve closed
10/5/2011	4:28:18 PM	H2 valve closed
10/5/2011	4:28:18 PM	BCl3 valve closed
10/5/2011	4:28:18 PM	PH3 valve closed
10/5/2011	4:28:18 PM	SiCl4 pre valve closed
10/5/2011	4:28:18 PM	SiCl4 post valve closed
10/5/2011	4:28:18 PM	Bypass valve closed
10/5/2011	4:28:18 PM	Bubbler valve closed
10/5/2011	4:28:18 PM	Main Vac valve opened
10/5/2011	4:28:18 PM	Helium MFC set to  0.000000
10/5/2011	4:28:18 PM	H2 MFC set to  0.000000
10/5/2011	4:28:18 PM	BCl3 MFC set to  0.000000
10/5/2011	4:28:18 PM	PHl3 MFC set to  0.000000
10/5/2011	4:28:18 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:28:18 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:28:18 PM	Tube furnace set to 200
10/5/2011	4:28:48 PM	H2 valve closed
10/5/2011	4:28:48 PM	BCl3 valve closed
10/5/2011	4:28:48 PM	PH3 valve closed
10/5/2011	4:28:48 PM	SiCl4 pre valve closed
10/5/2011	4:28:48 PM	SiCl4 post valve closed
10/5/2011	4:28:48 PM	Bypass valve closed
10/5/2011	4:28:48 PM	Bubbler valve closed
10/5/2011	4:28:48 PM	Helium valve opened
10/5/2011	4:28:48 PM	Main Vac valve opened
10/5/2011	4:28:48 PM	Helium MFC set to  20.000000
10/5/2011	4:28:48 PM	H2 MFC set to  0.000000
10/5/2011	4:28:48 PM	BCl3 MFC set to  0.000000
10/5/2011	4:28:48 PM	PHl3 MFC set to  0.000000
10/5/2011	4:28:48 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:28:48 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:28:49 PM	Tube furnace set to 200
10/5/2011	4:29:19 PM	Helium valve closed
10/5/2011	4:29:19 PM	H2 valve closed
10/5/2011	4:29:19 PM	BCl3 valve closed
10/5/2011	4:29:19 PM	PH3 valve closed
10/5/2011	4:29:19 PM	SiCl4 pre valve closed
10/5/2011	4:29:19 PM	SiCl4 post valve closed
10/5/2011	4:29:19 PM	Bypass valve closed
10/5/2011	4:29:19 PM	Bubbler valve closed
10/5/2011	4:29:19 PM	Main Vac valve opened
10/5/2011	4:29:19 PM	Helium MFC set to  0.000000
10/5/2011	4:29:19 PM	H2 MFC set to  0.000000
10/5/2011	4:29:19 PM	BCl3 MFC set to  0.000000
10/5/2011	4:29:19 PM	PHl3 MFC set to  0.000000
10/5/2011	4:29:19 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:29:19 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:29:19 PM	Tube furnace set to 200
10/5/2011	4:29:49 PM	H2 valve closed
10/5/2011	4:29:49 PM	BCl3 valve closed
10/5/2011	4:29:49 PM	PH3 valve closed
10/5/2011	4:29:49 PM	SiCl4 pre valve closed
10/5/2011	4:29:49 PM	SiCl4 post valve closed
10/5/2011	4:29:49 PM	Bypass valve closed
10/5/2011	4:29:49 PM	Bubbler valve closed
10/5/2011	4:29:49 PM	Helium valve opened
10/5/2011	4:29:49 PM	Main Vac valve opened
10/5/2011	4:29:49 PM	Helium MFC set to  20.000000
10/5/2011	4:29:49 PM	H2 MFC set to  0.000000
10/5/2011	4:29:49 PM	BCl3 MFC set to  0.000000
10/5/2011	4:29:49 PM	PHl3 MFC set to  0.000000
10/5/2011	4:29:49 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:29:49 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:29:49 PM	Tube furnace set to 200
10/5/2011	4:30:19 PM	Helium valve closed
10/5/2011	4:30:19 PM	H2 valve closed
10/5/2011	4:30:19 PM	BCl3 valve closed
10/5/2011	4:30:19 PM	PH3 valve closed
10/5/2011	4:30:19 PM	SiCl4 pre valve closed
10/5/2011	4:30:19 PM	SiCl4 post valve closed
10/5/2011	4:30:19 PM	Bypass valve closed
10/5/2011	4:30:19 PM	Bubbler valve closed
10/5/2011	4:30:19 PM	Main Vac valve opened
10/5/2011	4:30:19 PM	Helium MFC set to  0.000000
10/5/2011	4:30:19 PM	H2 MFC set to  0.000000
10/5/2011	4:30:19 PM	BCl3 MFC set to  0.000000
10/5/2011	4:30:19 PM	PHl3 MFC set to  0.000000
10/5/2011	4:30:19 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:30:19 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:30:19 PM	Tube furnace set to 200
10/5/2011	4:30:49 PM	H2 valve closed
10/5/2011	4:30:49 PM	BCl3 valve closed
10/5/2011	4:30:49 PM	PH3 valve closed
10/5/2011	4:30:49 PM	SiCl4 pre valve closed
10/5/2011	4:30:49 PM	SiCl4 post valve closed
10/5/2011	4:30:49 PM	Bypass valve closed
10/5/2011	4:30:49 PM	Bubbler valve closed
10/5/2011	4:30:49 PM	Helium valve opened
10/5/2011	4:30:49 PM	Main Vac valve opened
10/5/2011	4:30:49 PM	Helium MFC set to  20.000000
10/5/2011	4:30:49 PM	H2 MFC set to  0.000000
10/5/2011	4:30:49 PM	BCl3 MFC set to  0.000000
10/5/2011	4:30:49 PM	PHl3 MFC set to  0.000000
10/5/2011	4:30:49 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:30:49 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:30:49 PM	Tube furnace set to 200
10/5/2011	4:31:19 PM	Helium valve closed
10/5/2011	4:31:19 PM	H2 valve closed
10/5/2011	4:31:19 PM	BCl3 valve closed
10/5/2011	4:31:19 PM	PH3 valve closed
10/5/2011	4:31:19 PM	SiCl4 pre valve closed
10/5/2011	4:31:19 PM	SiCl4 post valve closed
10/5/2011	4:31:19 PM	Bypass valve closed
10/5/2011	4:31:19 PM	Bubbler valve closed
10/5/2011	4:31:19 PM	Main Vac valve opened
10/5/2011	4:31:19 PM	Helium MFC set to  0.000000
10/5/2011	4:31:19 PM	H2 MFC set to  0.000000
10/5/2011	4:31:19 PM	BCl3 MFC set to  0.000000
10/5/2011	4:31:19 PM	PHl3 MFC set to  0.000000
10/5/2011	4:31:19 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:31:19 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:31:20 PM	Tube furnace set to 200
10/5/2011	4:31:50 PM	H2 valve closed
10/5/2011	4:31:50 PM	BCl3 valve closed
10/5/2011	4:31:50 PM	PH3 valve closed
10/5/2011	4:31:50 PM	SiCl4 pre valve closed
10/5/2011	4:31:50 PM	SiCl4 post valve closed
10/5/2011	4:31:50 PM	Bypass valve closed
10/5/2011	4:31:50 PM	Bubbler valve closed
10/5/2011	4:31:50 PM	Helium valve opened
10/5/2011	4:31:50 PM	Main Vac valve opened
10/5/2011	4:31:50 PM	Helium MFC set to  20.000000
10/5/2011	4:31:50 PM	H2 MFC set to  0.000000
10/5/2011	4:31:50 PM	BCl3 MFC set to  0.000000
10/5/2011	4:31:50 PM	PHl3 MFC set to  0.000000
10/5/2011	4:31:50 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:31:50 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:31:50 PM	Tube furnace set to 200
10/5/2011	4:32:20 PM	Helium valve closed
10/5/2011	4:32:20 PM	H2 valve closed
10/5/2011	4:32:20 PM	BCl3 valve closed
10/5/2011	4:32:20 PM	PH3 valve closed
10/5/2011	4:32:20 PM	SiCl4 pre valve closed
10/5/2011	4:32:20 PM	SiCl4 post valve closed
10/5/2011	4:32:20 PM	Bypass valve closed
10/5/2011	4:32:20 PM	Bubbler valve closed
10/5/2011	4:32:20 PM	Main Vac valve opened
10/5/2011	4:32:20 PM	Helium MFC set to  0.000000
10/5/2011	4:32:20 PM	H2 MFC set to  0.000000
10/5/2011	4:32:20 PM	BCl3 MFC set to  0.000000
10/5/2011	4:32:20 PM	PHl3 MFC set to  0.000000
10/5/2011	4:32:20 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:32:20 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:32:20 PM	Tube furnace set to 200
10/5/2011	4:32:50 PM	H2 valve closed
10/5/2011	4:32:50 PM	BCl3 valve closed
10/5/2011	4:32:50 PM	PH3 valve closed
10/5/2011	4:32:50 PM	SiCl4 pre valve closed
10/5/2011	4:32:50 PM	SiCl4 post valve closed
10/5/2011	4:32:50 PM	Bypass valve closed
10/5/2011	4:32:50 PM	Bubbler valve closed
10/5/2011	4:32:50 PM	Helium valve opened
10/5/2011	4:32:50 PM	Main Vac valve opened
10/5/2011	4:32:50 PM	Helium MFC set to  20.000000
10/5/2011	4:32:50 PM	H2 MFC set to  0.000000
10/5/2011	4:32:50 PM	BCl3 MFC set to  0.000000
10/5/2011	4:32:50 PM	PHl3 MFC set to  0.000000
10/5/2011	4:32:50 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:32:50 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:32:50 PM	Tube furnace set to 200
10/5/2011	4:33:20 PM	Helium valve closed
10/5/2011	4:33:20 PM	H2 valve closed
10/5/2011	4:33:20 PM	BCl3 valve closed
10/5/2011	4:33:20 PM	PH3 valve closed
10/5/2011	4:33:20 PM	SiCl4 pre valve closed
10/5/2011	4:33:20 PM	SiCl4 post valve closed
10/5/2011	4:33:20 PM	Bypass valve closed
10/5/2011	4:33:20 PM	Bubbler valve closed
10/5/2011	4:33:20 PM	Main Vac valve opened
10/5/2011	4:33:20 PM	Helium MFC set to  0.000000
10/5/2011	4:33:20 PM	H2 MFC set to  0.000000
10/5/2011	4:33:20 PM	BCl3 MFC set to  0.000000
10/5/2011	4:33:20 PM	PHl3 MFC set to  0.000000
10/5/2011	4:33:20 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:33:20 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:33:20 PM	Tube furnace set to 200
10/5/2011	4:33:50 PM	H2 valve closed
10/5/2011	4:33:50 PM	BCl3 valve closed
10/5/2011	4:33:50 PM	PH3 valve closed
10/5/2011	4:33:50 PM	SiCl4 pre valve closed
10/5/2011	4:33:50 PM	SiCl4 post valve closed
10/5/2011	4:33:50 PM	Bypass valve closed
10/5/2011	4:33:50 PM	Bubbler valve closed
10/5/2011	4:33:50 PM	Helium valve opened
10/5/2011	4:33:50 PM	Main Vac valve opened
10/5/2011	4:33:50 PM	Helium MFC set to  20.000000
10/5/2011	4:33:50 PM	H2 MFC set to  0.000000
10/5/2011	4:33:50 PM	BCl3 MFC set to  0.000000
10/5/2011	4:33:50 PM	PHl3 MFC set to  0.000000
10/5/2011	4:33:50 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:33:50 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:33:51 PM	Tube furnace set to 200
10/5/2011	4:34:21 PM	Helium valve closed
10/5/2011	4:34:21 PM	H2 valve closed
10/5/2011	4:34:21 PM	BCl3 valve closed
10/5/2011	4:34:21 PM	PH3 valve closed
10/5/2011	4:34:21 PM	SiCl4 pre valve closed
10/5/2011	4:34:21 PM	SiCl4 post valve closed
10/5/2011	4:34:21 PM	Bypass valve closed
10/5/2011	4:34:21 PM	Bubbler valve closed
10/5/2011	4:34:21 PM	Main Vac valve opened
10/5/2011	4:34:21 PM	Helium MFC set to  0.000000
10/5/2011	4:34:21 PM	H2 MFC set to  0.000000
10/5/2011	4:34:21 PM	BCl3 MFC set to  0.000000
10/5/2011	4:34:21 PM	PHl3 MFC set to  0.000000
10/5/2011	4:34:21 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:34:21 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:34:21 PM	Tube furnace set to 200
10/5/2011	4:34:51 PM	H2 valve closed
10/5/2011	4:34:51 PM	BCl3 valve closed
10/5/2011	4:34:51 PM	PH3 valve closed
10/5/2011	4:34:51 PM	SiCl4 pre valve closed
10/5/2011	4:34:51 PM	SiCl4 post valve closed
10/5/2011	4:34:51 PM	Bypass valve closed
10/5/2011	4:34:51 PM	Bubbler valve closed
10/5/2011	4:34:51 PM	Helium valve opened
10/5/2011	4:34:51 PM	Main Vac valve opened
10/5/2011	4:34:51 PM	Helium MFC set to  20.000000
10/5/2011	4:34:51 PM	H2 MFC set to  0.000000
10/5/2011	4:34:51 PM	BCl3 MFC set to  0.000000
10/5/2011	4:34:51 PM	PHl3 MFC set to  0.000000
10/5/2011	4:34:51 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:34:51 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:34:51 PM	Tube furnace set to 200
10/5/2011	4:35:21 PM	Helium valve closed
10/5/2011	4:35:21 PM	H2 valve closed
10/5/2011	4:35:21 PM	BCl3 valve closed
10/5/2011	4:35:21 PM	PH3 valve closed
10/5/2011	4:35:21 PM	SiCl4 pre valve closed
10/5/2011	4:35:21 PM	SiCl4 post valve closed
10/5/2011	4:35:21 PM	Bypass valve closed
10/5/2011	4:35:21 PM	Bubbler valve closed
10/5/2011	4:35:21 PM	Main Vac valve opened
10/5/2011	4:35:21 PM	Helium MFC set to  0.000000
10/5/2011	4:35:21 PM	H2 MFC set to  0.000000
10/5/2011	4:35:21 PM	BCl3 MFC set to  0.000000
10/5/2011	4:35:21 PM	PHl3 MFC set to  0.000000
10/5/2011	4:35:21 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:35:21 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:35:21 PM	Tube furnace set to 200
10/5/2011	4:35:51 PM	H2 valve closed
10/5/2011	4:35:51 PM	BCl3 valve closed
10/5/2011	4:35:51 PM	PH3 valve closed
10/5/2011	4:35:51 PM	SiCl4 pre valve closed
10/5/2011	4:35:51 PM	SiCl4 post valve closed
10/5/2011	4:35:51 PM	Bypass valve closed
10/5/2011	4:35:51 PM	Bubbler valve closed
10/5/2011	4:35:51 PM	Helium valve opened
10/5/2011	4:35:51 PM	Main Vac valve opened
10/5/2011	4:35:51 PM	Helium MFC set to  20.000000
10/5/2011	4:35:51 PM	H2 MFC set to  0.000000
10/5/2011	4:35:51 PM	BCl3 MFC set to  0.000000
10/5/2011	4:35:51 PM	PHl3 MFC set to  0.000000
10/5/2011	4:35:51 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:35:51 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:35:52 PM	Tube furnace set to 200
10/5/2011	4:36:22 PM	Helium valve closed
10/5/2011	4:36:22 PM	H2 valve closed
10/5/2011	4:36:22 PM	BCl3 valve closed
10/5/2011	4:36:22 PM	PH3 valve closed
10/5/2011	4:36:22 PM	SiCl4 pre valve closed
10/5/2011	4:36:22 PM	SiCl4 post valve closed
10/5/2011	4:36:22 PM	Bypass valve closed
10/5/2011	4:36:22 PM	Bubbler valve closed
10/5/2011	4:36:22 PM	Main Vac valve opened
10/5/2011	4:36:22 PM	Helium MFC set to  0.000000
10/5/2011	4:36:22 PM	H2 MFC set to  0.000000
10/5/2011	4:36:22 PM	BCl3 MFC set to  0.000000
10/5/2011	4:36:22 PM	PHl3 MFC set to  0.000000
10/5/2011	4:36:22 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:36:22 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:36:22 PM	Tube furnace set to 200
10/5/2011	4:36:23 PM	Run finished at 4:36 PM
10/5/2011	4:38:21 PM	Recipe started at 4:38 PM
10/5/2011	4:38:21 PM	Helium valve closed
10/5/2011	4:38:21 PM	H2 valve closed
10/5/2011	4:38:21 PM	BCl3 valve closed
10/5/2011	4:38:21 PM	PH3 valve closed
10/5/2011	4:38:21 PM	SiCl4 pre valve closed
10/5/2011	4:38:21 PM	SiCl4 post valve closed
10/5/2011	4:38:21 PM	Bypass valve closed
10/5/2011	4:38:21 PM	Bubbler valve closed
10/5/2011	4:38:21 PM	Main Vac valve opened
10/5/2011	4:38:21 PM	Helium MFC set to  0.000000
10/5/2011	4:38:21 PM	H2 MFC set to  0.000000
10/5/2011	4:38:21 PM	BCl3 MFC set to  0.000000
10/5/2011	4:38:21 PM	PHl3 MFC set to  0.000000
10/5/2011	4:38:21 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:38:21 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:38:21 PM	Tube furnace set to 200
10/5/2011	4:38:51 PM	H2 valve closed
10/5/2011	4:38:51 PM	BCl3 valve closed
10/5/2011	4:38:51 PM	PH3 valve closed
10/5/2011	4:38:51 PM	SiCl4 pre valve closed
10/5/2011	4:38:51 PM	SiCl4 post valve closed
10/5/2011	4:38:51 PM	Bypass valve closed
10/5/2011	4:38:51 PM	Bubbler valve closed
10/5/2011	4:38:51 PM	Helium valve opened
10/5/2011	4:38:51 PM	Main Vac valve opened
10/5/2011	4:38:51 PM	Helium MFC set to  20.000000
10/5/2011	4:38:51 PM	H2 MFC set to  0.000000
10/5/2011	4:38:51 PM	BCl3 MFC set to  0.000000
10/5/2011	4:38:51 PM	PHl3 MFC set to  0.000000
10/5/2011	4:38:51 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:38:51 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:38:52 PM	Tube furnace set to 200
10/5/2011	4:39:22 PM	Helium valve closed
10/5/2011	4:39:22 PM	H2 valve closed
10/5/2011	4:39:22 PM	BCl3 valve closed
10/5/2011	4:39:22 PM	PH3 valve closed
10/5/2011	4:39:22 PM	SiCl4 pre valve closed
10/5/2011	4:39:22 PM	SiCl4 post valve closed
10/5/2011	4:39:22 PM	Bypass valve closed
10/5/2011	4:39:22 PM	Bubbler valve closed
10/5/2011	4:39:22 PM	Main Vac valve opened
10/5/2011	4:39:22 PM	Helium MFC set to  0.000000
10/5/2011	4:39:22 PM	H2 MFC set to  0.000000
10/5/2011	4:39:22 PM	BCl3 MFC set to  0.000000
10/5/2011	4:39:22 PM	PHl3 MFC set to  0.000000
10/5/2011	4:39:22 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:39:22 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:39:22 PM	Tube furnace set to 200
10/5/2011	4:39:52 PM	H2 valve closed
10/5/2011	4:39:52 PM	BCl3 valve closed
10/5/2011	4:39:52 PM	PH3 valve closed
10/5/2011	4:39:52 PM	SiCl4 pre valve closed
10/5/2011	4:39:52 PM	SiCl4 post valve closed
10/5/2011	4:39:52 PM	Bypass valve closed
10/5/2011	4:39:52 PM	Bubbler valve closed
10/5/2011	4:39:52 PM	Helium valve opened
10/5/2011	4:39:52 PM	Main Vac valve opened
10/5/2011	4:39:52 PM	Helium MFC set to  20.000000
10/5/2011	4:39:52 PM	H2 MFC set to  0.000000
10/5/2011	4:39:52 PM	BCl3 MFC set to  0.000000
10/5/2011	4:39:52 PM	PHl3 MFC set to  0.000000
10/5/2011	4:39:52 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:39:52 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:39:52 PM	Tube furnace set to 200
10/5/2011	4:40:22 PM	Helium valve closed
10/5/2011	4:40:22 PM	H2 valve closed
10/5/2011	4:40:22 PM	BCl3 valve closed
10/5/2011	4:40:22 PM	PH3 valve closed
10/5/2011	4:40:22 PM	SiCl4 pre valve closed
10/5/2011	4:40:22 PM	SiCl4 post valve closed
10/5/2011	4:40:22 PM	Bypass valve closed
10/5/2011	4:40:22 PM	Bubbler valve closed
10/5/2011	4:40:22 PM	Main Vac valve opened
10/5/2011	4:40:22 PM	Helium MFC set to  0.000000
10/5/2011	4:40:22 PM	H2 MFC set to  0.000000
10/5/2011	4:40:22 PM	BCl3 MFC set to  0.000000
10/5/2011	4:40:22 PM	PHl3 MFC set to  0.000000
10/5/2011	4:40:22 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:40:22 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:40:22 PM	Tube furnace set to 200
10/5/2011	4:40:52 PM	H2 valve closed
10/5/2011	4:40:52 PM	BCl3 valve closed
10/5/2011	4:40:52 PM	PH3 valve closed
10/5/2011	4:40:52 PM	SiCl4 pre valve closed
10/5/2011	4:40:52 PM	SiCl4 post valve closed
10/5/2011	4:40:52 PM	Bypass valve closed
10/5/2011	4:40:52 PM	Bubbler valve closed
10/5/2011	4:40:52 PM	Helium valve opened
10/5/2011	4:40:52 PM	Main Vac valve opened
10/5/2011	4:40:52 PM	Helium MFC set to  20.000000
10/5/2011	4:40:52 PM	H2 MFC set to  0.000000
10/5/2011	4:40:52 PM	BCl3 MFC set to  0.000000
10/5/2011	4:40:52 PM	PHl3 MFC set to  0.000000
10/5/2011	4:40:52 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:40:52 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:40:52 PM	Tube furnace set to 200
10/5/2011	4:41:22 PM	Helium valve closed
10/5/2011	4:41:22 PM	H2 valve closed
10/5/2011	4:41:22 PM	BCl3 valve closed
10/5/2011	4:41:22 PM	PH3 valve closed
10/5/2011	4:41:22 PM	SiCl4 pre valve closed
10/5/2011	4:41:22 PM	SiCl4 post valve closed
10/5/2011	4:41:22 PM	Bypass valve closed
10/5/2011	4:41:22 PM	Bubbler valve closed
10/5/2011	4:41:22 PM	Main Vac valve opened
10/5/2011	4:41:22 PM	Helium MFC set to  0.000000
10/5/2011	4:41:22 PM	H2 MFC set to  0.000000
10/5/2011	4:41:22 PM	BCl3 MFC set to  0.000000
10/5/2011	4:41:22 PM	PHl3 MFC set to  0.000000
10/5/2011	4:41:22 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:41:22 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:41:23 PM	Tube furnace set to 200
10/5/2011	4:41:53 PM	H2 valve closed
10/5/2011	4:41:53 PM	BCl3 valve closed
10/5/2011	4:41:53 PM	PH3 valve closed
10/5/2011	4:41:53 PM	SiCl4 pre valve closed
10/5/2011	4:41:53 PM	SiCl4 post valve closed
10/5/2011	4:41:53 PM	Bypass valve closed
10/5/2011	4:41:53 PM	Bubbler valve closed
10/5/2011	4:41:53 PM	Helium valve opened
10/5/2011	4:41:53 PM	Main Vac valve opened
10/5/2011	4:41:53 PM	Helium MFC set to  20.000000
10/5/2011	4:41:53 PM	H2 MFC set to  0.000000
10/5/2011	4:41:53 PM	BCl3 MFC set to  0.000000
10/5/2011	4:41:53 PM	PHl3 MFC set to  0.000000
10/5/2011	4:41:53 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:41:53 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:41:53 PM	Tube furnace set to 200
10/5/2011	4:42:23 PM	Helium valve closed
10/5/2011	4:42:23 PM	H2 valve closed
10/5/2011	4:42:23 PM	BCl3 valve closed
10/5/2011	4:42:23 PM	PH3 valve closed
10/5/2011	4:42:23 PM	SiCl4 pre valve closed
10/5/2011	4:42:23 PM	SiCl4 post valve closed
10/5/2011	4:42:23 PM	Bypass valve closed
10/5/2011	4:42:23 PM	Bubbler valve closed
10/5/2011	4:42:23 PM	Main Vac valve opened
10/5/2011	4:42:23 PM	Helium MFC set to  0.000000
10/5/2011	4:42:23 PM	H2 MFC set to  0.000000
10/5/2011	4:42:23 PM	BCl3 MFC set to  0.000000
10/5/2011	4:42:23 PM	PHl3 MFC set to  0.000000
10/5/2011	4:42:23 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:42:23 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:42:23 PM	Tube furnace set to 200
10/5/2011	4:42:53 PM	H2 valve closed
10/5/2011	4:42:53 PM	BCl3 valve closed
10/5/2011	4:42:53 PM	PH3 valve closed
10/5/2011	4:42:53 PM	SiCl4 pre valve closed
10/5/2011	4:42:53 PM	SiCl4 post valve closed
10/5/2011	4:42:53 PM	Bypass valve closed
10/5/2011	4:42:53 PM	Bubbler valve closed
10/5/2011	4:42:53 PM	Helium valve opened
10/5/2011	4:42:53 PM	Main Vac valve opened
10/5/2011	4:42:53 PM	Helium MFC set to  20.000000
10/5/2011	4:42:53 PM	H2 MFC set to  0.000000
10/5/2011	4:42:53 PM	BCl3 MFC set to  0.000000
10/5/2011	4:42:53 PM	PHl3 MFC set to  0.000000
10/5/2011	4:42:53 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:42:53 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:42:53 PM	Tube furnace set to 200
10/5/2011	4:43:23 PM	Helium valve closed
10/5/2011	4:43:23 PM	H2 valve closed
10/5/2011	4:43:23 PM	BCl3 valve closed
10/5/2011	4:43:23 PM	PH3 valve closed
10/5/2011	4:43:23 PM	SiCl4 pre valve closed
10/5/2011	4:43:23 PM	SiCl4 post valve closed
10/5/2011	4:43:23 PM	Bypass valve closed
10/5/2011	4:43:23 PM	Bubbler valve closed
10/5/2011	4:43:23 PM	Main Vac valve opened
10/5/2011	4:43:23 PM	Helium MFC set to  0.000000
10/5/2011	4:43:23 PM	H2 MFC set to  0.000000
10/5/2011	4:43:23 PM	BCl3 MFC set to  0.000000
10/5/2011	4:43:23 PM	PHl3 MFC set to  0.000000
10/5/2011	4:43:23 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:43:23 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:43:23 PM	Tube furnace set to 200
10/5/2011	4:43:53 PM	H2 valve closed
10/5/2011	4:43:53 PM	BCl3 valve closed
10/5/2011	4:43:53 PM	PH3 valve closed
10/5/2011	4:43:53 PM	SiCl4 pre valve closed
10/5/2011	4:43:53 PM	SiCl4 post valve closed
10/5/2011	4:43:53 PM	Bypass valve closed
10/5/2011	4:43:53 PM	Bubbler valve closed
10/5/2011	4:43:53 PM	Helium valve opened
10/5/2011	4:43:53 PM	Main Vac valve opened
10/5/2011	4:43:53 PM	Helium MFC set to  20.000000
10/5/2011	4:43:53 PM	H2 MFC set to  0.000000
10/5/2011	4:43:53 PM	BCl3 MFC set to  0.000000
10/5/2011	4:43:53 PM	PHl3 MFC set to  0.000000
10/5/2011	4:43:53 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:43:53 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:43:54 PM	Tube furnace set to 200
10/5/2011	4:44:24 PM	Helium valve closed
10/5/2011	4:44:24 PM	H2 valve closed
10/5/2011	4:44:24 PM	BCl3 valve closed
10/5/2011	4:44:24 PM	PH3 valve closed
10/5/2011	4:44:24 PM	SiCl4 pre valve closed
10/5/2011	4:44:24 PM	SiCl4 post valve closed
10/5/2011	4:44:24 PM	Bypass valve closed
10/5/2011	4:44:24 PM	Bubbler valve closed
10/5/2011	4:44:24 PM	Main Vac valve opened
10/5/2011	4:44:24 PM	Helium MFC set to  0.000000
10/5/2011	4:44:24 PM	H2 MFC set to  0.000000
10/5/2011	4:44:24 PM	BCl3 MFC set to  0.000000
10/5/2011	4:44:24 PM	PHl3 MFC set to  0.000000
10/5/2011	4:44:24 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:44:24 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:44:24 PM	Tube furnace set to 200
10/5/2011	4:44:54 PM	H2 valve closed
10/5/2011	4:44:54 PM	BCl3 valve closed
10/5/2011	4:44:54 PM	PH3 valve closed
10/5/2011	4:44:54 PM	SiCl4 pre valve closed
10/5/2011	4:44:54 PM	SiCl4 post valve closed
10/5/2011	4:44:54 PM	Bypass valve closed
10/5/2011	4:44:54 PM	Bubbler valve closed
10/5/2011	4:44:54 PM	Helium valve opened
10/5/2011	4:44:54 PM	Main Vac valve opened
10/5/2011	4:44:54 PM	Helium MFC set to  20.000000
10/5/2011	4:44:54 PM	H2 MFC set to  0.000000
10/5/2011	4:44:54 PM	BCl3 MFC set to  0.000000
10/5/2011	4:44:54 PM	PHl3 MFC set to  0.000000
10/5/2011	4:44:54 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:44:54 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:44:54 PM	Tube furnace set to 200
10/5/2011	4:45:24 PM	Helium valve closed
10/5/2011	4:45:24 PM	H2 valve closed
10/5/2011	4:45:24 PM	BCl3 valve closed
10/5/2011	4:45:24 PM	PH3 valve closed
10/5/2011	4:45:24 PM	SiCl4 pre valve closed
10/5/2011	4:45:24 PM	SiCl4 post valve closed
10/5/2011	4:45:24 PM	Bypass valve closed
10/5/2011	4:45:24 PM	Bubbler valve closed
10/5/2011	4:45:24 PM	Main Vac valve opened
10/5/2011	4:45:24 PM	Helium MFC set to  0.000000
10/5/2011	4:45:24 PM	H2 MFC set to  0.000000
10/5/2011	4:45:24 PM	BCl3 MFC set to  0.000000
10/5/2011	4:45:24 PM	PHl3 MFC set to  0.000000
10/5/2011	4:45:24 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:45:24 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:45:24 PM	Tube furnace set to 200
10/5/2011	4:45:54 PM	H2 valve closed
10/5/2011	4:45:54 PM	BCl3 valve closed
10/5/2011	4:45:54 PM	PH3 valve closed
10/5/2011	4:45:54 PM	SiCl4 pre valve closed
10/5/2011	4:45:54 PM	SiCl4 post valve closed
10/5/2011	4:45:54 PM	Bypass valve closed
10/5/2011	4:45:54 PM	Bubbler valve closed
10/5/2011	4:45:54 PM	Helium valve opened
10/5/2011	4:45:54 PM	Main Vac valve opened
10/5/2011	4:45:54 PM	Helium MFC set to  20.000000
10/5/2011	4:45:54 PM	H2 MFC set to  0.000000
10/5/2011	4:45:54 PM	BCl3 MFC set to  0.000000
10/5/2011	4:45:54 PM	PHl3 MFC set to  0.000000
10/5/2011	4:45:54 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:45:54 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:45:54 PM	Tube furnace set to 200
10/5/2011	4:46:24 PM	Helium valve closed
10/5/2011	4:46:24 PM	H2 valve closed
10/5/2011	4:46:24 PM	BCl3 valve closed
10/5/2011	4:46:24 PM	PH3 valve closed
10/5/2011	4:46:24 PM	SiCl4 pre valve closed
10/5/2011	4:46:24 PM	SiCl4 post valve closed
10/5/2011	4:46:24 PM	Bypass valve closed
10/5/2011	4:46:24 PM	Bubbler valve closed
10/5/2011	4:46:24 PM	Main Vac valve opened
10/5/2011	4:46:24 PM	Helium MFC set to  0.000000
10/5/2011	4:46:24 PM	H2 MFC set to  0.000000
10/5/2011	4:46:24 PM	BCl3 MFC set to  0.000000
10/5/2011	4:46:24 PM	PHl3 MFC set to  0.000000
10/5/2011	4:46:24 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:46:24 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:46:25 PM	Tube furnace set to 200
10/5/2011	4:46:55 PM	H2 valve closed
10/5/2011	4:46:55 PM	BCl3 valve closed
10/5/2011	4:46:55 PM	PH3 valve closed
10/5/2011	4:46:55 PM	SiCl4 pre valve closed
10/5/2011	4:46:55 PM	SiCl4 post valve closed
10/5/2011	4:46:55 PM	Bypass valve closed
10/5/2011	4:46:55 PM	Bubbler valve closed
10/5/2011	4:46:55 PM	Helium valve opened
10/5/2011	4:46:55 PM	Main Vac valve opened
10/5/2011	4:46:55 PM	Helium MFC set to  20.000000
10/5/2011	4:46:55 PM	H2 MFC set to  0.000000
10/5/2011	4:46:55 PM	BCl3 MFC set to  0.000000
10/5/2011	4:46:55 PM	PHl3 MFC set to  0.000000
10/5/2011	4:46:55 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:46:55 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:46:55 PM	Tube furnace set to 200
10/5/2011	4:47:25 PM	Helium valve closed
10/5/2011	4:47:25 PM	H2 valve closed
10/5/2011	4:47:25 PM	BCl3 valve closed
10/5/2011	4:47:25 PM	PH3 valve closed
10/5/2011	4:47:25 PM	SiCl4 pre valve closed
10/5/2011	4:47:25 PM	SiCl4 post valve closed
10/5/2011	4:47:25 PM	Bypass valve closed
10/5/2011	4:47:25 PM	Bubbler valve closed
10/5/2011	4:47:25 PM	Main Vac valve opened
10/5/2011	4:47:25 PM	Helium MFC set to  0.000000
10/5/2011	4:47:25 PM	H2 MFC set to  0.000000
10/5/2011	4:47:25 PM	BCl3 MFC set to  0.000000
10/5/2011	4:47:25 PM	PHl3 MFC set to  0.000000
10/5/2011	4:47:25 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:47:25 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:47:25 PM	Tube furnace set to 200
10/5/2011	4:47:55 PM	H2 valve closed
10/5/2011	4:47:55 PM	BCl3 valve closed
10/5/2011	4:47:55 PM	PH3 valve closed
10/5/2011	4:47:55 PM	SiCl4 pre valve closed
10/5/2011	4:47:55 PM	SiCl4 post valve closed
10/5/2011	4:47:55 PM	Bypass valve closed
10/5/2011	4:47:55 PM	Bubbler valve closed
10/5/2011	4:47:55 PM	Helium valve opened
10/5/2011	4:47:55 PM	Main Vac valve opened
10/5/2011	4:47:55 PM	Helium MFC set to  20.000000
10/5/2011	4:47:55 PM	H2 MFC set to  0.000000
10/5/2011	4:47:55 PM	BCl3 MFC set to  0.000000
10/5/2011	4:47:55 PM	PHl3 MFC set to  0.000000
10/5/2011	4:47:55 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:47:55 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:47:55 PM	Tube furnace set to 200
10/5/2011	4:48:25 PM	Helium valve closed
10/5/2011	4:48:25 PM	H2 valve closed
10/5/2011	4:48:25 PM	BCl3 valve closed
10/5/2011	4:48:25 PM	PH3 valve closed
10/5/2011	4:48:25 PM	SiCl4 pre valve closed
10/5/2011	4:48:25 PM	SiCl4 post valve closed
10/5/2011	4:48:25 PM	Bypass valve closed
10/5/2011	4:48:25 PM	Bubbler valve closed
10/5/2011	4:48:25 PM	Main Vac valve opened
10/5/2011	4:48:25 PM	Helium MFC set to  0.000000
10/5/2011	4:48:25 PM	H2 MFC set to  0.000000
10/5/2011	4:48:25 PM	BCl3 MFC set to  0.000000
10/5/2011	4:48:25 PM	PHl3 MFC set to  0.000000
10/5/2011	4:48:25 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:48:25 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:48:25 PM	Tube furnace set to 200
10/5/2011	4:48:26 PM	Run finished at 4:48 PM
10/5/2011	4:51:38 PM	Recipe started at 4:51 PM
10/5/2011	4:51:38 PM	Helium valve closed
10/5/2011	4:51:38 PM	H2 valve closed
10/5/2011	4:51:38 PM	BCl3 valve closed
10/5/2011	4:51:38 PM	PH3 valve closed
10/5/2011	4:51:38 PM	SiCl4 pre valve closed
10/5/2011	4:51:38 PM	SiCl4 post valve closed
10/5/2011	4:51:38 PM	Bypass valve closed
10/5/2011	4:51:38 PM	Bubbler valve closed
10/5/2011	4:51:38 PM	Main Vac valve opened
10/5/2011	4:51:39 PM	Helium MFC set to  0.000000
10/5/2011	4:51:39 PM	H2 MFC set to  0.000000
10/5/2011	4:51:39 PM	BCl3 MFC set to  0.000000
10/5/2011	4:51:39 PM	PHl3 MFC set to  0.000000
10/5/2011	4:51:39 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:51:39 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:51:39 PM	Tube furnace set to 200
10/5/2011	4:52:09 PM	H2 valve closed
10/5/2011	4:52:09 PM	BCl3 valve closed
10/5/2011	4:52:09 PM	PH3 valve closed
10/5/2011	4:52:09 PM	SiCl4 pre valve closed
10/5/2011	4:52:09 PM	SiCl4 post valve closed
10/5/2011	4:52:09 PM	Bypass valve closed
10/5/2011	4:52:09 PM	Bubbler valve closed
10/5/2011	4:52:09 PM	Helium valve opened
10/5/2011	4:52:09 PM	Main Vac valve opened
10/5/2011	4:52:09 PM	Helium MFC set to  20.000000
10/5/2011	4:52:09 PM	H2 MFC set to  0.000000
10/5/2011	4:52:09 PM	BCl3 MFC set to  0.000000
10/5/2011	4:52:09 PM	PHl3 MFC set to  0.000000
10/5/2011	4:52:09 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:52:09 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:52:09 PM	Tube furnace set to 200
10/5/2011	4:52:39 PM	Helium valve closed
10/5/2011	4:52:39 PM	H2 valve closed
10/5/2011	4:52:39 PM	BCl3 valve closed
10/5/2011	4:52:39 PM	PH3 valve closed
10/5/2011	4:52:39 PM	SiCl4 pre valve closed
10/5/2011	4:52:39 PM	SiCl4 post valve closed
10/5/2011	4:52:39 PM	Bypass valve closed
10/5/2011	4:52:39 PM	Bubbler valve closed
10/5/2011	4:52:39 PM	Main Vac valve opened
10/5/2011	4:52:39 PM	Helium MFC set to  0.000000
10/5/2011	4:52:39 PM	H2 MFC set to  0.000000
10/5/2011	4:52:39 PM	BCl3 MFC set to  0.000000
10/5/2011	4:52:39 PM	PHl3 MFC set to  0.000000
10/5/2011	4:52:39 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:52:39 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:52:39 PM	Tube furnace set to 200
10/5/2011	4:53:09 PM	H2 valve closed
10/5/2011	4:53:09 PM	BCl3 valve closed
10/5/2011	4:53:09 PM	PH3 valve closed
10/5/2011	4:53:09 PM	SiCl4 pre valve closed
10/5/2011	4:53:09 PM	SiCl4 post valve closed
10/5/2011	4:53:09 PM	Bypass valve closed
10/5/2011	4:53:09 PM	Bubbler valve closed
10/5/2011	4:53:09 PM	Helium valve opened
10/5/2011	4:53:09 PM	Main Vac valve opened
10/5/2011	4:53:09 PM	Helium MFC set to  20.000000
10/5/2011	4:53:09 PM	H2 MFC set to  0.000000
10/5/2011	4:53:09 PM	BCl3 MFC set to  0.000000
10/5/2011	4:53:09 PM	PHl3 MFC set to  0.000000
10/5/2011	4:53:09 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:53:09 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:53:09 PM	Tube furnace set to 200
10/5/2011	4:53:39 PM	Helium valve closed
10/5/2011	4:53:39 PM	H2 valve closed
10/5/2011	4:53:39 PM	BCl3 valve closed
10/5/2011	4:53:39 PM	PH3 valve closed
10/5/2011	4:53:39 PM	SiCl4 pre valve closed
10/5/2011	4:53:39 PM	SiCl4 post valve closed
10/5/2011	4:53:39 PM	Bypass valve closed
10/5/2011	4:53:39 PM	Bubbler valve closed
10/5/2011	4:53:39 PM	Main Vac valve opened
10/5/2011	4:53:39 PM	Helium MFC set to  0.000000
10/5/2011	4:53:39 PM	H2 MFC set to  0.000000
10/5/2011	4:53:39 PM	BCl3 MFC set to  0.000000
10/5/2011	4:53:39 PM	PHl3 MFC set to  0.000000
10/5/2011	4:53:39 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:53:39 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:53:39 PM	Tube furnace set to 200
10/5/2011	4:54:10 PM	H2 valve closed
10/5/2011	4:54:10 PM	BCl3 valve closed
10/5/2011	4:54:10 PM	PH3 valve closed
10/5/2011	4:54:10 PM	SiCl4 pre valve closed
10/5/2011	4:54:10 PM	SiCl4 post valve closed
10/5/2011	4:54:10 PM	Bypass valve closed
10/5/2011	4:54:10 PM	Bubbler valve closed
10/5/2011	4:54:10 PM	Helium valve opened
10/5/2011	4:54:10 PM	Main Vac valve opened
10/5/2011	4:54:10 PM	Helium MFC set to  20.000000
10/5/2011	4:54:10 PM	H2 MFC set to  0.000000
10/5/2011	4:54:10 PM	BCl3 MFC set to  0.000000
10/5/2011	4:54:10 PM	PHl3 MFC set to  0.000000
10/5/2011	4:54:10 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:54:10 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:54:10 PM	Tube furnace set to 200
10/5/2011	4:54:40 PM	Helium valve closed
10/5/2011	4:54:40 PM	H2 valve closed
10/5/2011	4:54:40 PM	BCl3 valve closed
10/5/2011	4:54:40 PM	PH3 valve closed
10/5/2011	4:54:40 PM	SiCl4 pre valve closed
10/5/2011	4:54:40 PM	SiCl4 post valve closed
10/5/2011	4:54:40 PM	Bypass valve closed
10/5/2011	4:54:40 PM	Bubbler valve closed
10/5/2011	4:54:40 PM	Main Vac valve opened
10/5/2011	4:54:40 PM	Helium MFC set to  0.000000
10/5/2011	4:54:40 PM	H2 MFC set to  0.000000
10/5/2011	4:54:40 PM	BCl3 MFC set to  0.000000
10/5/2011	4:54:40 PM	PHl3 MFC set to  0.000000
10/5/2011	4:54:40 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:54:40 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:54:40 PM	Tube furnace set to 200
10/5/2011	4:55:10 PM	H2 valve closed
10/5/2011	4:55:10 PM	BCl3 valve closed
10/5/2011	4:55:10 PM	PH3 valve closed
10/5/2011	4:55:10 PM	SiCl4 pre valve closed
10/5/2011	4:55:10 PM	SiCl4 post valve closed
10/5/2011	4:55:10 PM	Bypass valve closed
10/5/2011	4:55:10 PM	Bubbler valve closed
10/5/2011	4:55:10 PM	Helium valve opened
10/5/2011	4:55:10 PM	Main Vac valve opened
10/5/2011	4:55:10 PM	Helium MFC set to  20.000000
10/5/2011	4:55:10 PM	H2 MFC set to  0.000000
10/5/2011	4:55:10 PM	BCl3 MFC set to  0.000000
10/5/2011	4:55:10 PM	PHl3 MFC set to  0.000000
10/5/2011	4:55:10 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:55:10 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:55:10 PM	Tube furnace set to 200
10/5/2011	4:55:40 PM	Helium valve closed
10/5/2011	4:55:40 PM	H2 valve closed
10/5/2011	4:55:40 PM	BCl3 valve closed
10/5/2011	4:55:40 PM	PH3 valve closed
10/5/2011	4:55:40 PM	SiCl4 pre valve closed
10/5/2011	4:55:40 PM	SiCl4 post valve closed
10/5/2011	4:55:40 PM	Bypass valve closed
10/5/2011	4:55:40 PM	Bubbler valve closed
10/5/2011	4:55:40 PM	Main Vac valve opened
10/5/2011	4:55:40 PM	Helium MFC set to  0.000000
10/5/2011	4:55:40 PM	H2 MFC set to  0.000000
10/5/2011	4:55:40 PM	BCl3 MFC set to  0.000000
10/5/2011	4:55:40 PM	PHl3 MFC set to  0.000000
10/5/2011	4:55:40 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:55:40 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:55:40 PM	Tube furnace set to 200
10/5/2011	4:56:10 PM	H2 valve closed
10/5/2011	4:56:10 PM	BCl3 valve closed
10/5/2011	4:56:10 PM	PH3 valve closed
10/5/2011	4:56:10 PM	SiCl4 pre valve closed
10/5/2011	4:56:10 PM	SiCl4 post valve closed
10/5/2011	4:56:10 PM	Bypass valve closed
10/5/2011	4:56:10 PM	Bubbler valve closed
10/5/2011	4:56:10 PM	Helium valve opened
10/5/2011	4:56:10 PM	Main Vac valve opened
10/5/2011	4:56:10 PM	Helium MFC set to  20.000000
10/5/2011	4:56:10 PM	H2 MFC set to  0.000000
10/5/2011	4:56:10 PM	BCl3 MFC set to  0.000000
10/5/2011	4:56:10 PM	PHl3 MFC set to  0.000000
10/5/2011	4:56:10 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:56:10 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:56:11 PM	Tube furnace set to 200
10/5/2011	4:56:41 PM	Helium valve closed
10/5/2011	4:56:41 PM	H2 valve closed
10/5/2011	4:56:41 PM	BCl3 valve closed
10/5/2011	4:56:41 PM	PH3 valve closed
10/5/2011	4:56:41 PM	SiCl4 pre valve closed
10/5/2011	4:56:41 PM	SiCl4 post valve closed
10/5/2011	4:56:41 PM	Bypass valve closed
10/5/2011	4:56:41 PM	Bubbler valve closed
10/5/2011	4:56:41 PM	Main Vac valve opened
10/5/2011	4:56:41 PM	Helium MFC set to  0.000000
10/5/2011	4:56:41 PM	H2 MFC set to  0.000000
10/5/2011	4:56:41 PM	BCl3 MFC set to  0.000000
10/5/2011	4:56:41 PM	PHl3 MFC set to  0.000000
10/5/2011	4:56:41 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:56:41 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:56:41 PM	Tube furnace set to 200
10/5/2011	4:57:11 PM	H2 valve closed
10/5/2011	4:57:11 PM	BCl3 valve closed
10/5/2011	4:57:11 PM	PH3 valve closed
10/5/2011	4:57:11 PM	SiCl4 pre valve closed
10/5/2011	4:57:11 PM	SiCl4 post valve closed
10/5/2011	4:57:11 PM	Bypass valve closed
10/5/2011	4:57:11 PM	Bubbler valve closed
10/5/2011	4:57:11 PM	Helium valve opened
10/5/2011	4:57:11 PM	Main Vac valve opened
10/5/2011	4:57:11 PM	Helium MFC set to  20.000000
10/5/2011	4:57:11 PM	H2 MFC set to  0.000000
10/5/2011	4:57:11 PM	BCl3 MFC set to  0.000000
10/5/2011	4:57:11 PM	PHl3 MFC set to  0.000000
10/5/2011	4:57:11 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:57:11 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:57:11 PM	Tube furnace set to 200
10/5/2011	4:57:41 PM	Helium valve closed
10/5/2011	4:57:41 PM	H2 valve closed
10/5/2011	4:57:41 PM	BCl3 valve closed
10/5/2011	4:57:41 PM	PH3 valve closed
10/5/2011	4:57:41 PM	SiCl4 pre valve closed
10/5/2011	4:57:41 PM	SiCl4 post valve closed
10/5/2011	4:57:41 PM	Bypass valve closed
10/5/2011	4:57:41 PM	Bubbler valve closed
10/5/2011	4:57:41 PM	Main Vac valve opened
10/5/2011	4:57:41 PM	Helium MFC set to  0.000000
10/5/2011	4:57:41 PM	H2 MFC set to  0.000000
10/5/2011	4:57:41 PM	BCl3 MFC set to  0.000000
10/5/2011	4:57:41 PM	PHl3 MFC set to  0.000000
10/5/2011	4:57:41 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:57:41 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:57:41 PM	Tube furnace set to 200
10/5/2011	4:58:11 PM	H2 valve closed
10/5/2011	4:58:11 PM	BCl3 valve closed
10/5/2011	4:58:11 PM	PH3 valve closed
10/5/2011	4:58:11 PM	SiCl4 pre valve closed
10/5/2011	4:58:11 PM	SiCl4 post valve closed
10/5/2011	4:58:11 PM	Bypass valve closed
10/5/2011	4:58:11 PM	Bubbler valve closed
10/5/2011	4:58:11 PM	Helium valve opened
10/5/2011	4:58:11 PM	Main Vac valve opened
10/5/2011	4:58:11 PM	Helium MFC set to  20.000000
10/5/2011	4:58:11 PM	H2 MFC set to  0.000000
10/5/2011	4:58:11 PM	BCl3 MFC set to  0.000000
10/5/2011	4:58:11 PM	PHl3 MFC set to  0.000000
10/5/2011	4:58:11 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:58:11 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:58:11 PM	Tube furnace set to 200
10/5/2011	4:58:41 PM	Helium valve closed
10/5/2011	4:58:41 PM	H2 valve closed
10/5/2011	4:58:41 PM	BCl3 valve closed
10/5/2011	4:58:41 PM	PH3 valve closed
10/5/2011	4:58:41 PM	SiCl4 pre valve closed
10/5/2011	4:58:41 PM	SiCl4 post valve closed
10/5/2011	4:58:41 PM	Bypass valve closed
10/5/2011	4:58:41 PM	Bubbler valve closed
10/5/2011	4:58:41 PM	Main Vac valve opened
10/5/2011	4:58:41 PM	Helium MFC set to  0.000000
10/5/2011	4:58:41 PM	H2 MFC set to  0.000000
10/5/2011	4:58:41 PM	BCl3 MFC set to  0.000000
10/5/2011	4:58:41 PM	PHl3 MFC set to  0.000000
10/5/2011	4:58:41 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:58:41 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:58:42 PM	Tube furnace set to 200
10/5/2011	4:59:12 PM	H2 valve closed
10/5/2011	4:59:12 PM	BCl3 valve closed
10/5/2011	4:59:12 PM	PH3 valve closed
10/5/2011	4:59:12 PM	SiCl4 pre valve closed
10/5/2011	4:59:12 PM	SiCl4 post valve closed
10/5/2011	4:59:12 PM	Bypass valve closed
10/5/2011	4:59:12 PM	Bubbler valve closed
10/5/2011	4:59:12 PM	Helium valve opened
10/5/2011	4:59:12 PM	Main Vac valve opened
10/5/2011	4:59:12 PM	Helium MFC set to  20.000000
10/5/2011	4:59:12 PM	H2 MFC set to  0.000000
10/5/2011	4:59:12 PM	BCl3 MFC set to  0.000000
10/5/2011	4:59:12 PM	PHl3 MFC set to  0.000000
10/5/2011	4:59:12 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:59:12 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:59:12 PM	Tube furnace set to 200
10/5/2011	4:59:42 PM	Helium valve closed
10/5/2011	4:59:42 PM	H2 valve closed
10/5/2011	4:59:42 PM	BCl3 valve closed
10/5/2011	4:59:42 PM	PH3 valve closed
10/5/2011	4:59:42 PM	SiCl4 pre valve closed
10/5/2011	4:59:42 PM	SiCl4 post valve closed
10/5/2011	4:59:42 PM	Bypass valve closed
10/5/2011	4:59:42 PM	Bubbler valve closed
10/5/2011	4:59:42 PM	Main Vac valve opened
10/5/2011	4:59:42 PM	Helium MFC set to  0.000000
10/5/2011	4:59:42 PM	H2 MFC set to  0.000000
10/5/2011	4:59:42 PM	BCl3 MFC set to  0.000000
10/5/2011	4:59:42 PM	PHl3 MFC set to  0.000000
10/5/2011	4:59:42 PM	SiCl4 MFC set to  0.000000
10/5/2011	4:59:42 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	4:59:42 PM	Tube furnace set to 200
10/5/2011	5:00:12 PM	H2 valve closed
10/5/2011	5:00:12 PM	BCl3 valve closed
10/5/2011	5:00:12 PM	PH3 valve closed
10/5/2011	5:00:12 PM	SiCl4 pre valve closed
10/5/2011	5:00:12 PM	SiCl4 post valve closed
10/5/2011	5:00:12 PM	Bypass valve closed
10/5/2011	5:00:12 PM	Bubbler valve closed
10/5/2011	5:00:12 PM	Helium valve opened
10/5/2011	5:00:12 PM	Main Vac valve opened
10/5/2011	5:00:12 PM	Helium MFC set to  20.000000
10/5/2011	5:00:12 PM	H2 MFC set to  0.000000
10/5/2011	5:00:12 PM	BCl3 MFC set to  0.000000
10/5/2011	5:00:12 PM	PHl3 MFC set to  0.000000
10/5/2011	5:00:12 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:00:12 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:00:12 PM	Tube furnace set to 200
10/5/2011	5:00:42 PM	Helium valve closed
10/5/2011	5:00:42 PM	H2 valve closed
10/5/2011	5:00:42 PM	BCl3 valve closed
10/5/2011	5:00:42 PM	PH3 valve closed
10/5/2011	5:00:42 PM	SiCl4 pre valve closed
10/5/2011	5:00:42 PM	SiCl4 post valve closed
10/5/2011	5:00:42 PM	Bypass valve closed
10/5/2011	5:00:42 PM	Bubbler valve closed
10/5/2011	5:00:42 PM	Main Vac valve opened
10/5/2011	5:00:42 PM	Helium MFC set to  0.000000
10/5/2011	5:00:42 PM	H2 MFC set to  0.000000
10/5/2011	5:00:42 PM	BCl3 MFC set to  0.000000
10/5/2011	5:00:42 PM	PHl3 MFC set to  0.000000
10/5/2011	5:00:42 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:00:42 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:00:43 PM	Tube furnace set to 200
10/5/2011	5:01:13 PM	H2 valve closed
10/5/2011	5:01:13 PM	BCl3 valve closed
10/5/2011	5:01:13 PM	PH3 valve closed
10/5/2011	5:01:13 PM	SiCl4 pre valve closed
10/5/2011	5:01:13 PM	SiCl4 post valve closed
10/5/2011	5:01:13 PM	Bypass valve closed
10/5/2011	5:01:13 PM	Bubbler valve closed
10/5/2011	5:01:13 PM	Helium valve opened
10/5/2011	5:01:13 PM	Main Vac valve opened
10/5/2011	5:01:13 PM	Helium MFC set to  20.000000
10/5/2011	5:01:13 PM	H2 MFC set to  0.000000
10/5/2011	5:01:13 PM	BCl3 MFC set to  0.000000
10/5/2011	5:01:13 PM	PHl3 MFC set to  0.000000
10/5/2011	5:01:13 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:01:13 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:01:13 PM	Tube furnace set to 200
10/5/2011	5:01:43 PM	Helium valve closed
10/5/2011	5:01:43 PM	H2 valve closed
10/5/2011	5:01:43 PM	BCl3 valve closed
10/5/2011	5:01:43 PM	PH3 valve closed
10/5/2011	5:01:43 PM	SiCl4 pre valve closed
10/5/2011	5:01:43 PM	SiCl4 post valve closed
10/5/2011	5:01:43 PM	Bypass valve closed
10/5/2011	5:01:43 PM	Bubbler valve closed
10/5/2011	5:01:43 PM	Main Vac valve opened
10/5/2011	5:01:43 PM	Helium MFC set to  0.000000
10/5/2011	5:01:43 PM	H2 MFC set to  0.000000
10/5/2011	5:01:43 PM	BCl3 MFC set to  0.000000
10/5/2011	5:01:43 PM	PHl3 MFC set to  0.000000
10/5/2011	5:01:43 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:01:43 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:01:43 PM	Tube furnace set to 200
10/5/2011	5:01:44 PM	Run finished at 5:01 PM
10/5/2011	5:03:12 PM	Recipe started at 5:03 PM
10/5/2011	5:03:12 PM	Helium valve closed
10/5/2011	5:03:12 PM	H2 valve closed
10/5/2011	5:03:12 PM	BCl3 valve closed
10/5/2011	5:03:12 PM	PH3 valve closed
10/5/2011	5:03:12 PM	SiCl4 pre valve closed
10/5/2011	5:03:12 PM	SiCl4 post valve closed
10/5/2011	5:03:12 PM	Bypass valve closed
10/5/2011	5:03:12 PM	Bubbler valve closed
10/5/2011	5:03:12 PM	Main Vac valve opened
10/5/2011	5:03:12 PM	Helium MFC set to  0.000000
10/5/2011	5:03:12 PM	H2 MFC set to  0.000000
10/5/2011	5:03:12 PM	BCl3 MFC set to  0.000000
10/5/2011	5:03:12 PM	PHl3 MFC set to  0.000000
10/5/2011	5:03:12 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:03:12 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:03:12 PM	Tube furnace set to 200
10/5/2011	5:03:16 PM	H2 valve closed
10/5/2011	5:03:16 PM	BCl3 valve closed
10/5/2011	5:03:16 PM	PH3 valve closed
10/5/2011	5:03:16 PM	SiCl4 pre valve closed
10/5/2011	5:03:16 PM	SiCl4 post valve closed
10/5/2011	5:03:16 PM	Bypass valve closed
10/5/2011	5:03:16 PM	Bubbler valve closed
10/5/2011	5:03:16 PM	Helium valve opened
10/5/2011	5:03:16 PM	Main Vac valve opened
10/5/2011	5:03:16 PM	Helium MFC set to  20.000000
10/5/2011	5:03:16 PM	H2 MFC set to  0.000000
10/5/2011	5:03:16 PM	BCl3 MFC set to  0.000000
10/5/2011	5:03:16 PM	PHl3 MFC set to  0.000000
10/5/2011	5:03:16 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:03:16 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:03:17 PM	Tube furnace set to 200
10/5/2011	5:03:18 PM	Helium valve closed
10/5/2011	5:03:18 PM	H2 valve closed
10/5/2011	5:03:18 PM	BCl3 valve closed
10/5/2011	5:03:18 PM	PH3 valve closed
10/5/2011	5:03:18 PM	SiCl4 pre valve closed
10/5/2011	5:03:18 PM	SiCl4 post valve closed
10/5/2011	5:03:18 PM	Bypass valve closed
10/5/2011	5:03:18 PM	Bubbler valve closed
10/5/2011	5:03:18 PM	Main Vac valve opened
10/5/2011	5:03:18 PM	Helium MFC set to  0.000000
10/5/2011	5:03:18 PM	H2 MFC set to  0.000000
10/5/2011	5:03:18 PM	BCl3 MFC set to  0.000000
10/5/2011	5:03:18 PM	PHl3 MFC set to  0.000000
10/5/2011	5:03:18 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:03:18 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:03:18 PM	Tube furnace set to 200
10/5/2011	5:03:19 PM	H2 valve closed
10/5/2011	5:03:19 PM	BCl3 valve closed
10/5/2011	5:03:19 PM	PH3 valve closed
10/5/2011	5:03:19 PM	SiCl4 pre valve closed
10/5/2011	5:03:19 PM	SiCl4 post valve closed
10/5/2011	5:03:19 PM	Bypass valve closed
10/5/2011	5:03:19 PM	Bubbler valve closed
10/5/2011	5:03:19 PM	Helium valve opened
10/5/2011	5:03:19 PM	Main Vac valve opened
10/5/2011	5:03:19 PM	Helium MFC set to  20.000000
10/5/2011	5:03:19 PM	H2 MFC set to  0.000000
10/5/2011	5:03:19 PM	BCl3 MFC set to  0.000000
10/5/2011	5:03:19 PM	PHl3 MFC set to  0.000000
10/5/2011	5:03:19 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:03:19 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:03:20 PM	Tube furnace set to 200
10/5/2011	5:03:50 PM	Helium valve closed
10/5/2011	5:03:50 PM	H2 valve closed
10/5/2011	5:03:50 PM	BCl3 valve closed
10/5/2011	5:03:50 PM	PH3 valve closed
10/5/2011	5:03:50 PM	SiCl4 pre valve closed
10/5/2011	5:03:50 PM	SiCl4 post valve closed
10/5/2011	5:03:50 PM	Bypass valve closed
10/5/2011	5:03:50 PM	Bubbler valve closed
10/5/2011	5:03:50 PM	Main Vac valve opened
10/5/2011	5:03:50 PM	Helium MFC set to  0.000000
10/5/2011	5:03:50 PM	H2 MFC set to  0.000000
10/5/2011	5:03:50 PM	BCl3 MFC set to  0.000000
10/5/2011	5:03:50 PM	PHl3 MFC set to  0.000000
10/5/2011	5:03:50 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:03:50 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:03:50 PM	Tube furnace set to 200
10/5/2011	5:04:20 PM	H2 valve closed
10/5/2011	5:04:20 PM	BCl3 valve closed
10/5/2011	5:04:20 PM	PH3 valve closed
10/5/2011	5:04:20 PM	SiCl4 pre valve closed
10/5/2011	5:04:20 PM	SiCl4 post valve closed
10/5/2011	5:04:20 PM	Bypass valve closed
10/5/2011	5:04:20 PM	Bubbler valve closed
10/5/2011	5:04:20 PM	Helium valve opened
10/5/2011	5:04:20 PM	Main Vac valve opened
10/5/2011	5:04:20 PM	Helium MFC set to  20.000000
10/5/2011	5:04:20 PM	H2 MFC set to  0.000000
10/5/2011	5:04:20 PM	BCl3 MFC set to  0.000000
10/5/2011	5:04:20 PM	PHl3 MFC set to  0.000000
10/5/2011	5:04:20 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:04:20 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:04:20 PM	Tube furnace set to 200
10/5/2011	5:04:50 PM	Helium valve closed
10/5/2011	5:04:50 PM	H2 valve closed
10/5/2011	5:04:50 PM	BCl3 valve closed
10/5/2011	5:04:50 PM	PH3 valve closed
10/5/2011	5:04:50 PM	SiCl4 pre valve closed
10/5/2011	5:04:50 PM	SiCl4 post valve closed
10/5/2011	5:04:50 PM	Bypass valve closed
10/5/2011	5:04:50 PM	Bubbler valve closed
10/5/2011	5:04:50 PM	Main Vac valve opened
10/5/2011	5:04:50 PM	Helium MFC set to  0.000000
10/5/2011	5:04:50 PM	H2 MFC set to  0.000000
10/5/2011	5:04:50 PM	BCl3 MFC set to  0.000000
10/5/2011	5:04:50 PM	PHl3 MFC set to  0.000000
10/5/2011	5:04:50 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:04:50 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:04:50 PM	Tube furnace set to 200
10/5/2011	5:05:20 PM	H2 valve closed
10/5/2011	5:05:20 PM	BCl3 valve closed
10/5/2011	5:05:20 PM	PH3 valve closed
10/5/2011	5:05:20 PM	SiCl4 pre valve closed
10/5/2011	5:05:20 PM	SiCl4 post valve closed
10/5/2011	5:05:20 PM	Bypass valve closed
10/5/2011	5:05:20 PM	Bubbler valve closed
10/5/2011	5:05:20 PM	Helium valve opened
10/5/2011	5:05:20 PM	Main Vac valve opened
10/5/2011	5:05:20 PM	Helium MFC set to  20.000000
10/5/2011	5:05:20 PM	H2 MFC set to  0.000000
10/5/2011	5:05:20 PM	BCl3 MFC set to  0.000000
10/5/2011	5:05:20 PM	PHl3 MFC set to  0.000000
10/5/2011	5:05:20 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:05:20 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:05:20 PM	Tube furnace set to 200
10/5/2011	5:05:50 PM	Helium valve closed
10/5/2011	5:05:50 PM	H2 valve closed
10/5/2011	5:05:50 PM	BCl3 valve closed
10/5/2011	5:05:50 PM	PH3 valve closed
10/5/2011	5:05:50 PM	SiCl4 pre valve closed
10/5/2011	5:05:50 PM	SiCl4 post valve closed
10/5/2011	5:05:50 PM	Bypass valve closed
10/5/2011	5:05:50 PM	Bubbler valve closed
10/5/2011	5:05:50 PM	Main Vac valve opened
10/5/2011	5:05:50 PM	Helium MFC set to  0.000000
10/5/2011	5:05:50 PM	H2 MFC set to  0.000000
10/5/2011	5:05:50 PM	BCl3 MFC set to  0.000000
10/5/2011	5:05:50 PM	PHl3 MFC set to  0.000000
10/5/2011	5:05:50 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:05:50 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:05:51 PM	Tube furnace set to 200
10/5/2011	5:06:21 PM	H2 valve closed
10/5/2011	5:06:21 PM	BCl3 valve closed
10/5/2011	5:06:21 PM	PH3 valve closed
10/5/2011	5:06:21 PM	SiCl4 pre valve closed
10/5/2011	5:06:21 PM	SiCl4 post valve closed
10/5/2011	5:06:21 PM	Bypass valve closed
10/5/2011	5:06:21 PM	Bubbler valve closed
10/5/2011	5:06:21 PM	Helium valve opened
10/5/2011	5:06:21 PM	Main Vac valve opened
10/5/2011	5:06:21 PM	Helium MFC set to  20.000000
10/5/2011	5:06:21 PM	H2 MFC set to  0.000000
10/5/2011	5:06:21 PM	BCl3 MFC set to  0.000000
10/5/2011	5:06:21 PM	PHl3 MFC set to  0.000000
10/5/2011	5:06:21 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:06:21 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:06:21 PM	Tube furnace set to 200
10/5/2011	5:06:51 PM	Helium valve closed
10/5/2011	5:06:51 PM	H2 valve closed
10/5/2011	5:06:51 PM	BCl3 valve closed
10/5/2011	5:06:51 PM	PH3 valve closed
10/5/2011	5:06:51 PM	SiCl4 pre valve closed
10/5/2011	5:06:51 PM	SiCl4 post valve closed
10/5/2011	5:06:51 PM	Bypass valve closed
10/5/2011	5:06:51 PM	Bubbler valve closed
10/5/2011	5:06:51 PM	Main Vac valve opened
10/5/2011	5:06:51 PM	Helium MFC set to  0.000000
10/5/2011	5:06:51 PM	H2 MFC set to  0.000000
10/5/2011	5:06:51 PM	BCl3 MFC set to  0.000000
10/5/2011	5:06:51 PM	PHl3 MFC set to  0.000000
10/5/2011	5:06:51 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:06:51 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:06:51 PM	Tube furnace set to 200
10/5/2011	5:07:21 PM	H2 valve closed
10/5/2011	5:07:21 PM	BCl3 valve closed
10/5/2011	5:07:21 PM	PH3 valve closed
10/5/2011	5:07:21 PM	SiCl4 pre valve closed
10/5/2011	5:07:21 PM	SiCl4 post valve closed
10/5/2011	5:07:21 PM	Bypass valve closed
10/5/2011	5:07:21 PM	Bubbler valve closed
10/5/2011	5:07:21 PM	Helium valve opened
10/5/2011	5:07:21 PM	Main Vac valve opened
10/5/2011	5:07:21 PM	Helium MFC set to  20.000000
10/5/2011	5:07:21 PM	H2 MFC set to  0.000000
10/5/2011	5:07:21 PM	BCl3 MFC set to  0.000000
10/5/2011	5:07:21 PM	PHl3 MFC set to  0.000000
10/5/2011	5:07:21 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:07:21 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:07:21 PM	Tube furnace set to 200
10/5/2011	5:07:51 PM	Helium valve closed
10/5/2011	5:07:51 PM	H2 valve closed
10/5/2011	5:07:51 PM	BCl3 valve closed
10/5/2011	5:07:51 PM	PH3 valve closed
10/5/2011	5:07:51 PM	SiCl4 pre valve closed
10/5/2011	5:07:51 PM	SiCl4 post valve closed
10/5/2011	5:07:51 PM	Bypass valve closed
10/5/2011	5:07:51 PM	Bubbler valve closed
10/5/2011	5:07:51 PM	Main Vac valve opened
10/5/2011	5:07:51 PM	Helium MFC set to  0.000000
10/5/2011	5:07:51 PM	H2 MFC set to  0.000000
10/5/2011	5:07:51 PM	BCl3 MFC set to  0.000000
10/5/2011	5:07:51 PM	PHl3 MFC set to  0.000000
10/5/2011	5:07:51 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:07:51 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:07:51 PM	Tube furnace set to 200
10/5/2011	5:08:22 PM	H2 valve closed
10/5/2011	5:08:22 PM	BCl3 valve closed
10/5/2011	5:08:22 PM	PH3 valve closed
10/5/2011	5:08:22 PM	SiCl4 pre valve closed
10/5/2011	5:08:22 PM	SiCl4 post valve closed
10/5/2011	5:08:22 PM	Bypass valve closed
10/5/2011	5:08:22 PM	Bubbler valve closed
10/5/2011	5:08:22 PM	Helium valve opened
10/5/2011	5:08:22 PM	Main Vac valve opened
10/5/2011	5:08:22 PM	Helium MFC set to  20.000000
10/5/2011	5:08:22 PM	H2 MFC set to  0.000000
10/5/2011	5:08:22 PM	BCl3 MFC set to  0.000000
10/5/2011	5:08:22 PM	PHl3 MFC set to  0.000000
10/5/2011	5:08:22 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:08:22 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:08:22 PM	Tube furnace set to 200
10/5/2011	5:08:52 PM	Helium valve closed
10/5/2011	5:08:52 PM	H2 valve closed
10/5/2011	5:08:52 PM	BCl3 valve closed
10/5/2011	5:08:52 PM	PH3 valve closed
10/5/2011	5:08:52 PM	SiCl4 pre valve closed
10/5/2011	5:08:52 PM	SiCl4 post valve closed
10/5/2011	5:08:52 PM	Bypass valve closed
10/5/2011	5:08:52 PM	Bubbler valve closed
10/5/2011	5:08:52 PM	Main Vac valve opened
10/5/2011	5:08:52 PM	Helium MFC set to  0.000000
10/5/2011	5:08:52 PM	H2 MFC set to  0.000000
10/5/2011	5:08:52 PM	BCl3 MFC set to  0.000000
10/5/2011	5:08:52 PM	PHl3 MFC set to  0.000000
10/5/2011	5:08:52 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:08:52 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:08:52 PM	Tube furnace set to 200
10/5/2011	5:09:22 PM	H2 valve closed
10/5/2011	5:09:22 PM	BCl3 valve closed
10/5/2011	5:09:22 PM	PH3 valve closed
10/5/2011	5:09:22 PM	SiCl4 pre valve closed
10/5/2011	5:09:22 PM	SiCl4 post valve closed
10/5/2011	5:09:22 PM	Bypass valve closed
10/5/2011	5:09:22 PM	Bubbler valve closed
10/5/2011	5:09:22 PM	Helium valve opened
10/5/2011	5:09:22 PM	Main Vac valve opened
10/5/2011	5:09:22 PM	Helium MFC set to  20.000000
10/5/2011	5:09:22 PM	H2 MFC set to  0.000000
10/5/2011	5:09:22 PM	BCl3 MFC set to  0.000000
10/5/2011	5:09:22 PM	PHl3 MFC set to  0.000000
10/5/2011	5:09:22 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:09:22 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:09:22 PM	Tube furnace set to 200
10/5/2011	5:09:52 PM	Helium valve closed
10/5/2011	5:09:52 PM	H2 valve closed
10/5/2011	5:09:52 PM	BCl3 valve closed
10/5/2011	5:09:52 PM	PH3 valve closed
10/5/2011	5:09:52 PM	SiCl4 pre valve closed
10/5/2011	5:09:52 PM	SiCl4 post valve closed
10/5/2011	5:09:52 PM	Bypass valve closed
10/5/2011	5:09:52 PM	Bubbler valve closed
10/5/2011	5:09:52 PM	Main Vac valve opened
10/5/2011	5:09:52 PM	Helium MFC set to  0.000000
10/5/2011	5:09:52 PM	H2 MFC set to  0.000000
10/5/2011	5:09:52 PM	BCl3 MFC set to  0.000000
10/5/2011	5:09:52 PM	PHl3 MFC set to  0.000000
10/5/2011	5:09:52 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:09:52 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:09:52 PM	Tube furnace set to 200
10/5/2011	5:10:22 PM	H2 valve closed
10/5/2011	5:10:22 PM	BCl3 valve closed
10/5/2011	5:10:22 PM	PH3 valve closed
10/5/2011	5:10:22 PM	SiCl4 pre valve closed
10/5/2011	5:10:22 PM	SiCl4 post valve closed
10/5/2011	5:10:22 PM	Bypass valve closed
10/5/2011	5:10:22 PM	Bubbler valve closed
10/5/2011	5:10:22 PM	Helium valve opened
10/5/2011	5:10:22 PM	Main Vac valve opened
10/5/2011	5:10:22 PM	Helium MFC set to  20.000000
10/5/2011	5:10:22 PM	H2 MFC set to  0.000000
10/5/2011	5:10:22 PM	BCl3 MFC set to  0.000000
10/5/2011	5:10:22 PM	PHl3 MFC set to  0.000000
10/5/2011	5:10:22 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:10:22 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:10:23 PM	Tube furnace set to 200
10/5/2011	5:10:53 PM	Helium valve closed
10/5/2011	5:10:53 PM	H2 valve closed
10/5/2011	5:10:53 PM	BCl3 valve closed
10/5/2011	5:10:53 PM	PH3 valve closed
10/5/2011	5:10:53 PM	SiCl4 pre valve closed
10/5/2011	5:10:53 PM	SiCl4 post valve closed
10/5/2011	5:10:53 PM	Bypass valve closed
10/5/2011	5:10:53 PM	Bubbler valve closed
10/5/2011	5:10:53 PM	Main Vac valve opened
10/5/2011	5:10:53 PM	Helium MFC set to  0.000000
10/5/2011	5:10:53 PM	H2 MFC set to  0.000000
10/5/2011	5:10:53 PM	BCl3 MFC set to  0.000000
10/5/2011	5:10:53 PM	PHl3 MFC set to  0.000000
10/5/2011	5:10:53 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:10:53 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:10:53 PM	Tube furnace set to 200
10/5/2011	5:11:23 PM	H2 valve closed
10/5/2011	5:11:23 PM	BCl3 valve closed
10/5/2011	5:11:23 PM	PH3 valve closed
10/5/2011	5:11:23 PM	SiCl4 pre valve closed
10/5/2011	5:11:23 PM	SiCl4 post valve closed
10/5/2011	5:11:23 PM	Bypass valve closed
10/5/2011	5:11:23 PM	Bubbler valve closed
10/5/2011	5:11:23 PM	Helium valve opened
10/5/2011	5:11:23 PM	Main Vac valve opened
10/5/2011	5:11:23 PM	Helium MFC set to  20.000000
10/5/2011	5:11:23 PM	H2 MFC set to  0.000000
10/5/2011	5:11:23 PM	BCl3 MFC set to  0.000000
10/5/2011	5:11:23 PM	PHl3 MFC set to  0.000000
10/5/2011	5:11:23 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:11:23 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:11:23 PM	Tube furnace set to 200
10/5/2011	5:11:53 PM	Helium valve closed
10/5/2011	5:11:53 PM	H2 valve closed
10/5/2011	5:11:53 PM	BCl3 valve closed
10/5/2011	5:11:53 PM	PH3 valve closed
10/5/2011	5:11:53 PM	SiCl4 pre valve closed
10/5/2011	5:11:53 PM	SiCl4 post valve closed
10/5/2011	5:11:53 PM	Bypass valve closed
10/5/2011	5:11:53 PM	Bubbler valve closed
10/5/2011	5:11:53 PM	Main Vac valve opened
10/5/2011	5:11:53 PM	Helium MFC set to  0.000000
10/5/2011	5:11:53 PM	H2 MFC set to  0.000000
10/5/2011	5:11:53 PM	BCl3 MFC set to  0.000000
10/5/2011	5:11:53 PM	PHl3 MFC set to  0.000000
10/5/2011	5:11:53 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:11:53 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:11:53 PM	Tube furnace set to 200
10/5/2011	5:11:54 PM	Run finished at 5:11 PM
10/5/2011	5:14:43 PM	Recipe started at 5:14 PM
10/5/2011	5:14:43 PM	Helium valve closed
10/5/2011	5:14:43 PM	H2 valve closed
10/5/2011	5:14:43 PM	BCl3 valve closed
10/5/2011	5:14:43 PM	PH3 valve closed
10/5/2011	5:14:43 PM	SiCl4 pre valve closed
10/5/2011	5:14:43 PM	SiCl4 post valve closed
10/5/2011	5:14:43 PM	Main Vac valve closed
10/5/2011	5:14:43 PM	Bypass valve closed
10/5/2011	5:14:43 PM	Bubbler valve closed
10/5/2011	5:14:43 PM	Helium MFC set to  0.000000
10/5/2011	5:14:43 PM	H2 MFC set to  0.000000
10/5/2011	5:14:43 PM	BCl3 MFC set to  0.000000
10/5/2011	5:14:43 PM	PHl3 MFC set to  0.000000
10/5/2011	5:14:43 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:14:43 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:14:43 PM	Tube furnace set to 0
10/5/2011	5:14:46 PM	Helium valve closed
10/5/2011	5:14:46 PM	BCl3 valve closed
10/5/2011	5:14:46 PM	PH3 valve closed
10/5/2011	5:14:46 PM	SiCl4 pre valve closed
10/5/2011	5:14:46 PM	SiCl4 post valve closed
10/5/2011	5:14:46 PM	Main Vac valve closed
10/5/2011	5:14:46 PM	Bypass valve closed
10/5/2011	5:14:46 PM	Bubbler valve closed
10/5/2011	5:14:46 PM	H2 valve opened
10/5/2011	5:14:46 PM	Helium MFC set to  0.000000
10/5/2011	5:14:46 PM	H2 MFC set to  500.000000
10/5/2011	5:14:46 PM	BCl3 MFC set to  0.000000
10/5/2011	5:14:46 PM	PHl3 MFC set to  0.000000
10/5/2011	5:14:46 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:14:46 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:14:46 PM	Tube furnace set to 0
10/5/2011	5:15:50 PM	Helium valve closed
10/5/2011	5:15:50 PM	BCl3 valve closed
10/5/2011	5:15:50 PM	PH3 valve closed
10/5/2011	5:15:50 PM	SiCl4 pre valve closed
10/5/2011	5:15:50 PM	SiCl4 post valve closed
10/5/2011	5:15:50 PM	Main Vac valve closed
10/5/2011	5:15:50 PM	Bypass valve closed
10/5/2011	5:15:50 PM	H2 valve opened
10/5/2011	5:15:50 PM	Bubbler valve opened
10/5/2011	5:15:50 PM	Helium MFC set to  0.000000
10/5/2011	5:15:50 PM	H2 MFC set to  500.000000
10/5/2011	5:15:50 PM	BCl3 MFC set to  0.000000
10/5/2011	5:15:50 PM	PHl3 MFC set to  0.000000
10/5/2011	5:15:50 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:15:50 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:15:50 PM	Tube furnace set to 0
10/5/2011	5:15:51 PM	Helium valve closed
10/5/2011	5:15:51 PM	BCl3 valve closed
10/5/2011	5:15:51 PM	PH3 valve closed
10/5/2011	5:15:51 PM	SiCl4 pre valve closed
10/5/2011	5:15:51 PM	SiCl4 post valve closed
10/5/2011	5:15:51 PM	Main Vac valve closed
10/5/2011	5:15:51 PM	Bypass valve closed
10/5/2011	5:15:51 PM	H2 valve opened
10/5/2011	5:15:51 PM	Bubbler valve opened
10/5/2011	5:15:51 PM	Helium MFC set to  0.000000
10/5/2011	5:15:51 PM	H2 MFC set to  500.000000
10/5/2011	5:15:51 PM	BCl3 MFC set to  0.000000
10/5/2011	5:15:51 PM	PHl3 MFC set to  0.000000
10/5/2011	5:15:51 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:15:51 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:15:51 PM	Tube furnace set to 1000
10/5/2011	5:35:51 PM	Helium valve closed
10/5/2011	5:35:51 PM	PH3 valve closed
10/5/2011	5:35:51 PM	Main Vac valve closed
10/5/2011	5:35:51 PM	Bypass valve closed
10/5/2011	5:35:51 PM	H2 valve opened
10/5/2011	5:35:51 PM	BCl3 valve opened
10/5/2011	5:35:51 PM	SiCl4 pre valve opened
10/5/2011	5:35:51 PM	SiCl4 post valve opened
10/5/2011	5:35:51 PM	Bubbler valve opened
10/5/2011	5:35:51 PM	Helium MFC set to  0.000000
10/5/2011	5:35:51 PM	H2 MFC set to  500.000000
10/5/2011	5:35:51 PM	BCl3 MFC set to  2.300000
10/5/2011	5:35:51 PM	PHl3 MFC set to  0.000000
10/5/2011	5:35:51 PM	SiCl4 MFC set to  25.000000
10/5/2011	5:35:51 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:35:51 PM	Tube furnace set to 1000
10/5/2011	5:51:51 PM	Helium valve closed
10/5/2011	5:51:51 PM	BCl3 valve closed
10/5/2011	5:51:51 PM	PH3 valve closed
10/5/2011	5:51:51 PM	SiCl4 pre valve closed
10/5/2011	5:51:51 PM	SiCl4 post valve closed
10/5/2011	5:51:51 PM	Main Vac valve closed
10/5/2011	5:51:51 PM	Bypass valve closed
10/5/2011	5:51:51 PM	H2 valve opened
10/5/2011	5:51:51 PM	Bubbler valve opened
10/5/2011	5:51:51 PM	Helium MFC set to  0.000000
10/5/2011	5:51:51 PM	H2 MFC set to  500.000000
10/5/2011	5:51:51 PM	BCl3 MFC set to  0.000000
10/5/2011	5:51:51 PM	PHl3 MFC set to  0.000000
10/5/2011	5:51:51 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:51:51 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:51:51 PM	Tube furnace set to 750
10/5/2011	5:56:51 PM	H2 valve closed
10/5/2011	5:56:51 PM	BCl3 valve closed
10/5/2011	5:56:51 PM	PH3 valve closed
10/5/2011	5:56:51 PM	SiCl4 pre valve closed
10/5/2011	5:56:51 PM	SiCl4 post valve closed
10/5/2011	5:56:51 PM	Main Vac valve closed
10/5/2011	5:56:51 PM	Bypass valve closed
10/5/2011	5:56:51 PM	Helium valve opened
10/5/2011	5:56:51 PM	Bubbler valve opened
10/5/2011	5:56:51 PM	Helium MFC set to  500.000000
10/5/2011	5:56:51 PM	H2 MFC set to  0.000000
10/5/2011	5:56:51 PM	BCl3 MFC set to  0.000000
10/5/2011	5:56:51 PM	PHl3 MFC set to  0.000000
10/5/2011	5:56:51 PM	SiCl4 MFC set to  0.000000
10/5/2011	5:56:51 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	5:56:52 PM	Tube furnace set to 0
10/5/2011	6:09:08 PM	Helium valve closed
10/5/2011	6:09:08 PM	H2 valve closed
10/5/2011	6:09:08 PM	BCl3 valve closed
10/5/2011	6:09:08 PM	PH3 valve closed
10/5/2011	6:09:08 PM	SiCl4 pre valve closed
10/5/2011	6:09:08 PM	SiCl4 post valve closed
10/5/2011	6:09:08 PM	Main Vac valve closed
10/5/2011	6:09:08 PM	Bubbler valve closed
10/5/2011	6:09:08 PM	Bypass valve closed
10/5/2011	6:09:08 PM	Helium MFC set to  0.000000
10/5/2011	6:09:08 PM	H2 MFC set to  0.000000
10/5/2011	6:09:08 PM	BCl3 MFC set to  0.000000
10/5/2011	6:09:08 PM	PHl3 MFC set to  0.000000
10/5/2011	6:09:08 PM	SiCl4 MFC set to  0.000000
10/5/2011	6:09:08 PM	Bypass solenoid MFC set to  760.000000
10/5/2011	6:09:08 PM	Tube furnace set to 0
10/5/2011	6:09:08 PM	Baratron reads 738.255837 Torr and NaOH valve is open.  Emergency exit.
10/5/2011	6:09:14 PM	Run aborted at 6:09 PM
10/5/2011	6:14:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2011	6:14:52 PM	Recipe started at 6:14 PM
10/5/2011	6:14:52 PM	Helium valve closed
10/5/2011	6:14:52 PM	H2 valve closed
10/5/2011	6:14:52 PM	BCl3 valve closed
10/5/2011	6:14:52 PM	PH3 valve closed
10/5/2011	6:14:52 PM	SiCl4 pre valve closed
10/5/2011	6:14:52 PM	SiCl4 post valve closed
10/5/2011	6:14:52 PM	Main Vac valve closed
10/5/2011	6:14:52 PM	Bubbler valve closed
10/5/2011	6:14:52 PM	Bypass valve opened
10/5/2011	6:14:52 PM	Helium MFC set to  0.000000
10/5/2011	6:14:52 PM	H2 MFC set to  0.000000
10/5/2011	6:14:52 PM	BCl3 MFC set to  0.000000
10/5/2011	6:14:52 PM	PHl3 MFC set to  0.000000
10/5/2011	6:14:52 PM	SiCl4 MFC set to  0.000000
10/5/2011	6:14:52 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	6:14:52 PM	Tube furnace set to 0
10/5/2011	6:16:03 PM	Helium valve closed
10/5/2011	6:16:03 PM	H2 valve closed
10/5/2011	6:16:03 PM	BCl3 valve closed
10/5/2011	6:16:03 PM	PH3 valve closed
10/5/2011	6:16:03 PM	SiCl4 pre valve closed
10/5/2011	6:16:03 PM	SiCl4 post valve closed
10/5/2011	6:16:03 PM	Main Vac valve closed
10/5/2011	6:16:03 PM	Bubbler valve closed
10/5/2011	6:16:03 PM	Bypass valve opened
10/5/2011	6:16:03 PM	Helium MFC set to  0.000000
10/5/2011	6:16:03 PM	H2 MFC set to  0.000000
10/5/2011	6:16:03 PM	BCl3 MFC set to  0.000000
10/5/2011	6:16:03 PM	PHl3 MFC set to  0.000000
10/5/2011	6:16:03 PM	SiCl4 MFC set to  0.000000
10/5/2011	6:16:03 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	6:16:03 PM	Tube furnace set to 0
10/5/2011	6:17:03 PM	Helium valve closed
10/5/2011	6:17:03 PM	H2 valve closed
10/5/2011	6:17:03 PM	BCl3 valve closed
10/5/2011	6:17:03 PM	PH3 valve closed
10/5/2011	6:17:03 PM	SiCl4 pre valve closed
10/5/2011	6:17:03 PM	SiCl4 post valve closed
10/5/2011	6:17:03 PM	Bypass valve closed
10/5/2011	6:17:03 PM	Bubbler valve closed
10/5/2011	6:17:03 PM	Main Vac valve opened
10/5/2011	6:17:03 PM	Helium MFC set to  0.000000
10/5/2011	6:17:03 PM	H2 MFC set to  0.000000
10/5/2011	6:17:03 PM	BCl3 MFC set to  0.000000
10/5/2011	6:17:03 PM	PHl3 MFC set to  0.000000
10/5/2011	6:17:03 PM	SiCl4 MFC set to  0.000000
10/5/2011	6:17:03 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	6:17:03 PM	Tube furnace set to 0
10/5/2011	6:17:04 PM	Run finished at 6:17 PM
10/5/2011	6:17:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2011	9:18:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/5/2011	9:18:24 PM	Recipe started at 9:18 PM
10/5/2011	9:18:24 PM	Helium valve closed
10/5/2011	9:18:24 PM	H2 valve closed
10/5/2011	9:18:24 PM	BCl3 valve closed
10/5/2011	9:18:24 PM	PH3 valve closed
10/5/2011	9:18:24 PM	SiCl4 pre valve closed
10/5/2011	9:18:24 PM	SiCl4 post valve closed
10/5/2011	9:18:24 PM	Main Vac valve closed
10/5/2011	9:18:24 PM	Bypass valve closed
10/5/2011	9:18:24 PM	Bubbler valve closed
10/5/2011	9:18:24 PM	Helium MFC set to  0.000000
10/5/2011	9:18:24 PM	H2 MFC set to  0.000000
10/5/2011	9:18:24 PM	BCl3 MFC set to  0.000000
10/5/2011	9:18:24 PM	PHl3 MFC set to  0.000000
10/5/2011	9:18:24 PM	SiCl4 MFC set to  0.000000
10/5/2011	9:18:24 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	9:18:24 PM	Tube furnace set to 0
10/5/2011	9:18:27 PM	H2 valve closed
10/5/2011	9:18:27 PM	BCl3 valve closed
10/5/2011	9:18:27 PM	PH3 valve closed
10/5/2011	9:18:27 PM	SiCl4 pre valve closed
10/5/2011	9:18:27 PM	SiCl4 post valve closed
10/5/2011	9:18:27 PM	Main Vac valve closed
10/5/2011	9:18:27 PM	Bypass valve closed
10/5/2011	9:18:27 PM	Bubbler valve closed
10/5/2011	9:18:27 PM	Helium valve opened
10/5/2011	9:18:27 PM	Helium MFC set to  500.000000
10/5/2011	9:18:27 PM	H2 MFC set to  0.000000
10/5/2011	9:18:27 PM	BCl3 MFC set to  0.000000
10/5/2011	9:18:27 PM	PHl3 MFC set to  0.000000
10/5/2011	9:18:27 PM	SiCl4 MFC set to  0.000000
10/5/2011	9:18:27 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	9:18:27 PM	Tube furnace set to 0
10/5/2011	9:19:33 PM	Helium valve closed
10/5/2011	9:19:33 PM	H2 valve closed
10/5/2011	9:19:33 PM	BCl3 valve closed
10/5/2011	9:19:33 PM	PH3 valve closed
10/5/2011	9:19:33 PM	SiCl4 pre valve closed
10/5/2011	9:19:34 PM	SiCl4 post valve closed
10/5/2011	9:19:34 PM	Main Vac valve closed
10/5/2011	9:19:34 PM	Bypass valve closed
10/5/2011	9:19:34 PM	Bubbler valve closed
10/5/2011	9:19:34 PM	Helium MFC set to  0.000000
10/5/2011	9:19:34 PM	H2 MFC set to  0.000000
10/5/2011	9:19:34 PM	BCl3 MFC set to  0.000000
10/5/2011	9:19:34 PM	PHl3 MFC set to  0.000000
10/5/2011	9:19:34 PM	SiCl4 MFC set to  0.000000
10/5/2011	9:19:34 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	9:19:34 PM	Tube furnace set to 0
10/5/2011	9:19:35 PM	Run finished at 9:19 PM
10/5/2011	9:19:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/5/2011	9:28:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2011	9:28:15 PM	Recipe started at 9:28 PM
10/5/2011	9:28:15 PM	Helium valve closed
10/5/2011	9:28:15 PM	H2 valve closed
10/5/2011	9:28:15 PM	BCl3 valve closed
10/5/2011	9:28:15 PM	PH3 valve closed
10/5/2011	9:28:15 PM	SiCl4 pre valve closed
10/5/2011	9:28:15 PM	SiCl4 post valve closed
10/5/2011	9:28:15 PM	Main Vac valve closed
10/5/2011	9:28:15 PM	Bubbler valve closed
10/5/2011	9:28:15 PM	Bypass valve opened
10/5/2011	9:28:15 PM	Helium MFC set to  0.000000
10/5/2011	9:28:15 PM	H2 MFC set to  0.000000
10/5/2011	9:28:15 PM	BCl3 MFC set to  0.000000
10/5/2011	9:28:15 PM	PHl3 MFC set to  0.000000
10/5/2011	9:28:15 PM	SiCl4 MFC set to  0.000000
10/5/2011	9:28:15 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	9:28:15 PM	Tube furnace set to 0
10/5/2011	9:28:59 PM	Helium valve closed
10/5/2011	9:28:59 PM	H2 valve closed
10/5/2011	9:28:59 PM	BCl3 valve closed
10/5/2011	9:28:59 PM	PH3 valve closed
10/5/2011	9:28:59 PM	SiCl4 pre valve closed
10/5/2011	9:28:59 PM	SiCl4 post valve closed
10/5/2011	9:28:59 PM	Main Vac valve closed
10/5/2011	9:28:59 PM	Bubbler valve closed
10/5/2011	9:28:59 PM	Bypass valve opened
10/5/2011	9:28:59 PM	Helium MFC set to  0.000000
10/5/2011	9:28:59 PM	H2 MFC set to  0.000000
10/5/2011	9:28:59 PM	BCl3 MFC set to  0.000000
10/5/2011	9:28:59 PM	PHl3 MFC set to  0.000000
10/5/2011	9:28:59 PM	SiCl4 MFC set to  0.000000
10/5/2011	9:28:59 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	9:28:59 PM	Tube furnace set to 0
10/5/2011	9:29:07 PM	Helium valve closed
10/5/2011	9:29:07 PM	H2 valve closed
10/5/2011	9:29:07 PM	BCl3 valve closed
10/5/2011	9:29:07 PM	PH3 valve closed
10/5/2011	9:29:07 PM	SiCl4 pre valve closed
10/5/2011	9:29:07 PM	SiCl4 post valve closed
10/5/2011	9:29:07 PM	Bypass valve closed
10/5/2011	9:29:07 PM	Bubbler valve closed
10/5/2011	9:29:07 PM	Main Vac valve opened
10/5/2011	9:29:07 PM	Helium MFC set to  0.000000
10/5/2011	9:29:07 PM	H2 MFC set to  0.000000
10/5/2011	9:29:07 PM	BCl3 MFC set to  0.000000
10/5/2011	9:29:07 PM	PHl3 MFC set to  0.000000
10/5/2011	9:29:07 PM	SiCl4 MFC set to  0.000000
10/5/2011	9:29:07 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	9:29:07 PM	Tube furnace set to 0
10/5/2011	9:29:08 PM	Run finished at 9:29 PM
10/5/2011	9:29:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2011	9:58:27 PM	Main Vac valve closed
10/5/2011	9:58:35 PM	Main Vac valve opened
10/5/2011	10:29:36 PM	Main Vac valve closed
10/5/2011	10:31:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2011	10:31:48 PM	Recipe started at 10:31 PM
10/5/2011	10:31:48 PM	Helium valve closed
10/5/2011	10:31:48 PM	H2 valve closed
10/5/2011	10:31:48 PM	BCl3 valve closed
10/5/2011	10:31:48 PM	PH3 valve closed
10/5/2011	10:31:48 PM	SiCl4 pre valve closed
10/5/2011	10:31:48 PM	SiCl4 post valve closed
10/5/2011	10:31:48 PM	Main Vac valve closed
10/5/2011	10:31:48 PM	Bubbler valve closed
10/5/2011	10:31:48 PM	Bypass valve opened
10/5/2011	10:31:48 PM	Helium MFC set to  0.000000
10/5/2011	10:31:48 PM	H2 MFC set to  0.000000
10/5/2011	10:31:48 PM	BCl3 MFC set to  0.000000
10/5/2011	10:31:48 PM	PHl3 MFC set to  0.000000
10/5/2011	10:31:48 PM	SiCl4 MFC set to  0.000000
10/5/2011	10:31:48 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:31:48 PM	Tube furnace set to 0
10/5/2011	10:33:16 PM	Helium valve closed
10/5/2011	10:33:16 PM	H2 valve closed
10/5/2011	10:33:16 PM	BCl3 valve closed
10/5/2011	10:33:16 PM	PH3 valve closed
10/5/2011	10:33:16 PM	SiCl4 pre valve closed
10/5/2011	10:33:16 PM	SiCl4 post valve closed
10/5/2011	10:33:16 PM	Main Vac valve closed
10/5/2011	10:33:16 PM	Bubbler valve closed
10/5/2011	10:33:16 PM	Bypass valve opened
10/5/2011	10:33:16 PM	Helium MFC set to  0.000000
10/5/2011	10:33:16 PM	H2 MFC set to  0.000000
10/5/2011	10:33:16 PM	BCl3 MFC set to  0.000000
10/5/2011	10:33:16 PM	PHl3 MFC set to  0.000000
10/5/2011	10:33:16 PM	SiCl4 MFC set to  0.000000
10/5/2011	10:33:16 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:33:16 PM	Tube furnace set to 0
10/5/2011	10:33:37 PM	Helium valve closed
10/5/2011	10:33:37 PM	H2 valve closed
10/5/2011	10:33:37 PM	BCl3 valve closed
10/5/2011	10:33:37 PM	PH3 valve closed
10/5/2011	10:33:37 PM	SiCl4 pre valve closed
10/5/2011	10:33:37 PM	SiCl4 post valve closed
10/5/2011	10:33:37 PM	Bypass valve closed
10/5/2011	10:33:37 PM	Bubbler valve closed
10/5/2011	10:33:37 PM	Main Vac valve opened
10/5/2011	10:33:37 PM	Helium MFC set to  0.000000
10/5/2011	10:33:37 PM	H2 MFC set to  0.000000
10/5/2011	10:33:37 PM	BCl3 MFC set to  0.000000
10/5/2011	10:33:37 PM	PHl3 MFC set to  0.000000
10/5/2011	10:33:37 PM	SiCl4 MFC set to  0.000000
10/5/2011	10:33:37 PM	Bypass solenoid MFC set to  0.000000
10/5/2011	10:33:37 PM	Tube furnace set to 0
10/5/2011	10:33:38 PM	Run finished at 10:33 PM
10/5/2011	10:33:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/5/2011	10:33:43 PM	Tube furnace set to 120
10/5/2011	10:55:09 PM	Main Vac valve closed
10/5/2011	10:55:14 PM	Main Vac valve opened
10/5/2011	10:55:19 PM	Tube furnace set to 150
